DE3484677D1 - Verfahren zum herstellen von einem muster mit feinen zwischenraeumen. - Google Patents

Verfahren zum herstellen von einem muster mit feinen zwischenraeumen.

Info

Publication number
DE3484677D1
DE3484677D1 DE8484402694T DE3484677T DE3484677D1 DE 3484677 D1 DE3484677 D1 DE 3484677D1 DE 8484402694 T DE8484402694 T DE 8484402694T DE 3484677 T DE3484677 T DE 3484677T DE 3484677 D1 DE3484677 D1 DE 3484677D1
Authority
DE
Germany
Prior art keywords
pattern
producing
fine spaces
spaces
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8484402694T
Other languages
English (en)
Inventor
Teiji Majima
Hiromichi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP58244334A external-priority patent/JPH0695503B2/ja
Priority claimed from JP24528783A external-priority patent/JPS60140725A/ja
Priority claimed from JP59208784A external-priority patent/JPS6187295A/ja
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3484677D1 publication Critical patent/DE3484677D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0332—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their composition, e.g. multilayer masks, materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0335—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by their behaviour during the process, e.g. soluble masks, redeposited masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0338—Process specially adapted to improve the resolution of the mask

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Thin Magnetic Films (AREA)
  • Magnetic Heads (AREA)
  • Hall/Mr Elements (AREA)
DE8484402694T 1983-12-26 1984-12-21 Verfahren zum herstellen von einem muster mit feinen zwischenraeumen. Expired - Fee Related DE3484677D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP58244334A JPH0695503B2 (ja) 1983-12-26 1983-12-26 パターン形成方法およびその実施に使用する装置
JP24528783A JPS60140725A (ja) 1983-12-28 1983-12-28 パタ−ン形成方法
JP59208784A JPS6187295A (ja) 1984-10-04 1984-10-04 イオン注入バブルメモリ素子の製造方法

Publications (1)

Publication Number Publication Date
DE3484677D1 true DE3484677D1 (de) 1991-07-11

Family

ID=27328926

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484402694T Expired - Fee Related DE3484677D1 (de) 1983-12-26 1984-12-21 Verfahren zum herstellen von einem muster mit feinen zwischenraeumen.

Country Status (4)

Country Link
US (1) US4597826A (de)
EP (1) EP0147322B1 (de)
CA (1) CA1260754A (de)
DE (1) DE3484677D1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5245335A (en) * 1984-03-06 1993-09-14 Comsource Systems Corp. Transceiver system for communication over wire laid along the path of guided/vehicles
US4696098A (en) * 1986-06-24 1987-09-29 Advanced Micro Devices, Inc. Metallization technique for integrated circuit structures
US4707218A (en) * 1986-10-28 1987-11-17 International Business Machines Corporation Lithographic image size reduction
US4838992A (en) * 1987-05-27 1989-06-13 Northern Telecom Limited Method of etching aluminum alloys in semi-conductor wafers
US4758306A (en) * 1987-08-17 1988-07-19 International Business Machines Corporation Stud formation method optimizing insulator gap-fill and metal hole-fill
US5407867A (en) * 1988-05-12 1995-04-18 Mitsubishki Denki Kabushiki Kaisha Method of forming a thin film on surface of semiconductor substrate
US5174881A (en) * 1988-05-12 1992-12-29 Mitsubishi Denki Kabushiki Kaisha Apparatus for forming a thin film on surface of semiconductor substrate
JP2501873B2 (ja) * 1988-06-23 1996-05-29 シャープ株式会社 薄膜磁気ヘッドの製造方法
FR2680276B1 (fr) * 1991-08-05 1997-04-25 Matra Mhs Procede de controle du profil de gravure d'une couche d'un circuit integre.
WO1993012520A1 (en) * 1991-12-17 1993-06-24 Certus Magnetics Magnetic disk medium with designed textured surfaces and controlled surface roughness and method of providing same
US5768075A (en) 1991-12-17 1998-06-16 Baradun R&D Ltd. Disk medium w/magnetically filled features aligned in rows and columns
US5300813A (en) 1992-02-26 1994-04-05 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias
JP2787646B2 (ja) * 1992-11-27 1998-08-20 三菱電機株式会社 半導体装置の製造方法
EP0794616B1 (de) * 1996-03-08 2003-01-29 Matsushita Electric Industrial Co., Ltd. Elektronisches Bauteil und Herstellungsverfahren
JP4208305B2 (ja) * 1998-09-17 2009-01-14 株式会社東芝 マスクパターンの形成方法
US6277704B1 (en) 2000-05-24 2001-08-21 Micron Technology, Inc. Microelectronic device fabricating method, method of forming a pair of conductive device components of different base widths from a common deposited conductive layer
GB0104611D0 (en) * 2001-02-23 2001-04-11 Koninkl Philips Electronics Nv Printing plates
US7288126B2 (en) * 2003-09-02 2007-10-30 Rechargeable Battery Corporation Battery cells having improved power characteristics and methods of manufacturing same
JP4510796B2 (ja) * 2006-11-22 2010-07-28 株式会社アルバック 磁気記憶媒体の製造方法
CN105023835B (zh) * 2015-06-17 2019-04-02 泰科天润半导体科技（北京）有限公司 介质掩膜的制造方法、利用该掩膜刻蚀或离子注入的方法
JP2017215561A (ja) 2016-05-30 2017-12-07 アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ ギャップフィリング組成物、およびポリマーを含んでなる組成物を用いたパターン形成方法
WO2017207452A1 (en) * 2016-05-30 2017-12-07 Az Electronic Materials (Luxembourg) S.A.R.L. Gap filling composition and pattern forming method using composition containing polymer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3563809A (en) * 1968-08-05 1971-02-16 Hughes Aircraft Co Method of making semiconductor devices with ion beams
US4172758A (en) * 1975-11-07 1979-10-30 Rockwell International Corporation Magnetic bubble domain device fabrication technique
US4053349A (en) * 1976-02-02 1977-10-11 Intel Corporation Method for forming a narrow gap
JPS5925308B2 (ja) * 1978-04-14 1984-06-16 株式会社日立製作所 磁気バブルメモリ素子及びその製造方法
JPS54155771A (en) * 1978-05-29 1979-12-08 Nec Corp Pattern forming method
US4400865A (en) * 1980-07-08 1983-08-30 International Business Machines Corporation Self-aligned metal process for integrated circuit metallization

Also Published As

Publication number Publication date
EP0147322B1 (de) 1991-06-05
EP0147322A2 (de) 1985-07-03
CA1260754A (en) 1989-09-26
US4597826A (en) 1986-07-01
EP0147322A3 (en) 1987-04-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee