DE3471368D1 - Interferometric thickness analyzer and measuring method - Google Patents
Interferometric thickness analyzer and measuring methodInfo
- Publication number
- DE3471368D1 DE3471368D1 DE8484113059T DE3471368T DE3471368D1 DE 3471368 D1 DE3471368 D1 DE 3471368D1 DE 8484113059 T DE8484113059 T DE 8484113059T DE 3471368 T DE3471368 T DE 3471368T DE 3471368 D1 DE3471368 D1 DE 3471368D1
- Authority
- DE
- Germany
- Prior art keywords
- measurement
- measuring method
- mirrors
- incident
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP84113059A EP0179935B1 (de) | 1984-10-31 | 1984-10-31 | Interferometrischer Dickenanalysierer und Messmethode |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3471368D1 true DE3471368D1 (en) | 1988-06-23 |
Family
ID=8192252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484113059T Expired DE3471368D1 (en) | 1984-10-31 | 1984-10-31 | Interferometric thickness analyzer and measuring method |
Country Status (4)
Country | Link |
---|---|
US (1) | US4653922A (de) |
EP (1) | EP0179935B1 (de) |
JP (1) | JPS61108904A (de) |
DE (1) | DE3471368D1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4747683A (en) * | 1986-01-17 | 1988-05-31 | Eye Research Institute Of Retina Foundation | Method and device for in vivo wetting determinations |
US5654798A (en) * | 1995-01-19 | 1997-08-05 | Tropel Corporation | Interferometric measurement of surfaces with diffractive optics at grazing incidence |
DE19602445A1 (de) * | 1996-01-24 | 1997-07-31 | Nanopro Luftlager Produktions | Vorrichtung und Verfahren zum Vermessen von zwei einander gegenüberliegenden Oberflächen eines Körpers |
US5719676A (en) * | 1996-04-12 | 1998-02-17 | Tropel Corporation | Diffraction management for grazing incidence interferometer |
EP0902874B1 (de) * | 1996-05-31 | 2004-01-28 | Tropel Corporation | Interferometer zur dickevariationsmessung von halbleitersubstraten |
US5889591A (en) * | 1996-10-17 | 1999-03-30 | Tropel Corporation | Interferometric measurement of toric surfaces at grazing incidence |
US5777738A (en) * | 1997-03-17 | 1998-07-07 | Tropel Corporation | Interferometric measurement of absolute dimensions of cylindrical surfaces at grazing incidence |
SE514004C2 (sv) * | 1998-03-20 | 2000-12-11 | Precimeter Ab | Tjockleksmätning med en detektor genom belysning av två ytor hos ett föremål, anordning, apparat och metod |
US6249351B1 (en) | 1999-06-03 | 2001-06-19 | Zygo Corporation | Grazing incidence interferometer and method |
JP5112588B2 (ja) * | 2000-01-25 | 2013-01-09 | ザイゴ コーポレーション | 精密工業部品の形状および幾何学的寸法を測定するための方法並びに装置 |
AU2001253139A1 (en) * | 2000-04-05 | 2001-10-23 | Kla-Tencor Corporation | Reduced coherence symmetric grazing incidence differential interferometer |
US6847458B2 (en) * | 2003-03-20 | 2005-01-25 | Phase Shift Technology, Inc. | Method and apparatus for measuring the shape and thickness variation of polished opaque plates |
NL2028788A (en) * | 2020-08-27 | 2022-04-29 | Asml Netherlands Bv | Compact dual pass interferometer for a plane mirror interferometer |
CN115560682B (zh) * | 2022-12-05 | 2023-02-03 | 上海拜安传感技术有限公司 | 一种位移测量装置及其制造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE708100A (de) * | 1967-05-05 | 1968-06-17 | ||
FR1562548A (de) * | 1967-05-05 | 1969-04-04 | ||
NL7404593A (en) * | 1974-04-04 | 1975-10-07 | Stichting Reactor Centrum | System with laser interferometer measuring relative positions - compares object beam with reference reflected from opposite sides of object |
SU759845A1 (ru) * | 1977-05-03 | 1980-08-30 | Aleksandr G Flejsher | ИНТЕРФЕРОМЕТР ДЛЯ ИЗМЕРЕНИЯ НАРУЖНЫХ РАЗМЕРОВ ДЕТАЛЕЙ 1 "" ' / |
DE2803466A1 (de) * | 1978-01-27 | 1979-08-02 | Erhard Dipl Ing Debler | Optisches ebenheitsmessverfahren |
-
1984
- 1984-10-31 EP EP84113059A patent/EP0179935B1/de not_active Expired
- 1984-10-31 DE DE8484113059T patent/DE3471368D1/de not_active Expired
-
1985
- 1985-03-08 US US06/709,862 patent/US4653922A/en not_active Expired - Fee Related
- 1985-06-18 JP JP60130939A patent/JPS61108904A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
EP0179935B1 (de) | 1988-05-18 |
JPH043806B2 (de) | 1992-01-24 |
JPS61108904A (ja) | 1986-05-27 |
US4653922A (en) | 1987-03-31 |
EP0179935A1 (de) | 1986-05-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |