NL7404593A - System with laser interferometer measuring relative positions - compares object beam with reference reflected from opposite sides of object - Google Patents

System with laser interferometer measuring relative positions - compares object beam with reference reflected from opposite sides of object

Info

Publication number
NL7404593A
NL7404593A NL7404593A NL7404593A NL7404593A NL 7404593 A NL7404593 A NL 7404593A NL 7404593 A NL7404593 A NL 7404593A NL 7404593 A NL7404593 A NL 7404593A NL 7404593 A NL7404593 A NL 7404593A
Authority
NL
Netherlands
Prior art keywords
opposite sides
relative positions
laser interferometer
object beam
measuring relative
Prior art date
Application number
NL7404593A
Other languages
Dutch (nl)
Original Assignee
Stichting Reactor Centrum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stichting Reactor Centrum filed Critical Stichting Reactor Centrum
Priority to NL7404593A priority Critical patent/NL7404593A/en
Publication of NL7404593A publication Critical patent/NL7404593A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Measuring system for determining the relative positions of the component parts of an object, using a laser interferometer. The object beam is compared with a reference beam in such a way that the beams are conveyed along a circuit via mirrors and prisms. The beams impinge on photo cells which are sensitive to the laser beam wavelength. The object beam is successively reflected on opposite sides of the object. A composition of polarising dividing mirrors and delay plate are used so as to prevent undesirable reflections and loss of light. the paths of the object beam and the reference beam are close to each other so as to eliminate differences in the external effects.
NL7404593A 1974-04-04 1974-04-04 System with laser interferometer measuring relative positions - compares object beam with reference reflected from opposite sides of object NL7404593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL7404593A NL7404593A (en) 1974-04-04 1974-04-04 System with laser interferometer measuring relative positions - compares object beam with reference reflected from opposite sides of object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7404593A NL7404593A (en) 1974-04-04 1974-04-04 System with laser interferometer measuring relative positions - compares object beam with reference reflected from opposite sides of object

Publications (1)

Publication Number Publication Date
NL7404593A true NL7404593A (en) 1975-10-07

Family

ID=19821111

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7404593A NL7404593A (en) 1974-04-04 1974-04-04 System with laser interferometer measuring relative positions - compares object beam with reference reflected from opposite sides of object

Country Status (1)

Country Link
NL (1) NL7404593A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0179935A1 (en) * 1984-10-31 1986-05-07 Ibm Deutschland Gmbh Interferometric thickness analyzer and measuring method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0179935A1 (en) * 1984-10-31 1986-05-07 Ibm Deutschland Gmbh Interferometric thickness analyzer and measuring method

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Legal Events

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