GB1345204A - Interferometer systems for sensing the idsplacement of an object - Google Patents

Interferometer systems for sensing the idsplacement of an object

Info

Publication number
GB1345204A
GB1345204A GB2400371A GB2400371A GB1345204A GB 1345204 A GB1345204 A GB 1345204A GB 2400371 A GB2400371 A GB 2400371A GB 2400371 A GB2400371 A GB 2400371A GB 1345204 A GB1345204 A GB 1345204A
Authority
GB
United Kingdom
Prior art keywords
plate
degrees
produce
beams
interlaced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2400371A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of GB1345204A publication Critical patent/GB1345204A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078Caused by ambiguity
    • G01B9/02079Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

1345204 Photo-electric interferometers THOMSON-CSF 19 April 1971 [13 March 1970] 24003/71 Heading G4H [Also in Division G1] An interferometer in which photo-electric detector means is used to produce interlaced waveforms representative of the displacement of the movable mirror, a #/8 plate is used to produce splitting into two beams of polarized light from a coherent source. In an arrangement for providing two interlaced waveforms, Fig. 1, a coherent light source La, e.g. a laser and polarizer P provide a beam polarized in a direction parallel to the bisector of the axes of elliptical polarization of birefringent, #/8 plate B. The action of the plate B is such as to produce beams I 1 , I 2 , passing semireflective plate L, which are phase separated by #/2 and interfere individually with the beam I 01 reflected from movable mirror MM to produce two fringe systems. The interfering light is analysed by a detection arrangement comprising semireflector L 1 and a pair of analyser/photodetector arrangements. The analysers are respectively parallel to the directions of polarisation of the beams I 1 , I 2 i.e. parallel to the axes of the plate B. Four interlaced waveforms may be provided from the outputs S 1 , S 2 of the detectors r 1 , r 2 by the use of summation and inversion circuits, Fig. 5 (not shown), to obtain the sum and difference of s 1 and s 2 besides using s 1 and s 2 themselves. An optical method of obtaining four interlaced waveforms, Fig. 3 (not shown) involves the use of three semireflectors and four analyser photodetector arrangements the analysers being angled respectively at -22À5 degrees, +22À5 degrees, +67À5 degrees and +112À5 degrees with respect to the X-axis of the plate B.
GB2400371A 1970-03-13 1971-04-19 Interferometer systems for sensing the idsplacement of an object Expired GB1345204A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7009098A FR2082403A5 (en) 1970-03-13 1970-03-13

Publications (1)

Publication Number Publication Date
GB1345204A true GB1345204A (en) 1974-01-30

Family

ID=9052235

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2400371A Expired GB1345204A (en) 1970-03-13 1971-04-19 Interferometer systems for sensing the idsplacement of an object

Country Status (3)

Country Link
DE (1) DE2111936C3 (en)
FR (1) FR2082403A5 (en)
GB (1) GB1345204A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1979000506A1 (en) * 1978-01-13 1979-08-09 Nat Res Dev Interferometer systems
DE2926738C2 (en) * 1979-07-03 1982-10-28 Ibm Deutschland Gmbh, 7000 Stuttgart Method for interferometric surface shape analysis
US4583855A (en) * 1984-02-17 1986-04-22 Lockheed Missiles & Space Company, Inc. Optical phase measuring apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1085350B (en) * 1957-07-02 1960-07-14 Leitz Ernst Gmbh Interferometer
NL6515207A (en) * 1965-11-24 1967-05-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers

Also Published As

Publication number Publication date
DE2111936C3 (en) 1981-04-23
DE2111936B2 (en) 1980-09-04
FR2082403A5 (en) 1971-12-10
DE2111936A1 (en) 1971-09-23

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee