GB1345204A - Interferometer systems for sensing the idsplacement of an object - Google Patents
Interferometer systems for sensing the idsplacement of an objectInfo
- Publication number
- GB1345204A GB1345204A GB2400371A GB2400371A GB1345204A GB 1345204 A GB1345204 A GB 1345204A GB 2400371 A GB2400371 A GB 2400371A GB 2400371 A GB2400371 A GB 2400371A GB 1345204 A GB1345204 A GB 1345204A
- Authority
- GB
- United Kingdom
- Prior art keywords
- plate
- degrees
- produce
- beams
- interlaced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
1345204 Photo-electric interferometers THOMSON-CSF 19 April 1971 [13 March 1970] 24003/71 Heading G4H [Also in Division G1] An interferometer in which photo-electric detector means is used to produce interlaced waveforms representative of the displacement of the movable mirror, a #/8 plate is used to produce splitting into two beams of polarized light from a coherent source. In an arrangement for providing two interlaced waveforms, Fig. 1, a coherent light source La, e.g. a laser and polarizer P provide a beam polarized in a direction parallel to the bisector of the axes of elliptical polarization of birefringent, #/8 plate B. The action of the plate B is such as to produce beams I 1 , I 2 , passing semireflective plate L, which are phase separated by #/2 and interfere individually with the beam I 01 reflected from movable mirror MM to produce two fringe systems. The interfering light is analysed by a detection arrangement comprising semireflector L 1 and a pair of analyser/photodetector arrangements. The analysers are respectively parallel to the directions of polarisation of the beams I 1 , I 2 i.e. parallel to the axes of the plate B. Four interlaced waveforms may be provided from the outputs S 1 , S 2 of the detectors r 1 , r 2 by the use of summation and inversion circuits, Fig. 5 (not shown), to obtain the sum and difference of s 1 and s 2 besides using s 1 and s 2 themselves. An optical method of obtaining four interlaced waveforms, Fig. 3 (not shown) involves the use of three semireflectors and four analyser photodetector arrangements the analysers being angled respectively at -22À5 degrees, +22À5 degrees, +67À5 degrees and +112À5 degrees with respect to the X-axis of the plate B.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7009098A FR2082403A5 (en) | 1970-03-13 | 1970-03-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1345204A true GB1345204A (en) | 1974-01-30 |
Family
ID=9052235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2400371A Expired GB1345204A (en) | 1970-03-13 | 1971-04-19 | Interferometer systems for sensing the idsplacement of an object |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE2111936C3 (en) |
FR (1) | FR2082403A5 (en) |
GB (1) | GB1345204A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4702603A (en) * | 1985-07-23 | 1987-10-27 | Cmx Systems, Inc. | Optical phase decoder for interferometers |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1979000506A1 (en) * | 1978-01-13 | 1979-08-09 | Nat Res Dev | Interferometer systems |
DE2926738C2 (en) * | 1979-07-03 | 1982-10-28 | Ibm Deutschland Gmbh, 7000 Stuttgart | Method for interferometric surface shape analysis |
US4583855A (en) * | 1984-02-17 | 1986-04-22 | Lockheed Missiles & Space Company, Inc. | Optical phase measuring apparatus |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1085350B (en) * | 1957-07-02 | 1960-07-14 | Leitz Ernst Gmbh | Interferometer |
NL6515207A (en) * | 1965-11-24 | 1967-05-25 |
-
1970
- 1970-03-13 FR FR7009098A patent/FR2082403A5/fr not_active Expired
-
1971
- 1971-03-12 DE DE19712111936 patent/DE2111936C3/en not_active Expired
- 1971-04-19 GB GB2400371A patent/GB1345204A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4702603A (en) * | 1985-07-23 | 1987-10-27 | Cmx Systems, Inc. | Optical phase decoder for interferometers |
Also Published As
Publication number | Publication date |
---|---|
DE2111936C3 (en) | 1981-04-23 |
DE2111936B2 (en) | 1980-09-04 |
FR2082403A5 (en) | 1971-12-10 |
DE2111936A1 (en) | 1971-09-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |