GB1367886A - Measuring apparatus - Google Patents
Measuring apparatusInfo
- Publication number
- GB1367886A GB1367886A GB5135770A GB5135770A GB1367886A GB 1367886 A GB1367886 A GB 1367886A GB 5135770 A GB5135770 A GB 5135770A GB 5135770 A GB5135770 A GB 5135770A GB 1367886 A GB1367886 A GB 1367886A
- Authority
- GB
- United Kingdom
- Prior art keywords
- grating
- patterns
- displacement
- producing
- defraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 abstract 4
- 230000002452 interceptive effect Effects 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
1367886 Measuring displacement TI (GROUP SERVICES) Ltd 29 Oet 1971 [29 Oct 1970] 51357/70 Heading G4H In a photo-electric displacement measuring system nth order defraction patterns from a grating are reflected back from a planar reflector on to the grating to produce further patterns co-linear with the initial light beam incident on the grating, the further patterns interfering and producing periodic maxima in intensity as the grating moves. In Fig. 1 light from a laser 11, polarized in orthogonal directions is directed by mirror 12 on to grating 13 producing first order defraction patterns 15, 16 which are reflected back on to the grating producing further first order defraction patterns, 21 and 24 of which are co-linear with the original incident laser beam. The two further patterns interfere to produce intensity maxima for increments of the grating displacement equal to one quarter grating width. Beam splitter 28 divides the beam produced by the interfering patterns on to photo-electric detectors 30, 32 via polarizers 29 and 31 whose axes are respectively perpendicular and parallel to the axis of an one eighth wavelength plate 25, introduced into beam 16, whereby mutually perpendicularly polarized beams are received by detectors 30 and 32 whose quadrature outputs therefore indicate the extent and displacement of the grating. The arrangement of Fig. 1 is used for determining the degree of flatness of a line or plane along or over which the grating is moved, any upward or downward movement of the grating indicating irregularities in the line or plane (Fig. 2, not shown). Two or three of such arrangements may be combined to give a two or three dimensional output (Fig. 4, not shown). Instead of mirrors 17 and 18 in Fig. 1 retro reflector prisms in combination with mirrors adjacent the laser source may be used (Fig. 3, not shown) thereby avoiding precise optical setting up of the apparatus.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5135770A GB1367886A (en) | 1971-10-29 | 1971-10-29 | Measuring apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5135770A GB1367886A (en) | 1971-10-29 | 1971-10-29 | Measuring apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1367886A true GB1367886A (en) | 1974-09-25 |
Family
ID=10459688
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5135770A Expired GB1367886A (en) | 1971-10-29 | 1971-10-29 | Measuring apparatus |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1367886A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60190812A (en) * | 1984-10-26 | 1985-09-28 | Hitachi Ltd | Position detector |
US4676645A (en) * | 1983-11-04 | 1987-06-30 | Sony Magnescale Incorporation | Optical instrument for measuring displacement |
US5000572A (en) * | 1987-05-11 | 1991-03-19 | Canon Kabushiki Kaisha | Distance measuring system |
US5026163A (en) * | 1987-08-25 | 1991-06-25 | Renishaw Plc | Straightness interferometer system |
EP0486050A2 (en) * | 1990-11-16 | 1992-05-20 | Canon Kabushiki Kaisha | Method and apparatus for measuring displacement |
WO1992019934A1 (en) * | 1991-05-07 | 1992-11-12 | Grigory Ivanovich Aponin | Device for determination of transverse displacement of objects |
US5327218A (en) * | 1990-11-16 | 1994-07-05 | Canon Kabushiki Kaisha | Method and apparatus for measuring displacement by using a diffracted inverted image projected on a diffraction grating |
CN115753021A (en) * | 2022-11-18 | 2023-03-07 | 同济大学 | Grating period calibration system based on self-tracing grating homodyne interference method |
-
1971
- 1971-10-29 GB GB5135770A patent/GB1367886A/en not_active Expired
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4676645A (en) * | 1983-11-04 | 1987-06-30 | Sony Magnescale Incorporation | Optical instrument for measuring displacement |
EP0311144A2 (en) * | 1983-11-04 | 1989-04-12 | Sony Magnescale, Inc. | Optical instrument for measuring displacement |
EP0311144A3 (en) * | 1983-11-04 | 1991-02-06 | Sony Magnescale, Inc. | Optical instrument for measuring displacement |
JPS60190812A (en) * | 1984-10-26 | 1985-09-28 | Hitachi Ltd | Position detector |
JPH0126005B2 (en) * | 1984-10-26 | 1989-05-22 | Hitachi Ltd | |
US5000572A (en) * | 1987-05-11 | 1991-03-19 | Canon Kabushiki Kaisha | Distance measuring system |
US5026163A (en) * | 1987-08-25 | 1991-06-25 | Renishaw Plc | Straightness interferometer system |
EP0486050A2 (en) * | 1990-11-16 | 1992-05-20 | Canon Kabushiki Kaisha | Method and apparatus for measuring displacement |
EP0486050A3 (en) * | 1990-11-16 | 1993-03-03 | Canon Kabushiki Kaisha | Method and apparatus for measuring displacement |
US5327218A (en) * | 1990-11-16 | 1994-07-05 | Canon Kabushiki Kaisha | Method and apparatus for measuring displacement by using a diffracted inverted image projected on a diffraction grating |
WO1992019934A1 (en) * | 1991-05-07 | 1992-11-12 | Grigory Ivanovich Aponin | Device for determination of transverse displacement of objects |
CN115753021A (en) * | 2022-11-18 | 2023-03-07 | 同济大学 | Grating period calibration system based on self-tracing grating homodyne interference method |
CN115753021B (en) * | 2022-11-18 | 2024-05-31 | 同济大学 | Grating period calibration system based on self-tracing grating homodyne interferometry |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3443871A (en) | Single optical block interferometer means | |
US4746216A (en) | Angle measuring interferometer | |
GB1409339A (en) | Interferometer system | |
US4717250A (en) | Angle measuring interferometer | |
GB1210930A (en) | Laser interferometer | |
US4436424A (en) | Interferometer using transverse deviation of test beam | |
GB1387745A (en) | Photo-electric head for an optical correlation velocity meter | |
GB1367886A (en) | Measuring apparatus | |
GB1143242A (en) | Two axis interferometer | |
US3529894A (en) | Interferometer employing a plurality of pairs of interfering beams | |
US3771875A (en) | Interferometer having d.c. level compensation | |
US3717404A (en) | Apparatus for determining the position of an object in an arbitrary cross-section of a beam of radiation | |
GB1176427A (en) | Correlators | |
GB1255362A (en) | Alignment apparatus | |
US3419331A (en) | Single and double beam interferometer means | |
GB1212641A (en) | A method for simultaneously and interferometrically detecting a plurality of dimensions | |
GB1190564A (en) | Method of and Means for Surface Measurement. | |
GB1428813A (en) | Polarization interferometer with beam polarizing and retarding mea ns | |
GB991710A (en) | Improvements in or relating to devices for measuring displacements | |
US4516854A (en) | Interferometric angular measurement system | |
GB1126744A (en) | Apparatus for producing interference fringes | |
US3495911A (en) | Extended range interferometer | |
RU2047085C1 (en) | Interferometer for measurement of translations of two-coordinate table | |
SU1620828A2 (en) | Device for measuring angular displacements of objects | |
SU1054677A1 (en) | Interference device for gauging displacement |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
435 | Patent endorsed 'licences of right' on the date specified (sect. 35/1949) | ||
PCNP | Patent ceased through non-payment of renewal fee |