JPS5740603A - Distortion measurement of object - Google Patents

Distortion measurement of object

Info

Publication number
JPS5740603A
JPS5740603A JP11560380A JP11560380A JPS5740603A JP S5740603 A JPS5740603 A JP S5740603A JP 11560380 A JP11560380 A JP 11560380A JP 11560380 A JP11560380 A JP 11560380A JP S5740603 A JPS5740603 A JP S5740603A
Authority
JP
Japan
Prior art keywords
thetao
thetas
laser beams
manner
distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11560380A
Other languages
Japanese (ja)
Other versions
JPS6127681B2 (en
Inventor
Ichiro Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP11560380A priority Critical patent/JPS5740603A/en
Publication of JPS5740603A publication Critical patent/JPS5740603A/en
Publication of JPS6127681B2 publication Critical patent/JPS6127681B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To measure the distortion of an object at a high accuracy by determining it depending on a difference of a speckle pattern in irradiation of two laser beams on a part of the surface of the material subjected to a deformation in such a manner as to be symmetrical to the surface normal. CONSTITUTION:Two laser beams 3 and 3' are irradiated on a part O of the surface of an object 1 subjected to deformation in such a manner as to be symmetrical to the surface normal F. The movement AX(thetaS, thetaO) and AX(-thetaS, thetaO) of a speakle pattern is detected with a photodetector 6 before and after the object is deformed by the beams to determine a difference DELTAAX. In this case, there is a relationship as shown by the equation (where, LO represents a distance between the surface of the object and that of observation, thetaS the incidence angle of the laser beams, thetaO angle between the object normal and the photodetector). This enables the determination of the distortion epsilonXX of the object in a noncontact manner thereby assuring a highly accurate measurement.
JP11560380A 1980-08-22 1980-08-22 Distortion measurement of object Granted JPS5740603A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11560380A JPS5740603A (en) 1980-08-22 1980-08-22 Distortion measurement of object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11560380A JPS5740603A (en) 1980-08-22 1980-08-22 Distortion measurement of object

Publications (2)

Publication Number Publication Date
JPS5740603A true JPS5740603A (en) 1982-03-06
JPS6127681B2 JPS6127681B2 (en) 1986-06-26

Family

ID=14666709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11560380A Granted JPS5740603A (en) 1980-08-22 1980-08-22 Distortion measurement of object

Country Status (1)

Country Link
JP (1) JPS5740603A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298707A (en) * 1986-06-05 1987-12-25 ブリティッシュ・テクノロジー・グループ・リミテッド Optical inspection method
US5568259A (en) * 1994-07-27 1996-10-22 Shimadzu Corporation Elongation measuring method and laser noncontact extensometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298707A (en) * 1986-06-05 1987-12-25 ブリティッシュ・テクノロジー・グループ・リミテッド Optical inspection method
US5568259A (en) * 1994-07-27 1996-10-22 Shimadzu Corporation Elongation measuring method and laser noncontact extensometer

Also Published As

Publication number Publication date
JPS6127681B2 (en) 1986-06-26

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