JPS57166503A - Method for measuring film thickness - Google Patents

Method for measuring film thickness

Info

Publication number
JPS57166503A
JPS57166503A JP5272181A JP5272181A JPS57166503A JP S57166503 A JPS57166503 A JP S57166503A JP 5272181 A JP5272181 A JP 5272181A JP 5272181 A JP5272181 A JP 5272181A JP S57166503 A JPS57166503 A JP S57166503A
Authority
JP
Japan
Prior art keywords
reflected
film thickness
laser beam
intensity
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5272181A
Other languages
Japanese (ja)
Inventor
Kazuo Tatsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5272181A priority Critical patent/JPS57166503A/en
Publication of JPS57166503A publication Critical patent/JPS57166503A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Abstract

PURPOSE:To eliminate the influence of variation in the intensity of laser beam during film thickness measurement which utilizes the laser beam, by separating the laser beam into two, reflecting one beam by the surface of a body to be measured, and using the ratio of the reflected beam and said other beam. CONSTITUTION:A laser beam 6 from a beam source 5 is split into a transmitted beam 8 and a reflected beam 9 through a half-mirror 7. The reflected beam 9 is reflected by a body 11 to be measured. The body to be measured is a one having a transparent film vapor-deposited on a transparent substrate, and the beam reflected on the surface of the transparent film and a beam reflected on a boudary surface between the transparent film and transparent substrate interferes to obtain an interference beam 12. From the intensity of the interference beam, film thickness is found. For this purpose, photodetectors 10 and 13 transduce the transmitted beam 8 and interference beam 12 into electric signals X and Y, and a comparator 14 finds a ratio Y/X, so that even if the laser beam 6 varies in intensity, the ratio is unchangeable, thus carrying out accurate measurement.
JP5272181A 1981-04-07 1981-04-07 Method for measuring film thickness Pending JPS57166503A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5272181A JPS57166503A (en) 1981-04-07 1981-04-07 Method for measuring film thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5272181A JPS57166503A (en) 1981-04-07 1981-04-07 Method for measuring film thickness

Publications (1)

Publication Number Publication Date
JPS57166503A true JPS57166503A (en) 1982-10-14

Family

ID=12922776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5272181A Pending JPS57166503A (en) 1981-04-07 1981-04-07 Method for measuring film thickness

Country Status (1)

Country Link
JP (1) JPS57166503A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5754297A (en) * 1994-01-28 1998-05-19 Applied Materials, Inc. Method and apparatus for monitoring the deposition rate of films during physical vapor deposition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5754297A (en) * 1994-01-28 1998-05-19 Applied Materials, Inc. Method and apparatus for monitoring the deposition rate of films during physical vapor deposition

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