JPS5497484A - Surface inspector - Google Patents

Surface inspector

Info

Publication number
JPS5497484A
JPS5497484A JP449578A JP449578A JPS5497484A JP S5497484 A JPS5497484 A JP S5497484A JP 449578 A JP449578 A JP 449578A JP 449578 A JP449578 A JP 449578A JP S5497484 A JPS5497484 A JP S5497484A
Authority
JP
Japan
Prior art keywords
specimen
level
generator
detection signal
surface condition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP449578A
Other languages
Japanese (ja)
Inventor
Mitsuhito Kamei
Keiji Nagamine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP449578A priority Critical patent/JPS5497484A/en
Publication of JPS5497484A publication Critical patent/JPS5497484A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To perform optical inspection of surface condition without effect of fluctuations of reflectance, aging, etc. of the specimen by forming a judgement level signal based on the detection signal from the normal part of the specimen with a judgement level generator. CONSTITUTION:The detection signal byreflected light from the specimen surface is compared with the reference level signal outputted by a judgement level generator 4 in a comparator 2 whereby the surface condition of the specimen is detected. This generator 4 generates the reference level signal lower by a fixed level with the detection signal level by the reflected light from the normal part of the specimen as a reference. Hence, the surface condition of the specimen may always be surely detected without effect of fluctuations of reflectance, aging, etc. of the specimen.
JP449578A 1978-01-18 1978-01-18 Surface inspector Pending JPS5497484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP449578A JPS5497484A (en) 1978-01-18 1978-01-18 Surface inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP449578A JPS5497484A (en) 1978-01-18 1978-01-18 Surface inspector

Publications (1)

Publication Number Publication Date
JPS5497484A true JPS5497484A (en) 1979-08-01

Family

ID=11585646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP449578A Pending JPS5497484A (en) 1978-01-18 1978-01-18 Surface inspector

Country Status (1)

Country Link
JP (1) JPS5497484A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5862549A (en) * 1981-10-12 1983-04-14 Toppan Printing Co Ltd Automatic defect inspection device
JPS62135751A (en) * 1985-12-10 1987-06-18 Toshiba Corp Surface inspection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5862549A (en) * 1981-10-12 1983-04-14 Toppan Printing Co Ltd Automatic defect inspection device
JPS62135751A (en) * 1985-12-10 1987-06-18 Toshiba Corp Surface inspection device

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