DE3446181C2 - - Google Patents
Info
- Publication number
- DE3446181C2 DE3446181C2 DE3446181A DE3446181A DE3446181C2 DE 3446181 C2 DE3446181 C2 DE 3446181C2 DE 3446181 A DE3446181 A DE 3446181A DE 3446181 A DE3446181 A DE 3446181A DE 3446181 C2 DE3446181 C2 DE 3446181C2
- Authority
- DE
- Germany
- Prior art keywords
- marking
- radiation
- signal
- detector
- synchronous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 32
- 230000005855 radiation Effects 0.000 claims description 32
- 230000001360 synchronised effect Effects 0.000 claims description 21
- 238000010894 electron beam technology Methods 0.000 claims description 19
- 230000010355 oscillation Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 5
- 238000011156 evaluation Methods 0.000 claims description 3
- 238000005070 sampling Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 36
- 230000008859 change Effects 0.000 description 24
- 238000006243 chemical reaction Methods 0.000 description 18
- 238000012545 processing Methods 0.000 description 18
- 230000000694 effects Effects 0.000 description 10
- 238000010079 rubber tapping Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000003550 marker Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 3
- 238000010023 transfer printing Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000003534 oscillatory effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58239392A JPH067043B2 (ja) | 1983-12-19 | 1983-12-19 | 位置検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3446181A1 DE3446181A1 (de) | 1985-07-04 |
| DE3446181C2 true DE3446181C2 (en, 2012) | 1992-06-17 |
Family
ID=17044098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19843446181 Granted DE3446181A1 (de) | 1983-12-19 | 1984-12-18 | Verfahren zum bestimmen der relativlage zwischen zwei teilen |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4642468A (en, 2012) |
| JP (1) | JPH067043B2 (en, 2012) |
| DE (1) | DE3446181A1 (en, 2012) |
| GB (1) | GB2151778B (en, 2012) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4861162A (en) * | 1985-05-16 | 1989-08-29 | Canon Kabushiki Kaisha | Alignment of an object |
| JP2526546B2 (ja) * | 1986-04-21 | 1996-08-21 | 日本電気株式会社 | 位置合わせ装置 |
| JPH0810123B2 (ja) * | 1986-09-12 | 1996-01-31 | 株式会社ニコン | 光学装置 |
| US4780616A (en) * | 1986-09-25 | 1988-10-25 | Nippon Kogaku K. K. | Projection optical apparatus for mask to substrate alignment |
| US4769534A (en) * | 1986-11-17 | 1988-09-06 | Tektronix, Inc. | Optical detector with storage effects reduction |
| GB8727963D0 (en) * | 1987-11-30 | 1988-01-06 | Atomic Energy Authority Uk | Displacement monitoring |
| EP0320122A3 (en) * | 1987-11-30 | 1992-04-29 | United Kingdom Atomic Energy Authority | A method of position monitoring and apparatus therefor |
| DE68904426T2 (de) * | 1989-07-08 | 1993-07-15 | Ibm | Verfahren und vorrichtung zur bestimmung einer linienmitte in einem mikrominiaturelement. |
| US6376836B1 (en) * | 1999-03-12 | 2002-04-23 | University Of Maryland | Disentangling sample topography and physical properties in scanning near-field microwave microscopy |
| JP3844940B2 (ja) * | 2000-03-27 | 2006-11-15 | 株式会社東芝 | マーク位置検出装置およびマーク位置検出方法 |
| GB0420441D0 (en) | 2004-09-14 | 2004-10-20 | Ncr Int Inc | Sensing arrangement |
| US11956738B2 (en) * | 2019-08-16 | 2024-04-09 | Mediatek Inc. | Automatic gain control for serving cell activation based on two different reference signals |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1448854B1 (de) * | 1963-02-23 | 1970-01-15 | Leitz Ernst Gmbh | Anordnung zur Bestimmung der Lage von Marken |
| DE1919991C3 (de) * | 1969-04-19 | 1973-11-29 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Anordnung zur automatischen Aus richtung von zwei aufeinander einzu justierenden Objekten |
-
1983
- 1983-12-19 JP JP58239392A patent/JPH067043B2/ja not_active Expired - Lifetime
-
1984
- 1984-12-13 US US06/681,491 patent/US4642468A/en not_active Expired - Lifetime
- 1984-12-13 GB GB08431533A patent/GB2151778B/en not_active Expired
- 1984-12-18 DE DE19843446181 patent/DE3446181A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB8431533D0 (en) | 1985-01-23 |
| DE3446181A1 (de) | 1985-07-04 |
| US4642468A (en) | 1987-02-10 |
| JPH067043B2 (ja) | 1994-01-26 |
| GB2151778A (en) | 1985-07-24 |
| GB2151778B (en) | 1987-06-03 |
| JPS60129604A (ja) | 1985-07-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |