DE69528948T2 - Verschiebungsinformationsmessgerät - Google Patents

Verschiebungsinformationsmessgerät

Info

Publication number
DE69528948T2
DE69528948T2 DE69528948T DE69528948T DE69528948T2 DE 69528948 T2 DE69528948 T2 DE 69528948T2 DE 69528948 T DE69528948 T DE 69528948T DE 69528948 T DE69528948 T DE 69528948T DE 69528948 T2 DE69528948 T2 DE 69528948T2
Authority
DE
Germany
Prior art keywords
information measuring
displacement information
displacement
measuring
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69528948T
Other languages
English (en)
Other versions
DE69528948D1 (de
Inventor
Shigeki Kato
Makoto Takamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24187594A external-priority patent/JP3491988B2/ja
Priority claimed from JP10119595A external-priority patent/JP3566392B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69528948D1 publication Critical patent/DE69528948D1/de
Application granted granted Critical
Publication of DE69528948T2 publication Critical patent/DE69528948T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/26—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the direct influence of the streaming fluid on the properties of a detecting optical wave
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
DE69528948T 1994-09-09 1995-09-08 Verschiebungsinformationsmessgerät Expired - Lifetime DE69528948T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP24187594A JP3491988B2 (ja) 1994-09-09 1994-09-09 レーザードップラー速度計
JP10119595A JP3566392B2 (ja) 1995-04-25 1995-04-25 変位情報測定装置

Publications (2)

Publication Number Publication Date
DE69528948D1 DE69528948D1 (de) 2003-01-09
DE69528948T2 true DE69528948T2 (de) 2003-04-24

Family

ID=26442111

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69528948T Expired - Lifetime DE69528948T2 (de) 1994-09-09 1995-09-08 Verschiebungsinformationsmessgerät

Country Status (3)

Country Link
US (1) US5815267A (de)
EP (1) EP0706064B1 (de)
DE (1) DE69528948T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6760060B1 (en) * 1996-02-16 2004-07-06 Mitsui Mining & Smelting Co., Ltd. Observation apparatus for observing a defect in a moving target object using scattered light
US6631047B2 (en) 1997-09-22 2003-10-07 Canon Kabushiki Kaisha Interference device, position detecting device, positioning device and information recording apparatus using the same
JPH11351813A (ja) 1998-06-08 1999-12-24 Canon Inc 干渉装置及びそれを用いた位置検出装置
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
EP1045227B2 (de) 1999-04-16 2012-04-18 Canon Kabushiki Kaisha Kodierer
JP2000321021A (ja) 1999-05-10 2000-11-24 Canon Inc 干渉装置、変位測定装置、及びそれを用いた情報記録又は／及び再生装置
JP4298093B2 (ja) 1999-11-10 2009-07-15 キヤノン株式会社 光学式回転位置情報検出装置
JP4593768B2 (ja) 1999-12-27 2010-12-08 キヤノン株式会社 光干渉装置及び位置検出装置
US6914682B2 (en) * 2001-10-25 2005-07-05 Canon Kabushiki Kaisha Interferometer and position measuring device
JP4514209B2 (ja) * 2004-10-15 2010-07-28 キヤノン株式会社 位置検出装置及び方法
DE102006015170B4 (de) * 2006-03-30 2016-09-22 Vienco Gmbh Verfahren und Anordnung zur Erzeugung eines vergrößerten Messvolumens zur Bestimmung der Struktur und/oder Spulgeschwindigkeit textiler Fasern auf Basis der Laser-Doppler-Anemometrie
US7502122B2 (en) * 2006-07-31 2009-03-10 Mitutoyo Corporation Fiber-optic miniature encoder for fine pitch scales
CN103364011B (zh) * 2013-07-11 2015-10-21 中国科学院西安光学精密机械研究所 超大视场多目标景物模拟系统
RU2617702C1 (ru) * 2015-12-31 2017-04-26 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский национальный исследовательский университет информационных технологий, механики и оптики" (Университет ИТМО) Голограммный баллистический гравиметр
RU2614160C2 (ru) 2016-03-13 2017-03-23 Александр Васильевич Дегтярев Тормозная муфта с универсальной самоцентрирующейся системой
US10653002B2 (en) * 2018-07-30 2020-05-12 Honeywell International Inc. Actively sensing and cancelling vibration in a printed circuit board or other platform

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2209667C3 (de) * 1972-03-01 1980-09-04 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zur beruhrungslosen Messung
JPH02263164A (ja) * 1989-04-04 1990-10-25 Secom Co Ltd 空間フィルタを用いた速度ベクトルの測定方法と装置
DE69119297T2 (de) * 1990-05-21 1997-01-02 Canon Kk Dopplergeschwindigkeitsmesser
JP2962819B2 (ja) * 1990-11-30 1999-10-12 キヤノン株式会社 変位測定装置
GB9115096D0 (en) * 1991-07-12 1991-08-28 Lucas Ind Plc Speed sensor

Also Published As

Publication number Publication date
DE69528948D1 (de) 2003-01-09
EP0706064A1 (de) 1996-04-10
EP0706064B1 (de) 2002-11-27
US5815267A (en) 1998-09-29

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Legal Events

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