DE3402549A1 - Molekularvakuumpumpe - Google Patents

Molekularvakuumpumpe

Info

Publication number
DE3402549A1
DE3402549A1 DE19843402549 DE3402549A DE3402549A1 DE 3402549 A1 DE3402549 A1 DE 3402549A1 DE 19843402549 DE19843402549 DE 19843402549 DE 3402549 A DE3402549 A DE 3402549A DE 3402549 A1 DE3402549 A1 DE 3402549A1
Authority
DE
Germany
Prior art keywords
openings
pump according
channel
disk
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19843402549
Other languages
German (de)
English (en)
Other versions
DE3402549C2 (en, 2012
Inventor
Franz Josef Dr. 5300 Bonn Schittko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19843402549 priority Critical patent/DE3402549A1/de
Publication of DE3402549A1 publication Critical patent/DE3402549A1/de
Application granted granted Critical
Publication of DE3402549C2 publication Critical patent/DE3402549C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE19843402549 1984-01-26 1984-01-26 Molekularvakuumpumpe Granted DE3402549A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19843402549 DE3402549A1 (de) 1984-01-26 1984-01-26 Molekularvakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843402549 DE3402549A1 (de) 1984-01-26 1984-01-26 Molekularvakuumpumpe

Publications (2)

Publication Number Publication Date
DE3402549A1 true DE3402549A1 (de) 1985-08-01
DE3402549C2 DE3402549C2 (en, 2012) 1991-10-10

Family

ID=6225904

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843402549 Granted DE3402549A1 (de) 1984-01-26 1984-01-26 Molekularvakuumpumpe

Country Status (1)

Country Link
DE (1) DE3402549A1 (en, 2012)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999061799A1 (de) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
EP1030062A3 (en) * 1999-02-19 2002-03-20 Ebara Corporation Turbo-molecular pump
EP1422423A1 (de) * 1998-05-26 2004-05-26 Leybold Vakuum GmbH Einrichtung mit evakuierbarer Kammer
US6926493B1 (en) 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
US7278822B2 (en) * 2003-07-15 2007-10-09 Pfieffer Vacuum Gmbh Turbomolecular pump
EP1580435A3 (de) * 2004-03-16 2009-12-30 Pfeiffer Vacuum GmbH Turbomolekularpumpe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2412624A1 (de) * 1973-03-30 1974-10-17 Cit Alcatel Molekularvakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2412624A1 (de) * 1973-03-30 1974-10-17 Cit Alcatel Molekularvakuumpumpe

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6926493B1 (en) 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
WO1999061799A1 (de) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
US6457954B1 (en) 1998-05-26 2002-10-01 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
EP1422423A1 (de) * 1998-05-26 2004-05-26 Leybold Vakuum GmbH Einrichtung mit evakuierbarer Kammer
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
EP1030062A3 (en) * 1999-02-19 2002-03-20 Ebara Corporation Turbo-molecular pump
US7278822B2 (en) * 2003-07-15 2007-10-09 Pfieffer Vacuum Gmbh Turbomolecular pump
EP1580435A3 (de) * 2004-03-16 2009-12-30 Pfeiffer Vacuum GmbH Turbomolekularpumpe
US8398362B2 (en) 2004-03-16 2013-03-19 Pfeiffer Vacuum Gmbh Turbomolecular pump

Also Published As

Publication number Publication date
DE3402549C2 (en, 2012) 1991-10-10

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8127 New person/name/address of the applicant

Owner name: LEYBOLD AG, 5000 KOELN, DE

8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee