DE3402549C2 - - Google Patents

Info

Publication number
DE3402549C2
DE3402549C2 DE3402549A DE3402549A DE3402549C2 DE 3402549 C2 DE3402549 C2 DE 3402549C2 DE 3402549 A DE3402549 A DE 3402549A DE 3402549 A DE3402549 A DE 3402549A DE 3402549 C2 DE3402549 C2 DE 3402549C2
Authority
DE
Germany
Prior art keywords
openings
pump
pump according
channel
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3402549A
Other languages
German (de)
English (en)
Other versions
DE3402549A1 (de
Inventor
Franz Josef Dr. 5300 Bonn De Schittko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE19843402549 priority Critical patent/DE3402549A1/de
Publication of DE3402549A1 publication Critical patent/DE3402549A1/de
Application granted granted Critical
Publication of DE3402549C2 publication Critical patent/DE3402549C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE19843402549 1984-01-26 1984-01-26 Molekularvakuumpumpe Granted DE3402549A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19843402549 DE3402549A1 (de) 1984-01-26 1984-01-26 Molekularvakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843402549 DE3402549A1 (de) 1984-01-26 1984-01-26 Molekularvakuumpumpe

Publications (2)

Publication Number Publication Date
DE3402549A1 DE3402549A1 (de) 1985-08-01
DE3402549C2 true DE3402549C2 (en, 2012) 1991-10-10

Family

ID=6225904

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843402549 Granted DE3402549A1 (de) 1984-01-26 1984-01-26 Molekularvakuumpumpe

Country Status (1)

Country Link
DE (1) DE3402549A1 (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6926493B1 (en) 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
DE59912626D1 (de) * 1998-05-26 2006-02-16 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
KR100724048B1 (ko) * 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프
DE10331932B4 (de) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (en, 2012) * 1973-03-30 1974-10-25 Cit Alcatel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Also Published As

Publication number Publication date
DE3402549A1 (de) 1985-08-01

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8127 New person/name/address of the applicant

Owner name: LEYBOLD AG, 5000 KOELN, DE

8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee