EP1030062A3 - Turbo-molecular pump - Google Patents
Turbo-molecular pump Download PDFInfo
- Publication number
- EP1030062A3 EP1030062A3 EP00103326A EP00103326A EP1030062A3 EP 1030062 A3 EP1030062 A3 EP 1030062A3 EP 00103326 A EP00103326 A EP 00103326A EP 00103326 A EP00103326 A EP 00103326A EP 1030062 A3 EP1030062 A3 EP 1030062A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- stator assembly
- turbo
- rotor
- molecular pump
- casing portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4103999 | 1999-02-19 | ||
JP4103999 | 1999-02-19 | ||
JP15621599 | 1999-06-03 | ||
JP15621599 | 1999-06-03 | ||
JP20099099 | 1999-07-14 | ||
JP20099099 | 1999-07-14 | ||
US09/473,137 US6926493B1 (en) | 1997-06-27 | 1999-12-28 | Turbo-molecular pump |
US473137 | 1999-12-28 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1030062A2 EP1030062A2 (en) | 2000-08-23 |
EP1030062A3 true EP1030062A3 (en) | 2002-03-20 |
EP1030062B1 EP1030062B1 (en) | 2007-12-12 |
Family
ID=27460988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00103326A Expired - Lifetime EP1030062B1 (en) | 1999-02-19 | 2000-02-21 | Turbo-molecular pump |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1030062B1 (en) |
KR (1) | KR100724048B1 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
JP4763145B2 (en) * | 2001-03-26 | 2011-08-31 | エドワーズ株式会社 | Molecular pump |
JP2002327698A (en) | 2001-04-27 | 2002-11-15 | Boc Edwards Technologies Ltd | Vacuum pump |
JP4004779B2 (en) | 2001-11-16 | 2007-11-07 | Bocエドワーズ株式会社 | Vacuum pump |
JP3950323B2 (en) | 2001-11-19 | 2007-08-01 | Bocエドワーズ株式会社 | Vacuum pump |
JP4156830B2 (en) * | 2001-12-13 | 2008-09-24 | エドワーズ株式会社 | Vacuum pump |
US8147222B2 (en) * | 2007-05-15 | 2012-04-03 | Agilent Technologies, Inc. | Vacuum divider for differential pumping of a vacuum system |
DE102007027354A1 (en) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Turbo molecular pump |
DE102007051988A1 (en) * | 2007-10-31 | 2009-05-07 | Oerlikon Leybold Vacuum Gmbh | Turbo molecular pump |
BRPI0912243B1 (en) | 2008-05-06 | 2020-04-14 | Fmc Tech Inc | flow conditioning system |
US8696331B2 (en) | 2008-05-06 | 2014-04-15 | Fmc Technologies, Inc. | Pump with magnetic bearings |
DE102008058151A1 (en) * | 2008-11-20 | 2010-05-27 | Oerlikon Leybold Vacuum Gmbh | Turbomolecular pump |
DE102008058149A1 (en) | 2008-11-20 | 2010-05-27 | Oerlikon Leybold Vacuum Gmbh | Turbo-molecular pump, has rotor element arranged in pump housing, and stator rings surrounding rotor element, where rings exhibit attachment piece extending in longitudinal direction such that adjacent stator ring is arranged within piece |
JP5532051B2 (en) * | 2009-11-02 | 2014-06-25 | 株式会社島津製作所 | Vacuum pump |
JP2015059426A (en) * | 2013-09-17 | 2015-03-30 | エドワーズ株式会社 | Fixing component of vacuum pump |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2214702A1 (en) * | 1972-03-25 | 1973-09-27 | Leybold Heraeus Gmbh & Co Kg | TURBOMOLECULAR PUMP |
JPS57212395A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Molecular pump |
DE3402549A1 (en) * | 1984-01-26 | 1985-08-01 | Leybold-Heraeus GmbH, 5000 Köln | Molecular vacuum pump |
JPH08144992A (en) * | 1994-11-17 | 1996-06-04 | Shimadzu Corp | Molecular drug pump |
EP0887556A1 (en) * | 1997-06-27 | 1998-12-30 | Ebara Corporation | Turbo-molecular pump |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2634829B1 (en) * | 1988-07-27 | 1990-09-14 | Cit Alcatel | VACUUM PUMP |
GB2265418B (en) * | 1992-03-26 | 1995-03-08 | Rolls Royce Plc | Gas turbine engine casing |
-
2000
- 2000-02-18 KR KR1020000007703A patent/KR100724048B1/en not_active IP Right Cessation
- 2000-02-21 EP EP00103326A patent/EP1030062B1/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2214702A1 (en) * | 1972-03-25 | 1973-09-27 | Leybold Heraeus Gmbh & Co Kg | TURBOMOLECULAR PUMP |
JPS57212395A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Molecular pump |
DE3402549A1 (en) * | 1984-01-26 | 1985-08-01 | Leybold-Heraeus GmbH, 5000 Köln | Molecular vacuum pump |
JPH08144992A (en) * | 1994-11-17 | 1996-06-04 | Shimadzu Corp | Molecular drug pump |
EP0887556A1 (en) * | 1997-06-27 | 1998-12-30 | Ebara Corporation | Turbo-molecular pump |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 007, no. 071 (M - 202) 24 March 1983 (1983-03-24) * |
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 10 31 October 1996 (1996-10-31) * |
Also Published As
Publication number | Publication date |
---|---|
KR100724048B1 (en) | 2007-06-04 |
KR20000058091A (en) | 2000-09-25 |
EP1030062A2 (en) | 2000-08-23 |
EP1030062B1 (en) | 2007-12-12 |
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