EP1030062A3 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

Info

Publication number
EP1030062A3
EP1030062A3 EP00103326A EP00103326A EP1030062A3 EP 1030062 A3 EP1030062 A3 EP 1030062A3 EP 00103326 A EP00103326 A EP 00103326A EP 00103326 A EP00103326 A EP 00103326A EP 1030062 A3 EP1030062 A3 EP 1030062A3
Authority
EP
European Patent Office
Prior art keywords
stator assembly
turbo
rotor
molecular pump
casing portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00103326A
Other languages
English (en)
French (fr)
Other versions
EP1030062A2 (de
EP1030062B1 (de
Inventor
Matsutaro Miyamoto
Hiroaki Ogamino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/473,137 external-priority patent/US6926493B1/en
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP1030062A2 publication Critical patent/EP1030062A2/de
Publication of EP1030062A3 publication Critical patent/EP1030062A3/de
Application granted granted Critical
Publication of EP1030062B1 publication Critical patent/EP1030062B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
EP00103326A 1999-02-19 2000-02-21 Turbomolekularpumpe Expired - Lifetime EP1030062B1 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP4103999 1999-02-19
JP4103999 1999-02-19
JP15621599 1999-06-03
JP15621599 1999-06-03
JP20099099 1999-07-14
JP20099099 1999-07-14
US09/473,137 US6926493B1 (en) 1997-06-27 1999-12-28 Turbo-molecular pump
US473137 1999-12-28

Publications (3)

Publication Number Publication Date
EP1030062A2 EP1030062A2 (de) 2000-08-23
EP1030062A3 true EP1030062A3 (de) 2002-03-20
EP1030062B1 EP1030062B1 (de) 2007-12-12

Family

ID=27460988

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00103326A Expired - Lifetime EP1030062B1 (de) 1999-02-19 2000-02-21 Turbomolekularpumpe

Country Status (2)

Country Link
EP (1) EP1030062B1 (de)
KR (1) KR100724048B1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
JP4763145B2 (ja) * 2001-03-26 2011-08-31 エドワーズ株式会社 分子ポンプ
JP2002327698A (ja) 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP4004779B2 (ja) 2001-11-16 2007-11-07 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP3950323B2 (ja) 2001-11-19 2007-08-01 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
US8147222B2 (en) * 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
DE102007027354A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102007051988A1 (de) * 2007-10-31 2009-05-07 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
BRPI0912243B1 (pt) 2008-05-06 2020-04-14 Fmc Tech Inc sistema de condicionamento de fluxo
US8696331B2 (en) 2008-05-06 2014-04-15 Fmc Technologies, Inc. Pump with magnetic bearings
DE102008058151A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008058149A1 (de) 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP5532051B2 (ja) * 2009-11-02 2014-06-25 株式会社島津製作所 真空ポンプ
JP2015059426A (ja) * 2013-09-17 2015-03-30 エドワーズ株式会社 真空ポンプの固定部品

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214702A1 (de) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JPH08144992A (ja) * 1994-11-17 1996-06-04 Shimadzu Corp モレキュラドラッグポンプ
EP0887556A1 (de) * 1997-06-27 1998-12-30 Ebara Corporation Turbomolekularpumpe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
GB2265418B (en) * 1992-03-26 1995-03-08 Rolls Royce Plc Gas turbine engine casing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214702A1 (de) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JPH08144992A (ja) * 1994-11-17 1996-06-04 Shimadzu Corp モレキュラドラッグポンプ
EP0887556A1 (de) * 1997-06-27 1998-12-30 Ebara Corporation Turbomolekularpumpe

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 007, no. 071 (M - 202) 24 March 1983 (1983-03-24) *
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 10 31 October 1996 (1996-10-31) *

Also Published As

Publication number Publication date
KR100724048B1 (ko) 2007-06-04
KR20000058091A (ko) 2000-09-25
EP1030062A2 (de) 2000-08-23
EP1030062B1 (de) 2007-12-12

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