DE3390358T1 - Verfahren und Einrichtung zur Erzeugung von Silizium aus Fluorkieselsäure - Google Patents

Verfahren und Einrichtung zur Erzeugung von Silizium aus Fluorkieselsäure

Info

Publication number
DE3390358T1
DE3390358T1 DE19833390358 DE3390358T DE3390358T1 DE 3390358 T1 DE3390358 T1 DE 3390358T1 DE 19833390358 DE19833390358 DE 19833390358 DE 3390358 T DE3390358 T DE 3390358T DE 3390358 T1 DE3390358 T1 DE 3390358T1
Authority
DE
Germany
Prior art keywords
silicon
reaction
reaction chamber
chamber
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19833390358
Other languages
German (de)
English (en)
Inventor
Leonard Palo Alto Calif. Nanis
Angel San Jose Calif. Sanjurjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SRI International Inc
Original Assignee
SRI International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SRI International Inc filed Critical SRI International Inc
Publication of DE3390358T1 publication Critical patent/DE3390358T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/26—Nozzle-type reactors, i.e. the distribution of the initial reactants within the reactor is effected by their introduction or injection through nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/033—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by reduction of silicon halides or halosilanes with a metal or a metallic alloy as the only reducing agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
    • B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
    • B01J2219/0009—Coils
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00132—Controlling the temperature using electric heating or cooling elements
    • B01J2219/00135—Electric resistance heaters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/0015—Controlling the temperature by thermal insulation means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00162—Controlling or regulating processes controlling the pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00164—Controlling or regulating processes controlling the flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00245—Avoiding undesirable reactions or side-effects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
DE19833390358 1982-12-27 1983-11-07 Verfahren und Einrichtung zur Erzeugung von Silizium aus Fluorkieselsäure Withdrawn DE3390358T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/453,337 US4584181A (en) 1982-12-27 1982-12-27 Process and apparatus for obtaining silicon from fluosilicic acid

Publications (1)

Publication Number Publication Date
DE3390358T1 true DE3390358T1 (de) 1985-01-24

Family

ID=23800171

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833390358 Withdrawn DE3390358T1 (de) 1982-12-27 1983-11-07 Verfahren und Einrichtung zur Erzeugung von Silizium aus Fluorkieselsäure

Country Status (12)

Country Link
US (1) US4584181A (enExample)
EP (1) EP0151569B1 (enExample)
CA (1) CA1221816A (enExample)
CH (1) CH661918A5 (enExample)
DE (1) DE3390358T1 (enExample)
ES (1) ES8602534A1 (enExample)
GB (1) GB2142918B (enExample)
GR (1) GR78764B (enExample)
IT (1) IT1172395B (enExample)
NL (1) NL8320373A (enExample)
PT (1) PT77852B (enExample)
WO (1) WO1984002514A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0166481A3 (en) * 1984-06-26 1988-11-23 AGIP S.p.A. Process for obtaining silicon or transition metals from their halides
FI72952C (fi) * 1985-03-11 1987-08-10 Kemira Oy Foerfarande foer framstaellning av kisel.
US4655827A (en) * 1985-07-24 1987-04-07 Angel Sanjurjo Process for the reduction of fluorides of silicon, titanium, zirconium or uranium
US5925443A (en) * 1991-09-10 1999-07-20 International Business Machines Corporation Copper-based paste containing copper aluminate for microstructural and shrinkage control of copper-filled vias
RU2131843C1 (ru) * 1998-03-30 1999-06-20 Институт геохимии им.Виноградова А.П. СО РАН Способ получения кремния высокой чистоты
ATE334938T1 (de) * 2002-01-18 2006-08-15 Wacker Chemie Ag Verfahren zur herstellung von organohalogensilanen aus amorphem silizium
JP5311930B2 (ja) * 2007-08-29 2013-10-09 住友化学株式会社 シリコンの製造方法
CN102164867A (zh) * 2008-08-28 2011-08-24 Sri国际公司 用于生产氟化物气体和掺氟玻璃或陶瓷的方法和系统
SG172067A1 (en) * 2008-12-17 2011-07-28 Memc Electronic Materials Processes and systems for producing silicon tetrafluoride from fluorosilicates in a fluidized bed reactor
US8609057B2 (en) 2010-06-07 2013-12-17 Sri International Method for separation of components from a reaction mixture via a concentrated acid
US9101896B2 (en) 2010-07-09 2015-08-11 Sri International High temperature decomposition of complex precursor salts in a molten salt
DE102010045260A1 (de) 2010-09-14 2012-03-15 Spawnt Private S.À.R.L. Verfahren zur Herstellung von fluorierten Polysilanen
US8701444B2 (en) * 2012-06-22 2014-04-22 Owens-Brockway Glass Container Inc. Plunger and parison mold assembly for a narrow-neck press-and-blow wine bottle
CN103395785B (zh) * 2013-07-18 2014-12-31 贵州省产品质量监督检验院 一种钠还原氟硅酸钠制备多晶硅的方法
RU2690070C1 (ru) * 2018-07-04 2019-05-30 Общество с ограниченной ответственностью "Научно-производственное предприятие "ТЕХНОПРИБОР" (ООО "НПП "ТЕХНОПРИБОР") Устройство дозирования подщелачивающего реагента анализатора натрия

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2826491A (en) * 1951-09-10 1958-03-11 Nat Res Corp Method of producing refractory metals
US4162291A (en) * 1977-10-12 1979-07-24 Westinghouse Electric Corp. Liquid silicon casting control mechanism
US4298587A (en) * 1980-10-28 1981-11-03 Atlantic Richfield Company Silicon purification

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US524173A (en) * 1894-08-07 Variable-resistance medium for telephones
US1518872A (en) * 1920-04-16 1924-12-09 Pacz Aladar Process of producing fluorides
US2172969A (en) * 1936-09-28 1939-09-12 Eringer Josef Process for obtaining silicon from its compounds
US2828201A (en) * 1950-10-13 1958-03-25 Nat Res Corp Method for producing titanium and zirconium
GB821817A (en) * 1954-11-16 1959-10-14 Peter Spence & Sons Ltd Continuous process for the manufacture of titanium metal
US2840588A (en) * 1956-03-22 1958-06-24 Du Pont Process for the preparation of difluorosilylene and the polymers thereof
US2816828A (en) * 1956-06-20 1957-12-17 Nat Res Corp Method of producing refractory metals
US2909411A (en) * 1957-01-15 1959-10-20 Du Pont Production of silicon
US3041145A (en) * 1957-07-15 1962-06-26 Robert S Aries Production of pure silicon
US2941867A (en) * 1957-10-14 1960-06-21 Du Pont Reduction of metal halides
US3012865A (en) * 1957-11-25 1961-12-12 Du Pont Silicon purification process
US3847596A (en) * 1968-02-28 1974-11-12 Halomet Ag Process of obtaining metals from metal halides
US3966460A (en) * 1974-09-06 1976-06-29 Amax Specialty Metal Corporation Reduction of metal halides
US4070444A (en) * 1976-07-21 1978-01-24 Motorola Inc. Low cost, high volume silicon purification process
US4102764A (en) * 1976-12-29 1978-07-25 Westinghouse Electric Corp. High purity silicon production by arc heater reduction of silicon intermediates
US4102765A (en) * 1977-01-06 1978-07-25 Westinghouse Electric Corp. Arc heater production of silicon involving alkali or alkaline-earth metals
US4102985A (en) * 1977-01-06 1978-07-25 Westinghouse Electric Corp. Arc heater production of silicon involving a hydrogen reduction
US4102767A (en) * 1977-04-14 1978-07-25 Westinghouse Electric Corp. Arc heater method for the production of single crystal silicon
US4102766A (en) * 1977-04-14 1978-07-25 Westinghouse Electric Corp. Process for doping high purity silicon in an arc heater
US4272488A (en) * 1977-05-25 1981-06-09 John S. Pennish Apparatus for producing and casting liquid silicon
FR2401696A1 (fr) * 1977-08-31 1979-03-30 Ugine Kuhlmann Methode de depot de silicium cristallin en films minces sur substrats graphites
US4138509A (en) * 1977-12-23 1979-02-06 Motorola, Inc. Silicon purification process
US4169129A (en) * 1978-02-24 1979-09-25 Nasa Sodium storage and injection system
US4188368A (en) * 1978-03-29 1980-02-12 Nasa Method of producing silicon
SE415558B (sv) * 1978-06-02 1980-10-13 Kema Nord Ab Forfarande for framstellning av kisel eller fenokisel
DE2903061A1 (de) * 1979-01-26 1980-08-07 Heliotronic Gmbh Verfahren zur herstellung grosskristalliner vorzugsorientierter siliciumfolien
US4388286A (en) * 1982-01-27 1983-06-14 Atlantic Richfield Company Silicon purification

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2826491A (en) * 1951-09-10 1958-03-11 Nat Res Corp Method of producing refractory metals
US4162291A (en) * 1977-10-12 1979-07-24 Westinghouse Electric Corp. Liquid silicon casting control mechanism
US4298587A (en) * 1980-10-28 1981-11-03 Atlantic Richfield Company Silicon purification

Also Published As

Publication number Publication date
IT1172395B (it) 1987-06-18
CH661918A5 (de) 1987-08-31
GR78764B (enExample) 1984-10-02
US4584181A (en) 1986-04-22
EP0151569A1 (en) 1985-08-21
ES528413A0 (es) 1985-11-16
GB2142918B (en) 1987-02-25
PT77852A (en) 1984-01-01
GB2142918A (en) 1985-01-30
GB8417389D0 (en) 1984-08-08
ES8602534A1 (es) 1985-11-16
NL8320373A (nl) 1984-11-01
CA1221816A (en) 1987-05-19
WO1984002514A1 (en) 1984-07-05
PT77852B (en) 1986-04-16
EP0151569B1 (en) 1989-07-19
EP0151569A4 (en) 1986-07-10

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: C01B 33/033

8139 Disposal/non-payment of the annual fee