DE3376853D1 - Apparatus for regenerating an ammoniacal etching solution - Google Patents
Apparatus for regenerating an ammoniacal etching solutionInfo
- Publication number
- DE3376853D1 DE3376853D1 DE8383111152T DE3376853T DE3376853D1 DE 3376853 D1 DE3376853 D1 DE 3376853D1 DE 8383111152 T DE8383111152 T DE 8383111152T DE 3376853 T DE3376853 T DE 3376853T DE 3376853 D1 DE3376853 D1 DE 3376853D1
- Authority
- DE
- Germany
- Prior art keywords
- etching solution
- oxygen
- line
- etching
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE8383111152T DE3376853D1 (en) | 1983-04-13 | 1983-11-08 | Apparatus for regenerating an ammoniacal etching solution |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3313293 | 1983-04-13 | ||
DE8383111152T DE3376853D1 (en) | 1983-04-13 | 1983-11-08 | Apparatus for regenerating an ammoniacal etching solution |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3376853D1 true DE3376853D1 (en) | 1988-07-07 |
Family
ID=6196226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383111152T Expired DE3376853D1 (en) | 1983-04-13 | 1983-11-08 | Apparatus for regenerating an ammoniacal etching solution |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0122963B1 (ja) |
JP (1) | JPS6013083A (ja) |
AT (1) | ATE34781T1 (ja) |
DE (1) | DE3376853D1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2449164A1 (fr) * | 1979-02-14 | 1980-09-12 | Sogreah | Bloc artificiel pour structures maritimes et fluviales |
DE3345050A1 (de) * | 1983-12-13 | 1985-06-20 | Walter 7758 Meersburg Holzer | Verfahren zum umweltfreundlichen aetzen von leiterplatten und vorrichtung zur ausuebung des arbeitsverfahrens |
AU608969B2 (en) * | 1989-04-21 | 1991-04-18 | Ming-Hsing Lee | Process for etching copper with ammoniacal etchant solution and reconditioning the used etchant solution |
US5248398A (en) * | 1990-11-16 | 1993-09-28 | Macdermid, Incorporated | Process for direct electrolytic regeneration of chloride-based ammoniacal copper etchant bath |
US5085730A (en) * | 1990-11-16 | 1992-02-04 | Macdermid, Incorporated | Process for regenerating ammoniacal chloride etchants |
DE112011105722A5 (de) * | 2011-10-08 | 2014-06-26 | Christoph Herkle | Ätzvorrichtung zum elektrolytischen Ätzen von Kupfer |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2008766B2 (de) * | 1970-02-23 | 1971-07-29 | Licentia Patent Verwaltungs GmbH, 6000 Frankfurt | Verfahren zum regenerieren einer kupferhaltigen aetzloesung insbesondere fuer die herstellung von gedruckten schaltungen |
US3705061A (en) * | 1971-03-19 | 1972-12-05 | Southern California Chem Co In | Continuous redox process for dissolving copper |
DE2216269A1 (de) * | 1972-04-05 | 1973-10-18 | Hoellmueller Maschbau H | Verfahren zum aetzen von kupfer und kupferlegierungen |
US3785950A (en) * | 1972-05-19 | 1974-01-15 | E Newton | Regeneration of spent etchant |
DE2641905C2 (de) * | 1976-09-17 | 1986-03-20 | Geb. Bakulina Galina Aleksandrovna Batova | Verfahren zur Regenerierung verbrauchter Ätzlösungen |
DE3031567A1 (de) * | 1980-08-21 | 1982-04-29 | Elochem Ätztechnik GmbH, 7758 Meersburg | Verfahren zum regenerieren einer ammoniakalischen aetzloesung |
-
1983
- 1983-11-08 AT AT83111152T patent/ATE34781T1/de active
- 1983-11-08 DE DE8383111152T patent/DE3376853D1/de not_active Expired
- 1983-11-08 EP EP83111152A patent/EP0122963B1/de not_active Expired
-
1984
- 1984-04-13 JP JP59073102A patent/JPS6013083A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
ATE34781T1 (de) | 1988-06-15 |
EP0122963B1 (de) | 1988-06-01 |
EP0122963A1 (de) | 1984-10-31 |
JPH0429745B2 (ja) | 1992-05-19 |
JPS6013083A (ja) | 1985-01-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FORSCHUNGSZENTRUM JUELICH GMBH, 5170 JUELICH, DE |
|
8339 | Ceased/non-payment of the annual fee |