DE3346417C2 - - Google Patents
Info
- Publication number
- DE3346417C2 DE3346417C2 DE19833346417 DE3346417A DE3346417C2 DE 3346417 C2 DE3346417 C2 DE 3346417C2 DE 19833346417 DE19833346417 DE 19833346417 DE 3346417 A DE3346417 A DE 3346417A DE 3346417 C2 DE3346417 C2 DE 3346417C2
- Authority
- DE
- Germany
- Prior art keywords
- anode
- holes
- plates
- magnetic field
- field lines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000875 corresponding effect Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 7
- 239000000463 material Substances 0.000 description 2
- -1 B. Sm-Co Chemical compound 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19833346417 DE3346417A1 (de) | 1983-12-22 | 1983-12-22 | Ionenzerstaeuberpumpe nach dem penning-prinzip und verfahren zu ihrer herstellung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19833346417 DE3346417A1 (de) | 1983-12-22 | 1983-12-22 | Ionenzerstaeuberpumpe nach dem penning-prinzip und verfahren zu ihrer herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3346417A1 DE3346417A1 (de) | 1985-07-11 |
DE3346417C2 true DE3346417C2 (enrdf_load_stackoverflow) | 1988-12-01 |
Family
ID=6217703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19833346417 Granted DE3346417A1 (de) | 1983-12-22 | 1983-12-22 | Ionenzerstaeuberpumpe nach dem penning-prinzip und verfahren zu ihrer herstellung |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3346417A1 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010055420A1 (de) * | 2010-12-21 | 2012-06-21 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Elektrodenvorrichtung für eine Ionenzerstäuberpumpe |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1539142A1 (de) * | 1964-07-20 | 1969-04-30 | Varian Associates | Vorrichtung fuer magnetisch eingeschnuerte Glimmentladung |
FR1550108A (enrdf_load_stackoverflow) * | 1967-06-27 | 1968-12-20 |
-
1983
- 1983-12-22 DE DE19833346417 patent/DE3346417A1/de active Granted
Also Published As
Publication number | Publication date |
---|---|
DE3346417A1 (de) | 1985-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |