DE3346417A1 - Ionenzerstaeuberpumpe nach dem penning-prinzip und verfahren zu ihrer herstellung - Google Patents
Ionenzerstaeuberpumpe nach dem penning-prinzip und verfahren zu ihrer herstellungInfo
- Publication number
- DE3346417A1 DE3346417A1 DE19833346417 DE3346417A DE3346417A1 DE 3346417 A1 DE3346417 A1 DE 3346417A1 DE 19833346417 DE19833346417 DE 19833346417 DE 3346417 A DE3346417 A DE 3346417A DE 3346417 A1 DE3346417 A1 DE 3346417A1
- Authority
- DE
- Germany
- Prior art keywords
- pump according
- anode
- ion
- plates
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000000889 atomisation Methods 0.000 title abstract description 4
- 125000006850 spacer group Chemical group 0.000 claims abstract description 6
- 238000010894 electron beam technology Methods 0.000 claims abstract description 3
- 238000001259 photo etching Methods 0.000 claims abstract description 3
- 239000012212 insulator Substances 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims description 2
- 238000005219 brazing Methods 0.000 abstract description 4
- 238000005520 cutting process Methods 0.000 abstract description 2
- 229910052761 rare earth metal Inorganic materials 0.000 abstract description 2
- 150000002910 rare earth metals Chemical class 0.000 abstract description 2
- 230000000712 assembly Effects 0.000 abstract 1
- 238000000429 assembly Methods 0.000 abstract 1
- 229910017052 cobalt Inorganic materials 0.000 abstract 1
- 239000010941 cobalt Substances 0.000 abstract 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000008901 benefit Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19833346417 DE3346417A1 (de) | 1983-12-22 | 1983-12-22 | Ionenzerstaeuberpumpe nach dem penning-prinzip und verfahren zu ihrer herstellung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19833346417 DE3346417A1 (de) | 1983-12-22 | 1983-12-22 | Ionenzerstaeuberpumpe nach dem penning-prinzip und verfahren zu ihrer herstellung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3346417A1 true DE3346417A1 (de) | 1985-07-11 |
| DE3346417C2 DE3346417C2 (enrdf_load_stackoverflow) | 1988-12-01 |
Family
ID=6217703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19833346417 Granted DE3346417A1 (de) | 1983-12-22 | 1983-12-22 | Ionenzerstaeuberpumpe nach dem penning-prinzip und verfahren zu ihrer herstellung |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3346417A1 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010055420A1 (de) * | 2010-12-21 | 2012-06-21 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Elektrodenvorrichtung für eine Ionenzerstäuberpumpe |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1550108A (enrdf_load_stackoverflow) * | 1967-06-27 | 1968-12-20 | ||
| DE1539142A1 (de) * | 1964-07-20 | 1969-04-30 | Varian Associates | Vorrichtung fuer magnetisch eingeschnuerte Glimmentladung |
-
1983
- 1983-12-22 DE DE19833346417 patent/DE3346417A1/de active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1539142A1 (de) * | 1964-07-20 | 1969-04-30 | Varian Associates | Vorrichtung fuer magnetisch eingeschnuerte Glimmentladung |
| FR1550108A (enrdf_load_stackoverflow) * | 1967-06-27 | 1968-12-20 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010055420A1 (de) * | 2010-12-21 | 2012-06-21 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Elektrodenvorrichtung für eine Ionenzerstäuberpumpe |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3346417C2 (enrdf_load_stackoverflow) | 1988-12-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |