DE3338728C2 - - Google Patents

Info

Publication number
DE3338728C2
DE3338728C2 DE3338728A DE3338728A DE3338728C2 DE 3338728 C2 DE3338728 C2 DE 3338728C2 DE 3338728 A DE3338728 A DE 3338728A DE 3338728 A DE3338728 A DE 3338728A DE 3338728 C2 DE3338728 C2 DE 3338728C2
Authority
DE
Germany
Prior art keywords
pressure
control device
fluid bearing
control signal
gain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3338728A
Other languages
German (de)
English (en)
Other versions
DE3338728A1 (de
Inventor
Mitsuya Tokio/Tokyo Jp Sato
Isamu Zama Kanagawa Jp Shimoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE3338728A1 publication Critical patent/DE3338728A1/de
Application granted granted Critical
Publication of DE3338728C2 publication Critical patent/DE3338728C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE19833338728 1982-10-27 1983-10-25 Verfahren und vorrichtung zur regelung eines fluidlagers Granted DE3338728A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57189683A JPS5980520A (ja) 1982-10-27 1982-10-27 流体軸受装置

Publications (2)

Publication Number Publication Date
DE3338728A1 DE3338728A1 (de) 1984-05-03
DE3338728C2 true DE3338728C2 (US06229276-20010508-P00081.png) 1990-05-23

Family

ID=16245429

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833338728 Granted DE3338728A1 (de) 1982-10-27 1983-10-25 Verfahren und vorrichtung zur regelung eines fluidlagers

Country Status (4)

Country Link
US (1) US4569562A (US06229276-20010508-P00081.png)
JP (1) JPS5980520A (US06229276-20010508-P00081.png)
DE (1) DE3338728A1 (US06229276-20010508-P00081.png)
GB (1) GB2130762B (US06229276-20010508-P00081.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19711710A1 (de) * 1997-03-20 1998-09-24 Klg Electronic Ges Mbh Funktionsüberwachung für Luftlager

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4653408A (en) * 1984-09-05 1987-03-31 Citizen Watch Co., Ltd. Table mechanism for controlling table attitude
US4650123A (en) * 1986-03-25 1987-03-17 Toyota Jidosha Kabushiki Kaisha Rotary type electrostatic spray painting device
US4702041A (en) * 1986-07-09 1987-10-27 Corning Glass Works Prevention of foreign material intrusion in an air slide for machines
US4713913A (en) * 1986-07-09 1987-12-22 Corning Glass Works Air slide positioning for grinding spindles
US5087195A (en) * 1988-10-29 1992-02-11 Toyotomi Kogyo Co., Ltd. Combustion cylinder structure for oil burner
DE4133563A1 (de) * 1991-10-10 1993-04-15 Schaeffler Waelzlager Kg Linearfuehrung
US5364190A (en) * 1992-01-14 1994-11-15 Toshiba Kikai Kabushiki Kaisha Hydrostatic bearing apparatus
WO1994007045A1 (en) * 1992-09-11 1994-03-31 Hanes Charles E Stiff bearing system with minimal vibration characteristics
JP3086764B2 (ja) * 1993-02-22 2000-09-11 キヤノン株式会社 静圧軸受装置
US5848930A (en) * 1995-09-13 1998-12-15 The Boeing Company Aircraft trimming device
US5769545A (en) * 1996-12-04 1998-06-23 Bently Nevada Corporation Hydrostatic bearing for supporting rotating equipment, a fluid handling system associated therewith, a control system therefore, method and apparatus
US6142672A (en) * 1998-06-22 2000-11-07 Bently Nevada Corporation Fluid flow and control system for a hydrostatic bearing supporting rotating equipment: method and apparatus
US6428210B1 (en) * 2000-07-11 2002-08-06 Lintech Motion Control, Inc. Precision air bearing slide and stage assembly for controlled linear motion
JP4749123B2 (ja) * 2005-11-11 2011-08-17 Ｓｍｃ株式会社 耐モーメント対策静圧気体軸受機構
US20120033904A1 (en) * 2010-08-05 2012-02-09 Honeywell International Inc. Hydrodynamic gas film bearing cooling flow control system
US9506498B2 (en) 2014-03-25 2016-11-29 Specialty Components, Inc. Gap sensing method for fluid film bearings
CN112096739B (zh) * 2020-08-05 2021-12-21 佛山市华道超精科技有限公司 一种气浮导轨式可切换刚柔耦合运动平台

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB840751A (en) * 1957-08-14 1960-07-13 British Thomson Houston Co Ltd Improvements in means for supporting members by liquid films, applicable to machine tools
FR1311765A (fr) * 1960-05-23 1962-12-14 Derefa Etablissement Pour Le D Installation de graissage sous pression de glissières d'organes de machines-outils
US3032142A (en) * 1960-06-28 1962-05-01 Schiess Ag Arrangement for regulating the height of the lubricating film on the slide tracks of machine tools
US3674112A (en) * 1970-06-30 1972-07-04 Houdaille Industries Inc Centralized lubrication system
US3724597A (en) * 1971-11-19 1973-04-03 A Bereit Device for the hydrostatic supporting of machine parts
US3812627A (en) * 1972-12-29 1974-05-28 Landis Tool Co Pressure indicating device for hydrostatic bearings
US3856114A (en) * 1973-01-29 1974-12-24 Kearney & Trecker Corp Automatic lubrication system
FR2385938A1 (fr) * 1977-03-30 1978-10-27 Fives Cail Babcock Dispositif de lubrification pour paliers a patins supportant une piece tournante de grand diametre, telle qu'un broyeur rotatif
US4272216A (en) * 1978-12-20 1981-06-09 Kearney & Trecker Corporation Machine tool lubrication system
JPS55107116A (en) * 1979-02-09 1980-08-16 Hitachi Seiko Ltd Method for protection of pneumatic bearing against damage
DE2922595C2 (de) * 1979-06-02 1982-04-01 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Digitales Informationsübertragungssystem
US4326603A (en) * 1979-12-17 1982-04-27 International Business Machines Corporation Lubrication control apparatus
JPS56126547A (en) * 1980-03-06 1981-10-03 Makino Milling Mach Co Ltd Machine equipped with load compensating guide face
JPS571684A (en) * 1980-06-03 1982-01-06 Matsushita Electric Ind Co Ltd Turning device for industrial robot
US4445168A (en) * 1981-06-24 1984-04-24 Houdaille Industries, Inc. Apparatus and method for micro-computer control of lubrication system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19711710A1 (de) * 1997-03-20 1998-09-24 Klg Electronic Ges Mbh Funktionsüberwachung für Luftlager

Also Published As

Publication number Publication date
JPH0228733B2 (US06229276-20010508-P00081.png) 1990-06-26
US4569562A (en) 1986-02-11
DE3338728A1 (de) 1984-05-03
GB2130762A (en) 1984-06-06
JPS5980520A (ja) 1984-05-10
GB2130762B (en) 1986-07-02
GB8328037D0 (en) 1983-11-23

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition