DE3306999A1 - Einrichtung zum festhalten eines werkstueckes - Google Patents

Einrichtung zum festhalten eines werkstueckes

Info

Publication number
DE3306999A1
DE3306999A1 DE19833306999 DE3306999A DE3306999A1 DE 3306999 A1 DE3306999 A1 DE 3306999A1 DE 19833306999 DE19833306999 DE 19833306999 DE 3306999 A DE3306999 A DE 3306999A DE 3306999 A1 DE3306999 A1 DE 3306999A1
Authority
DE
Germany
Prior art keywords
wafer
temperature
heating
base plate
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19833306999
Other languages
German (de)
English (en)
Other versions
DE3306999C2 (https=
Inventor
Herbert E Mayer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Perkin Elmer Censor Anstalt
Original Assignee
Censor Patent und Versuchsanstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/363,860 external-priority patent/US4432635A/en
Application filed by Censor Patent und Versuchsanstalt filed Critical Censor Patent und Versuchsanstalt
Publication of DE3306999A1 publication Critical patent/DE3306999A1/de
Application granted granted Critical
Publication of DE3306999C2 publication Critical patent/DE3306999C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0432—Apparatus for thermal treatment mainly by conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B21/00—Machines, plants or systems, using electric or magnetic effects
    • F25B21/02—Machines, plants or systems, using electric or magnetic effects using Peltier effect; using Nernst-Ettinghausen effect
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE19833306999 1982-03-31 1983-02-28 Einrichtung zum festhalten eines werkstueckes Granted DE3306999A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/363,860 US4432635A (en) 1979-12-20 1982-03-31 Temperature-controlled support for semiconductor wafer

Publications (2)

Publication Number Publication Date
DE3306999A1 true DE3306999A1 (de) 1983-10-06
DE3306999C2 DE3306999C2 (https=) 1988-11-17

Family

ID=23432040

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833306999 Granted DE3306999A1 (de) 1982-03-31 1983-02-28 Einrichtung zum festhalten eines werkstueckes

Country Status (2)

Country Link
JP (1) JPS58178536A (https=)
DE (1) DE3306999A1 (https=)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3608783A1 (de) * 1986-03-15 1987-09-17 Telefunken Electronic Gmbh Gasphasen-epitaxieverfahren und vorrichtung zu seiner durchfuehrung
EP0411916A3 (en) * 1989-08-01 1991-10-30 Canon Kabushiki Kaisha Wafer table and exposure apparatus with the same
DE4200283A1 (de) * 1991-01-08 1992-07-09 Sematech Inc Schleudergiessen von siliziumwafern unter nachwachsen von silizium
US5172949A (en) * 1991-08-02 1992-12-22 Smc Kabushiki Kaisha Suction pad with temperature control mechanism
EP0523414A1 (en) * 1991-06-26 1993-01-20 Enya Systems Limited Wafer mounting device
US5231291A (en) * 1989-08-01 1993-07-27 Canon Kabushiki Kaisha Wafer table and exposure apparatus with the same
WO1998031046A3 (de) * 1997-01-13 1998-11-05 Siemens Ag Teststation für halbleiterwafer bzw. bruchstücke von halbleiterwafern
WO2002009155A3 (en) * 2000-07-10 2003-08-14 Temptronic Corp Wafer chuck having with interleaved heating and cooling elements
EP2863421A1 (de) * 2010-12-20 2015-04-22 EV Group E. Thallner GmbH Aufnahmeeinrichtung zur Halterung von Wafern

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6005226A (en) * 1997-11-24 1999-12-21 Steag-Rtp Systems Rapid thermal processing (RTP) system with gas driven rotating substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2735043A1 (de) * 1976-08-17 1978-02-23 Elektromat Veb Vorrichtung zum kompensieren der waermeeinwirkung an justier- und belichtungseinrichtungen
US4139051A (en) * 1976-09-07 1979-02-13 Rockwell International Corporation Method and apparatus for thermally stabilizing workpieces
US4202623A (en) * 1979-01-08 1980-05-13 The Perkin-Elmer Corporation Temperature compensated alignment system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473578A (en) * 1977-11-24 1979-06-12 Toshiba Corp Pattern exposure method of semiconductor substrate and pattern exposure apparatus
JPS5626437A (en) * 1979-08-13 1981-03-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Wafer supporting base

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2735043A1 (de) * 1976-08-17 1978-02-23 Elektromat Veb Vorrichtung zum kompensieren der waermeeinwirkung an justier- und belichtungseinrichtungen
US4139051A (en) * 1976-09-07 1979-02-13 Rockwell International Corporation Method and apparatus for thermally stabilizing workpieces
US4202623A (en) * 1979-01-08 1980-05-13 The Perkin-Elmer Corporation Temperature compensated alignment system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
R.Müller: Bauelemente der Halbleiter- Elektronik, 1973, S. 197-199 *

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3608783A1 (de) * 1986-03-15 1987-09-17 Telefunken Electronic Gmbh Gasphasen-epitaxieverfahren und vorrichtung zu seiner durchfuehrung
EP0411916A3 (en) * 1989-08-01 1991-10-30 Canon Kabushiki Kaisha Wafer table and exposure apparatus with the same
US5231291A (en) * 1989-08-01 1993-07-27 Canon Kabushiki Kaisha Wafer table and exposure apparatus with the same
DE4200283A1 (de) * 1991-01-08 1992-07-09 Sematech Inc Schleudergiessen von siliziumwafern unter nachwachsen von silizium
DE4200283C2 (de) * 1991-01-08 1998-01-29 Sematech Inc Verfahren und Vorrichtung zum Schleudergießen von Siliziumwafern unter Nachwachsen von Silizium
EP0523414A1 (en) * 1991-06-26 1993-01-20 Enya Systems Limited Wafer mounting device
US5172949A (en) * 1991-08-02 1992-12-22 Smc Kabushiki Kaisha Suction pad with temperature control mechanism
WO1998031046A3 (de) * 1997-01-13 1998-11-05 Siemens Ag Teststation für halbleiterwafer bzw. bruchstücke von halbleiterwafern
WO2002009155A3 (en) * 2000-07-10 2003-08-14 Temptronic Corp Wafer chuck having with interleaved heating and cooling elements
US6700099B2 (en) 2000-07-10 2004-03-02 Temptronic Corporation Wafer chuck having thermal plate with interleaved heating and cooling elements, interchangeable top surface assemblies and hard coated layer surfaces
US6969830B2 (en) 2000-07-10 2005-11-29 Temptronic Corporation Wafer chuck having thermal plate with interleaved heating and cooling elements
EP2863421A1 (de) * 2010-12-20 2015-04-22 EV Group E. Thallner GmbH Aufnahmeeinrichtung zur Halterung von Wafern
US10325798B2 (en) 2010-12-20 2019-06-18 Ev Group E. Thallner Gmbh Accommodating device for retaining wafers
US10886156B2 (en) 2010-12-20 2021-01-05 Ev Group E. Thallner Gmbh Accomodating device for retaining wafers
US11355374B2 (en) 2010-12-20 2022-06-07 Ev Group E. Thallner Gmbh Accommodating device for retaining wafers
US11756818B2 (en) 2010-12-20 2023-09-12 Ev Group E. Thallner Gmbh Accommodating device for retaining wafers

Also Published As

Publication number Publication date
JPS58178536A (ja) 1983-10-19
DE3306999C2 (https=) 1988-11-17
JPH0363218B2 (https=) 1991-09-30

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8128 New person/name/address of the agent

Representative=s name: HENKEL, G., DR.PHIL. FEILER, L., DR.RER.NAT. HAENZ

8127 New person/name/address of the applicant

Owner name: PERKIN-ELMER CENSOR ANSTALT, VADUZ, LI

D2 Grant after examination
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: DERZEIT KEIN VERTRETER BESTELLT

8339 Ceased/non-payment of the annual fee