DE3213275A1 - Piezoelektrischer motor - Google Patents

Piezoelektrischer motor

Info

Publication number
DE3213275A1
DE3213275A1 DE19823213275 DE3213275A DE3213275A1 DE 3213275 A1 DE3213275 A1 DE 3213275A1 DE 19823213275 DE19823213275 DE 19823213275 DE 3213275 A DE3213275 A DE 3213275A DE 3213275 A1 DE3213275 A1 DE 3213275A1
Authority
DE
Germany
Prior art keywords
oscillator
piezoelectric motor
motor according
rotor
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19823213275
Other languages
German (de)
English (en)
Inventor
Leonid Ivanovič Šinkarenko
Oleg Leonidovič Boičenko
Jurij Vladimirovič Golovyašin
Oleg Georgievič Kiev Juraš
Igor Aleksandrovič KartaŠev
Vitalij Stepanovič Koval
Vyačeslav Vasilievič Lavrinenko
Nikolai Fedorovič Serov
Vladimir Sergeevič Višnevsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kievsky Politekhnichesky Institut Imeni
Original Assignee
Kievsky Politekhnichesky Institut Imeni
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kievsky Politekhnichesky Institut Imeni filed Critical Kievsky Politekhnichesky Institut Imeni
Publication of DE3213275A1 publication Critical patent/DE3213275A1/de
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/002Driving devices, e.g. vibrators using only longitudinal or radial modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005Mechanical details, e.g. housings
    • H02N2/0065Friction interface
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE19823213275 1982-04-16 1982-04-08 Piezoelektrischer motor Granted DE3213275A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8206613A FR2525410A1 (fr) 1982-04-16 1982-04-16 Moteur piezo-electrique

Publications (1)

Publication Number Publication Date
DE3213275A1 true DE3213275A1 (de) 1983-10-20

Family

ID=9273099

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19823213275 Granted DE3213275A1 (de) 1982-04-16 1982-04-08 Piezoelektrischer motor

Country Status (10)

Country Link
US (1) US4453103A (US20100056889A1-20100304-C00004.png)
JP (1) JPS58192474A (US20100056889A1-20100304-C00004.png)
AT (1) AT384912B (US20100056889A1-20100304-C00004.png)
AU (1) AU556659B2 (US20100056889A1-20100304-C00004.png)
CA (1) CA1190953A (US20100056889A1-20100304-C00004.png)
DE (1) DE3213275A1 (US20100056889A1-20100304-C00004.png)
FR (1) FR2525410A1 (US20100056889A1-20100304-C00004.png)
GB (1) GB2118374B (US20100056889A1-20100304-C00004.png)
NL (1) NL8201578A (US20100056889A1-20100304-C00004.png)
SE (1) SE452932B (US20100056889A1-20100304-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4133108A1 (de) * 1991-10-05 1993-04-08 Philips Patentverwaltung Elektrischer rotations- oder linearmotor, dessen laeufer mittels ultraschallschwingungen angetrieben wird
DE4305894C1 (de) * 1993-02-26 1994-08-18 Daimler Benz Ag Schwingungsanregung bei einem Schwingungsmotor mit zylinderförmigem Schwingkörper

Families Citing this family (114)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204477A (ja) * 1983-05-04 1984-11-19 Nippon Kogaku Kk <Nikon> 超音波モーターの駆動制御回路
USRE34409E (en) * 1983-05-04 1993-10-19 Nikon Corporation Drive circuit for surface-wave driven motor utilizing ultrasonic vibration
JPS6096183A (ja) * 1983-10-26 1985-05-29 Canon Inc 振動波モータ
JPS60156282A (ja) * 1984-01-23 1985-08-16 West Electric Co Ltd 中空型超音波モータ
US4786836A (en) * 1984-03-01 1988-11-22 Matsushita Electric Industrail Co., Ltd. Piezoelectric motor
US4649311A (en) * 1984-04-02 1987-03-10 Canon Kabushiki Kaisha Vibration wave motor
JPS60188396U (ja) * 1984-05-25 1985-12-13 カシオ計算機株式会社 指針式時計
JPS6127493U (ja) * 1984-07-24 1986-02-19 オリエント時計株式会社 超音波モ−タ
JPS61142976A (ja) * 1984-12-12 1986-06-30 Ngk Spark Plug Co Ltd 回転駆動体
JPS61224882A (ja) * 1985-03-29 1986-10-06 Canon Inc 振動波モ−タ
GB2183929B (en) * 1985-08-05 1989-11-15 Canon Kk Vibration wave motor
US5347192A (en) * 1985-08-05 1994-09-13 Canon Kabushiki Kaisha Vibration wave motor
US4882500A (en) * 1986-06-04 1989-11-21 Nippon Seimitsu Kogyo Kabushiki Kaisha Method for converting standing wave vibrations into motion and standing wave motor therefor
JP2632811B2 (ja) * 1986-08-29 1997-07-23 キヤノン株式会社 振動駆動モータ
US4868446A (en) * 1987-01-22 1989-09-19 Hitachi Maxell, Ltd. Piezoelectric revolving resonator and ultrasonic motor
JPH01502384A (ja) * 1987-02-28 1989-08-17 キエフスキ ポリテクニチェスキ インスチテュート イメニ 50―レティア ヴェリコイ オクチャブルスコイ ソツイアリスチチェスコイ レヴォリューツイイ 圧電モータ
JP2525019B2 (ja) * 1987-06-05 1996-08-14 アルプス電気株式会社 超音波リニアモ―タ
US4755705A (en) * 1987-06-15 1988-07-05 Holum Mark J Piezoelectric motor
JP2690907B2 (ja) * 1987-09-25 1997-12-17 株式会社日立製作所 複合型圧電モータ
DE3735623A1 (de) * 1987-10-21 1989-05-03 Philips Patentverwaltung Elektrischer rotations- oder linearmotor, dessen laeufer mittels ultraschallschwingungen angetrieben wird
JPH01270776A (ja) * 1988-04-22 1989-10-30 Aisin Seiki Co Ltd 超音波モータの動体
DE68917525T2 (de) * 1988-05-26 1995-01-12 Toda Koji Antriebsanordnung vom Schwingungstyp.
DE3920726A1 (de) * 1988-06-29 1990-01-04 Olympus Optical Co Ultraschalloszillator
US5140215A (en) * 1988-09-19 1992-08-18 Brother Kogyo Kabushiki Kaisha Vibrator and ultrasonic motor employing the same
US5049775A (en) * 1988-09-30 1991-09-17 Boston University Integrated micromechanical piezoelectric motor
US5043621A (en) * 1988-09-30 1991-08-27 Rockwell International Corporation Piezoelectric actuator
US4928030A (en) * 1988-09-30 1990-05-22 Rockwell International Corporation Piezoelectric actuator
JPH0723036Y2 (ja) * 1988-10-21 1995-05-24 アルプス電気株式会社 超音波モータ
GB2235820A (en) * 1989-06-21 1991-03-13 Brother Ind Ltd A drive system for a mechanical part of an image forming apparatus
US4987334A (en) * 1989-08-15 1991-01-22 Northrop Corporation Piezoelectric dither motor
JP2766387B2 (ja) * 1990-08-24 1998-06-18 アルプス電気株式会社 摩擦材の製造方法及びその摩擦材を使用した超音波モータ
JPH05503834A (ja) * 1990-12-04 1993-06-17 スカンソブ トランスポート アクチボラゲット 圧電モータ
CH680487B5 (US20100056889A1-20100304-C00004.png) * 1991-03-28 1993-03-15 Ebauchesfabrik Eta Ag
US5637973A (en) * 1992-06-18 1997-06-10 Kabushiki Kaisha Yaskawa Denki Noncontacting electric power transfer apparatus, noncontacting signal transfer apparatus, split-type mechanical apparatus employing these transfer apparatus and a control method for controlling same
US5410206A (en) * 1993-04-06 1995-04-25 New Focus, Inc. Piezoelectric actuator for optical alignment screws
EP0682403B1 (en) * 1993-11-30 1999-04-21 Citizen Watch Co. Ltd. Micromotor
US5396142A (en) * 1994-01-24 1995-03-07 Evan Koblanski Positioning apparatus
JP3823340B2 (ja) * 1994-08-01 2006-09-20 株式会社ニコン 振動モータ
CH686854B5 (de) * 1994-12-29 1997-01-31 Ebauchesfabrik Eta Ag Piezoelektrischer Motor mit Einrichtung, die Informationen bezueglich der Rotorposition und/oder -drehzahl liefert.
DE19507996A1 (de) * 1995-03-07 1996-09-12 Philips Patentverwaltung Elektrischer Rotationsmotor, dessen Läufer mittels Ultraschallschwingungen angetrieben wird
US5561337A (en) * 1995-04-13 1996-10-01 Toda; Kohji Ultrasonic vibrating actuator
US5565726A (en) * 1995-04-13 1996-10-15 Toda; Kohji Ultrasonic vibrating actuator
US5714832A (en) * 1996-03-15 1998-02-03 Hughes Electronics Miniature grating device
JP3190613B2 (ja) * 1997-03-31 2001-07-23 セイコーインスツルメンツ株式会社 圧電アクチュエータ
JP3184117B2 (ja) * 1997-05-23 2001-07-09 セイコーインスツルメンツ株式会社 超音波モータ及び超音波モータ付き電子機器
DE19757139A1 (de) * 1997-12-20 1999-06-24 Philips Patentverwaltung Antriebsvorrichtung für wenigstens zwei Rotationselemente mit wenigstens einem piezoelektrischen Antriebselement
US6069419A (en) * 1998-06-16 2000-05-30 Tabib-Azar; Massood Micro-actuator assembly
GB2349738B (en) * 1999-05-07 2003-08-06 Univ Cranfield Improvements in or relating to ultrasonic motors
JP4180737B2 (ja) * 1999-06-02 2008-11-12 株式会社東芝 滑り検出装置及び媒体取出装置
US6242850B1 (en) 1999-07-28 2001-06-05 Technology Commercialization Corp. Piezoelectric motor and a disk drive using same
JP4795596B2 (ja) * 1999-11-29 2011-10-19 ミニスイス・ソシエテ・アノニム 圧電ドライブ
US6373170B1 (en) 2000-03-10 2002-04-16 Edo Electro-Ceramic Products Piezo-electric motor
US6870304B2 (en) * 2000-03-23 2005-03-22 Elliptec Resonant Actuator Ag Vibratory motors and methods of making and using same
US6429573B2 (en) * 2000-06-23 2002-08-06 The Penn State Research Foundation Smart material motor with mechanical diodes
CA2315013C (en) 2000-08-03 2005-02-08 Eontech Group, Inc. Piezoelectric motor
JP2002058266A (ja) * 2000-08-08 2002-02-22 Minolta Co Ltd 超音波駆動装置
CA2320011A1 (en) 2000-09-18 2002-03-18 Eontech Group, Inc. Piezoelectric motor
US6936951B1 (en) 2000-11-27 2005-08-30 Grq Instruments, Inc. Smart sonic bearings and method for frictional force reduction and switching
US20050127789A1 (en) * 2001-03-08 2005-06-16 Magnussen Bjoern B. Piezoelectric motors and methods for the production and operation thereof
DE10113660A1 (de) * 2001-03-21 2002-09-26 Koninkl Philips Electronics Nv Piezoelektrischer Antrieb
JP4613006B2 (ja) * 2001-06-06 2011-01-12 ミニスイス・ソシエテ・アノニム 圧電駆動装置
WO2003056370A2 (en) * 2001-08-09 2003-07-10 Bainbridge Networks, Inc. Fiber optic switch and piezoelectric motor
DE10146703A1 (de) * 2001-09-21 2003-04-10 Elliptec Resonant Actuator Ag Piezomotor mit Führung
EP1438754B1 (de) * 2001-10-22 2005-12-28 miniswys SA Piezoelektrischer antrieb
JP3985866B2 (ja) * 2001-12-05 2007-10-03 富士フイルム株式会社 超音波トランスジューサ及びその製造方法
EP1483826B1 (en) * 2002-02-06 2007-11-14 Elliptec Resonant Actuator AG Piezoelectric motor control
JP4282487B2 (ja) * 2002-03-15 2009-06-24 ミニスイス・ソシエテ・アノニム 圧電モータおよび圧電モータを駆動するための方法
US7368853B2 (en) * 2002-04-22 2008-05-06 Elliptec Resonant Actuator Aktiengesellschaft Piezoelectric motors and methods for the production and operation thereof
UA71044C2 (uk) * 2002-06-13 2004-11-15 Сергій Федорович Петренко Мікроманіпулятор
JP3566711B2 (ja) * 2002-07-12 2004-09-15 キヤノン株式会社 振動波駆動装置
US20040113519A1 (en) * 2002-12-12 2004-06-17 Charles Mentesana Micro-beam friction liner and method of transferring energy
JP2004320979A (ja) * 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
JP2004320980A (ja) * 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
US6867532B2 (en) * 2003-07-17 2005-03-15 The Brady Group Inc. Long life piezoelectric drive and components
ES2231002A1 (es) * 2003-09-09 2005-05-01 Universitat Politecnica De Catalunya Motor piezoelectrico ultrasonico.
WO2005101647A2 (en) * 2003-09-30 2005-10-27 The Trustees Of Columbia University In The City Of New York Harmonic propulsion and harmonic controller
DE102004020329A1 (de) * 2004-04-26 2005-11-10 Epcos Ag Elektrische Funktionseinheit und Verfahren zu deren Herstellung
US7436101B1 (en) * 2004-11-04 2008-10-14 Elliptec Resonant Actuator Ag Multistage piezoelectric drive
DE102005017108A1 (de) * 2005-01-26 2006-07-27 Epcos Ag Piezoelektrisches Bauelement
JP4756916B2 (ja) * 2005-05-31 2011-08-24 キヤノン株式会社 振動波モータ
US7545076B1 (en) 2005-07-11 2009-06-09 Itt Manufacturing Enterprises, Inc. System and method for tracking drive frequency of piezoelectric motor
ATE551733T1 (de) 2005-08-24 2012-04-15 Smaract Gmbh Rotatorische trägheitsantriebsvorrichtung
JP4874610B2 (ja) * 2005-09-16 2012-02-15 Hoya株式会社 超音波モータ
US7301257B2 (en) * 2005-10-14 2007-11-27 Academia Sinica Motion actuator
UA84563C2 (ru) * 2005-11-29 2008-11-10 Сергей Федорович Петренко Моторный клапан с поворотной пробкой
UA84065C2 (ru) * 2006-11-09 2008-09-10 Сергей Федорович Петренко Пьезоэлектрический генератор механических колебаний и пьезоелектрический двигатель на его основе (варианты)
US10355623B1 (en) 2006-12-07 2019-07-16 Dmitriy Yavid Generator employing piezolectric and resonating elements with synchronized heat delivery
US9590534B1 (en) 2006-12-07 2017-03-07 Dmitriy Yavid Generator employing piezoelectric and resonating elements
US7696673B1 (en) 2006-12-07 2010-04-13 Dmitriy Yavid Piezoelectric generators, motor and transformers
EP2122702B1 (en) * 2007-01-18 2015-08-26 Newport Corporation Optical adjustment mounts with piezoelectric inertia driver
EP2142407B1 (en) * 2007-04-13 2019-02-20 Technion Research & Development Foundation Ltd. Vibrating robotic crawler
JP2008301673A (ja) * 2007-06-04 2008-12-11 Konica Minolta Opto Inc 摩擦駆動アクチュエータおよびそれを用いるハードディスク装置
US7915787B2 (en) * 2007-07-20 2011-03-29 Canon Kabushiki Kaisha Actuator
DE102008012992A1 (de) * 2008-03-07 2009-09-10 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
TWI408888B (zh) * 2008-08-07 2013-09-11 Ind Tech Res Inst 超音波線性馬達
CN102292908A (zh) * 2008-12-17 2011-12-21 发现技术国际股份有限公司 有高力矩的压电电机
WO2010080432A1 (en) * 2008-12-19 2010-07-15 Discovery Technology International, Lllp Piezoelectric motor
US8183742B2 (en) * 2009-09-01 2012-05-22 Discovery Technology International, Inc. Piezoelectric rotary motor with high rotation speed and bi-directional operation
KR101044216B1 (ko) * 2010-01-04 2011-06-29 삼성전기주식회사 압전 액츄에이터 모듈
KR101044130B1 (ko) * 2010-01-04 2011-06-24 삼성전기주식회사 압전 액츄에이터 모듈
JP2011182625A (ja) * 2010-02-02 2011-09-15 Aisin Seiki Co Ltd 回転駆動装置
WO2011139706A2 (en) * 2010-04-26 2011-11-10 Discovery Technology International, Inc. Tubular linear piezoelectric motor
EP2593826A4 (en) 2010-07-15 2014-12-17 Newport Corp ADJUSTABLE OPTICAL SUPPORTS ENSURING A RETURN TO THE ABSOLUTE POSITION
DE102010035045A1 (de) * 2010-08-20 2012-02-23 Aspre Ag Piezomotor
JP2012070547A (ja) * 2010-09-24 2012-04-05 Aisin Seiki Co Ltd 回転駆動装置
JP5857843B2 (ja) * 2012-03-29 2016-02-10 セイコーエプソン株式会社 圧電モーター、ロボットハンドおよびロボット
JP5990067B2 (ja) * 2012-09-13 2016-09-07 キヤノン株式会社 振動型駆動装置および電子機器
UA104667C2 (en) * 2012-09-18 2014-02-25 Сергей Федорович Петренко Piezoelectric motor
US9312790B2 (en) 2013-09-13 2016-04-12 Physik Instrumente (Pi) Gmbh & Co. Kg Compact versatile stick-slip piezoelectric motor
US9425711B2 (en) 2014-04-15 2016-08-23 Newport Corporation Integral preload mechanism for piezoelectric actuator
KR20170109594A (ko) 2015-01-29 2017-09-29 뉴포트 코포레이션 일체형 피코모터 장착부
CN108011540A (zh) * 2017-12-04 2018-05-08 东南大学 一种驻波型步进超声波电机
US11482658B1 (en) 2018-06-06 2022-10-25 Government Of The United States As Represented By The Secretary Of The Air Force Piezoelectric rotary optical mount
US20230009043A1 (en) * 2019-12-16 2023-01-12 Piezomotor Uppsala Ab Electromechanical actuators with composite drive pads

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3211931A (en) * 1962-12-10 1965-10-12 Gen Electric Electromechanical transducer motors
DE2530045A1 (de) * 1974-07-05 1976-02-05 Ki Politekhn I Im 50 Letia Wel Elektrischer motor
US4019073A (en) * 1975-08-12 1977-04-19 Vladimir Sergeevich Vishnevsky Piezoelectric motor structures

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2439499A (en) * 1942-08-20 1948-04-13 Brush Dev Co Piezoelectric motor
CH384476A (fr) * 1962-01-05 1964-07-15 Ceppi Georges Dispositif d'entraînement d'un rouage de pièce d'horlogerie
JPS5832518B2 (ja) * 1975-09-01 1983-07-13 キエフスキ−.ポリチエフニチエスキ−.Inst.イメニ.50−レチア.ベリコイ.オクチヤブルスコイ.ソシイアリスチチエスコイ.レボリユツイ− 圧電モ−タ
SU576625A1 (ru) * 1976-03-29 1977-10-15 Специальное Проектно-Конструкторское И Технологическое Бюро Малых Электрических Машин Производственного Объединения "Эльфа" Вибродвигатель
SU577591A1 (ru) * 1976-04-01 1977-10-25 Каунасский Политехнический Институт Им. Антанаса Снечкуса Пьезоэлектрический двигатель
SU573828A1 (ru) * 1976-06-08 1977-09-25 Киевский Ордена Ленина Политехнический Институт Имени 50-Летия Великой Октябрьской Социалистической Революции Пьезоэлектрический двигатель
SU573829A1 (ru) * 1976-06-22 1977-09-25 Предприятие П/Я А-7677 Электропривод
SU646393A1 (ru) * 1978-01-25 1979-02-05 Каунасский Политехнический Институт Им. Антанаса Снечкуса Пьезоэлектрический вибродвигатель
GB2044014A (en) * 1979-03-08 1980-10-08 Sp P Konstrukt I Tekhnolog Bju Piezoelectric vibration motor
US4210837A (en) * 1979-03-08 1980-07-01 Misikov Vitaly M Piezoelectrically driven torsional vibration motor
GB2044015A (en) * 1979-03-08 1980-10-08 Sp P Konstrukt I Tekhnolog Bju Piezoelectric vibration motor
US4325264A (en) * 1980-03-24 1982-04-20 Toshiiku Sashida Supersonic vibration driven motor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3211931A (en) * 1962-12-10 1965-10-12 Gen Electric Electromechanical transducer motors
DE2530045A1 (de) * 1974-07-05 1976-02-05 Ki Politekhn I Im 50 Letia Wel Elektrischer motor
US4019073A (en) * 1975-08-12 1977-04-19 Vladimir Sergeevich Vishnevsky Piezoelectric motor structures

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4133108A1 (de) * 1991-10-05 1993-04-08 Philips Patentverwaltung Elektrischer rotations- oder linearmotor, dessen laeufer mittels ultraschallschwingungen angetrieben wird
DE4305894C1 (de) * 1993-02-26 1994-08-18 Daimler Benz Ag Schwingungsanregung bei einem Schwingungsmotor mit zylinderförmigem Schwingkörper

Also Published As

Publication number Publication date
AU556659B2 (en) 1986-11-13
GB2118374B (en) 1986-01-29
ATA130582A (de) 1987-06-15
CA1190953A (en) 1985-07-23
FR2525410A1 (fr) 1983-10-21
SE8202160L (sv) 1983-10-06
AT384912B (de) 1988-01-25
US4453103A (en) 1984-06-05
FR2525410B1 (US20100056889A1-20100304-C00004.png) 1984-07-20
NL8201578A (nl) 1983-11-01
AU8249982A (en) 1983-10-13
SE452932B (sv) 1987-12-21
GB2118374A (en) 1983-10-26
JPS58192474A (ja) 1983-11-09

Similar Documents

Publication Publication Date Title
DE3213275A1 (de) Piezoelektrischer motor
DE3213348C2 (de) Piezoelektrischer Motor
EP1747594B1 (de) Piezoelektrischer ultraschallmotor
EP0306530A1 (de) Piezoelektrischer motor
DE3415628C2 (US20100056889A1-20100304-C00004.png)
DE3587940T2 (de) Piezoelektrischer Motor.
EP0811252B1 (de) Ultraschallantriebselement
DE3703676C2 (US20100056889A1-20100304-C00004.png)
EP2153476B1 (de) Ultraschallaktor
DE19938954A1 (de) Piezoelektrischer Antrieb, insbesondere zur Erzeugung von Rotations- oder Translationsbewegungen, die stetig oder schrittweise erfolgen können
EP1267425A2 (de) Piezoelektrisches Stellelement
EP0313130A2 (de) Elektrischer Rotations- oder Linearmotor, dessen Läufer mittels Ultraschallschwingungen angetrieben wird
EP2489081B1 (de) Aktuator
DE2560628C2 (US20100056889A1-20100304-C00004.png)
EP2497129B1 (de) Aktuator
EP2156480B1 (de) Piezoelektrische antriebsvorrichtung
EP0552346B1 (de) Elektroaktorischer motor
DE102013105024B3 (de) Ultraschallmotor
DE102006020553A1 (de) Piezoelektrischer Vibrator und Ultraschallmotor mit piezoelektrischem Vibrator
DE3635806A1 (de) Ultraschallvibrator
DE4216050C2 (de) Ultraschallwanderwellenmotor mit formschlüssiger Anregung von Wanderwellen
DE4408618A1 (de) Verstellantrieb aus Bimorphelementen
EP1581992A2 (de) Verfahren zum Betreiben eines piezoelektrischen Motors sowie piezoelektrischer Motor mit einem Stator in Form eines hohlzylindrischen Oszillators
DE3600008A1 (de) Ultraschallmotor
DE102022114863B3 (de) Ultraschallmotor

Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
OP8 Request for examination as to paragraph 44 patent law
8125 Change of the main classification

Ipc: H02N 2/00

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee