DE3151800A1 - Anordnung zum ermitteln der lage eines werkstuecks - Google Patents
Anordnung zum ermitteln der lage eines werkstuecksInfo
- Publication number
- DE3151800A1 DE3151800A1 DE19813151800 DE3151800A DE3151800A1 DE 3151800 A1 DE3151800 A1 DE 3151800A1 DE 19813151800 DE19813151800 DE 19813151800 DE 3151800 A DE3151800 A DE 3151800A DE 3151800 A1 DE3151800 A1 DE 3151800A1
- Authority
- DE
- Germany
- Prior art keywords
- light
- workpiece
- detector
- light spot
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56024329A JPS57139607A (en) | 1981-02-23 | 1981-02-23 | Position measuring equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3151800A1 true DE3151800A1 (de) | 1982-09-09 |
DE3151800C2 DE3151800C2 (fr) | 1987-04-16 |
Family
ID=12135136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19813151800 Granted DE3151800A1 (de) | 1981-02-23 | 1981-12-29 | Anordnung zum ermitteln der lage eines werkstuecks |
Country Status (3)
Country | Link |
---|---|
US (1) | US4589773A (fr) |
JP (1) | JPS57139607A (fr) |
DE (1) | DE3151800A1 (fr) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3407074A1 (de) * | 1984-02-27 | 1985-08-29 | Optische Werke G. Rodenstock, 8000 München | Optoelektronisches antastsystem |
EP0183240A2 (fr) * | 1984-11-28 | 1986-06-04 | Honeywell Inc. | Capteur de position d'une surface |
EP0188827A1 (fr) * | 1984-11-02 | 1986-07-30 | B.V. Optische Industrie "De Oude Delft" | Circuit donnant la position d'un point de lumière sur un support photosensible |
DE3640159A1 (de) * | 1985-11-25 | 1987-05-27 | Matsushita Electric Works Ltd | Optische verschiebungsmesseinrichtung |
FR2600412A1 (fr) * | 1986-06-18 | 1987-12-24 | Bertin & Cie | Dispositif opto-electronique pour la determination de la distance et de la forme d'un objet |
DE3728691A1 (de) * | 1986-08-28 | 1988-03-10 | Nissan Motor | Lichtempfindlicher positionssensor |
DE3736704A1 (de) * | 1986-10-31 | 1988-05-11 | Canon Kk | Verstellungsmessvorrichtung |
EP0282549A1 (fr) * | 1986-09-08 | 1988-09-21 | Cyberoptics Corporation | Sonde a laser |
DE3709614A1 (de) * | 1987-03-24 | 1988-10-20 | Messerschmitt Boelkow Blohm | Verfahren und vorrichtung zur positionsbestimmung |
US4934810A (en) * | 1987-12-21 | 1990-06-19 | Carl-Zeiss-Stiftung | Method and apparatus for controlling the quantity of emitted light in an optical measuring head |
DE19855478A1 (de) * | 1998-12-01 | 2000-06-21 | Steinbichler Optotechnik Gmbh | Verfahren und Vorrichtung zur optischen Erfassung einer Kontrastlinie |
DE10026830A1 (de) * | 2000-05-30 | 2001-12-06 | Zeiss Carl Jena Gmbh | Optischer Sensor zur Messung des Abstands und/oder der Neigung einer Fläche |
DE102004025210B4 (de) * | 2004-05-22 | 2011-07-21 | Halang, Wolfgang, Prof. Dr. Dr., 58119 | Optischer Analog-Wegsensor |
Families Citing this family (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4468565A (en) * | 1981-12-31 | 1984-08-28 | International Business Machines Corporation | Automatic focus and deflection correction in E-beam system using optical target height measurements |
US4753528A (en) * | 1983-12-13 | 1988-06-28 | Quantime, Inc. | Laser archery distance device |
JPS61112907A (ja) * | 1984-11-07 | 1986-05-30 | Kosaka Kenkyusho:Kk | 微細形状測定器 |
JPH061176B2 (ja) * | 1985-01-21 | 1994-01-05 | 住友金属工業株式会社 | 形状測定装置 |
EP0197221B1 (fr) * | 1985-03-15 | 1989-06-28 | Kabushiki Kaisha Toshiba | Dispositif de mesure de la position d'un objet |
US5162642A (en) * | 1985-11-18 | 1992-11-10 | Canon Kabushiki Kaisha | Device for detecting the position of a surface |
JPS62140420A (ja) * | 1985-12-16 | 1987-06-24 | Canon Inc | 面位置検知装置 |
NL8600253A (nl) * | 1986-02-03 | 1987-09-01 | Philips Nv | Optisch afbeeldingssysteem voorzien van een opto-elektronisch fokusfoutdetektiestelsel. |
JPH0623646B2 (ja) * | 1986-03-10 | 1994-03-30 | 工業技術院長 | 撮像式塗装下地処理面グレ−ド判定装置 |
US4748333A (en) * | 1986-03-31 | 1988-05-31 | Nippon Kogaku K. K. | Surface displacement sensor with opening angle control |
JPS63106501A (ja) * | 1986-10-24 | 1988-05-11 | Hitachi Ltd | 開先位置検出方法 |
JPS6432105A (en) * | 1987-07-28 | 1989-02-02 | Pioneer Electronic Corp | Angle deviation measuring instrument for flat plate member |
US4971443A (en) * | 1987-12-25 | 1990-11-20 | Dainippon Screen Mfg. Co., Ltd. | Optical position detecting method and apparatus therefor |
US5001508A (en) * | 1988-02-13 | 1991-03-19 | Asahi Kogaku Kogyo K.K. | Range finder |
US5218415A (en) * | 1988-05-31 | 1993-06-08 | Canon Kabushiki Kaisha | Device for optically detecting inclination of a surface |
JPH0267903A (ja) * | 1988-09-02 | 1990-03-07 | Canon Inc | 光量調節装置 |
JPH032520A (ja) * | 1990-04-20 | 1991-01-08 | Hitachi Ltd | 位置検出器 |
US5272517A (en) * | 1990-06-13 | 1993-12-21 | Matsushita Electric Industrial Co., Ltd. | Height measurement apparatus using laser light beam |
US5179287A (en) * | 1990-07-06 | 1993-01-12 | Omron Corporation | Displacement sensor and positioner |
US5055664A (en) * | 1990-08-06 | 1991-10-08 | Eaton Corporation | Optical distance measuring system using a position sensitive device and a ramp generator driven light source |
US5113082A (en) * | 1990-09-11 | 1992-05-12 | Moshe Golberstein | Electro-optical instrument with self-contained photometer |
DE4039742A1 (de) * | 1990-12-08 | 1992-06-11 | Francotyp Postalia Gmbh | Fluessigkeitsstrahl-druckvorrichtung fuer frankier- und wertstempelmaschinen |
US5311271A (en) * | 1992-01-21 | 1994-05-10 | Dme/Golf, Inc. | Golf course range finder |
US5269070A (en) * | 1992-10-19 | 1993-12-14 | Thurston Wm H | Instrument for measuring flatness or uniformity of curvature |
US6271916B1 (en) * | 1994-03-24 | 2001-08-07 | Kla-Tencor Corporation | Process and assembly for non-destructive surface inspections |
US5864394A (en) * | 1994-06-20 | 1999-01-26 | Kla-Tencor Corporation | Surface inspection system |
US5530550A (en) * | 1994-12-21 | 1996-06-25 | Tencor Instruments | Optical wafer positioning system |
US5883710A (en) | 1994-12-08 | 1999-03-16 | Kla-Tencor Corporation | Scanning system for inspecting anomalies on surfaces |
US5576831A (en) * | 1994-06-20 | 1996-11-19 | Tencor Instruments | Wafer alignment sensor |
TW299035U (en) * | 1994-07-11 | 1997-02-21 | Barmag Barmer Maschf Co Ltd | Method of optically measuring the surface of yarn packages |
US20040057044A1 (en) * | 1994-12-08 | 2004-03-25 | Mehrdad Nikoonahad | Scanning system for inspecting anamolies on surfaces |
ATA107495A (de) * | 1995-06-23 | 1996-06-15 | Fercher Adolf Friedrich Dr | Kohärenz-biometrie und -tomographie mit dynamischem kohärentem fokus |
US5825482A (en) * | 1995-09-29 | 1998-10-20 | Kla-Tencor Corporation | Surface inspection system with misregistration error correction and adaptive illumination |
WO1997026529A1 (fr) * | 1996-01-19 | 1997-07-24 | Phase Metrics | Procede et appareil de controle de surface |
EP0979398B1 (fr) * | 1996-06-04 | 2012-01-04 | KLA-Tencor Corporation | Systeme de balayage optique pour l'examen d'une surface |
JP4067602B2 (ja) * | 1996-12-09 | 2008-03-26 | 富士通株式会社 | 高さ検査方法、それを実施する高さ検査装置 |
US5923427A (en) * | 1997-07-10 | 1999-07-13 | Banner Engineering Corporation | Optical triangulation distance sensing system and method using a position sensitive detector and an automatic power controlled light source |
US6956644B2 (en) * | 1997-09-19 | 2005-10-18 | Kla-Tencor Technologies Corporation | Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination |
US20040057045A1 (en) * | 2000-12-21 | 2004-03-25 | Mehdi Vaez-Iravani | Sample inspection system |
US6201601B1 (en) | 1997-09-19 | 2001-03-13 | Kla-Tencor Corporation | Sample inspection system |
US5929983A (en) * | 1997-10-29 | 1999-07-27 | International Business Machines Corporation | Optical apparatus for determining the height and tilt of a sample surface |
US6118113A (en) * | 1998-03-02 | 2000-09-12 | Hibbard; Earl Roger | Focusing mirror control system and method for adjusting same |
DE19814070B4 (de) * | 1998-03-30 | 2009-07-16 | Carl Zeiss Meditec Ag | Verfahren und Anordnung zur Kohärenz-Tomographie mit erhöhter Transversalauflösung |
EP0950881A3 (fr) * | 1998-04-17 | 2000-08-16 | NanoPhotonics AG | Méthode et dispositif pour l'ajustage automatique d'échantillons relativement à un ellipsomètre |
US20050134841A1 (en) * | 1998-09-18 | 2005-06-23 | Mehdi Vacz-Iravani | Sample inspection system |
GB9824986D0 (en) * | 1998-11-13 | 1999-01-06 | Isis Innovation | Non-contact topographical analysis apparatus and method thereof |
JP2000346643A (ja) * | 1999-06-09 | 2000-12-15 | Hamamatsu Photonics Kk | 光位置検出装置および距離センサ |
FR2814542B1 (fr) * | 2000-09-22 | 2003-01-03 | Schneider Electric Ind Sa | Detecteur optique a emission regulee |
US7004421B2 (en) * | 2002-05-28 | 2006-02-28 | Fuji Photo Film Co., Ltd. | Inspection device of winding appearance of tape and improvement processing method for the same |
CA2390072C (fr) | 2002-06-28 | 2018-02-27 | Adrian Gh Podoleanu | Appareil de representation optique a pouvoir separateur en profondeur reglable et a fonctions multiples |
JP4072495B2 (ja) * | 2003-12-15 | 2008-04-09 | キヤノン株式会社 | シート検出装置 |
DE102004032822A1 (de) * | 2004-07-06 | 2006-03-23 | Micro-Epsilon Messtechnik Gmbh & Co Kg | Verfahren zur Verarbeitung von Messwerten |
JP4785044B2 (ja) * | 2006-01-13 | 2011-10-05 | スタンレー電気株式会社 | 反射型光学センサ及び測定面の表面粗さ検出方法 |
KR100844280B1 (ko) | 2006-12-26 | 2008-07-07 | 한국기초과학지원연구원 | 투과전자현미경용 홀더의 오차측정 장치 및 방법 |
NL1036125A1 (nl) * | 2007-11-08 | 2009-05-11 | Asml Netherlands Bv | Lithographic apparatus and method. |
US8638437B2 (en) | 2008-02-14 | 2014-01-28 | J.A. Woollam Co., Inc. | System and method of aligning a sample |
US8064055B2 (en) * | 2008-02-14 | 2011-11-22 | J.A. Woollam Co., Inc. | System and method of aligning a sample |
DE102009040081A1 (de) * | 2008-09-04 | 2010-04-15 | Micro-Epsilon Optronic Gmbh | Verfahren zur Bewertung von Messwerten eines optischen Abstandssensors |
US8983787B1 (en) | 2008-12-12 | 2015-03-17 | Martin M. Liphardt | Method of evaluating data quality |
JP2010185692A (ja) * | 2009-02-10 | 2010-08-26 | Hitachi High-Technologies Corp | ディスク表面検査装置、その検査システム及びその検査方法 |
WO2013024102A1 (fr) * | 2011-08-16 | 2013-02-21 | Leica Geosystems Ag | Agencement à détecteurs de position multiples et circuit |
JP6380160B2 (ja) * | 2015-02-25 | 2018-08-29 | 三菱電機株式会社 | 真空ピンセット及び半導体装置の製造方法 |
US10541109B2 (en) * | 2016-07-27 | 2020-01-21 | Battelle Memorial Institute | Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1135182B (de) * | 1957-10-31 | 1962-08-23 | Zeiss Carl Fa | Verfahren und Vorrichtung zur beruehrungsfreien Ermittlung der Abmasse von Gegenstaenden von einem Sollmass |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3909131A (en) * | 1974-02-12 | 1975-09-30 | United Technologies Corp | Surface gauging by remote image tracking |
JPS5593008A (en) * | 1979-01-09 | 1980-07-15 | Canon Inc | Signal formation unit |
US4226536A (en) * | 1979-02-23 | 1980-10-07 | Dreyfus Marc G | Electro-optical contour measuring system |
US4299491A (en) * | 1979-12-11 | 1981-11-10 | United Technologies Corporation | Noncontact optical gauging system |
US4326804A (en) * | 1980-02-11 | 1982-04-27 | General Electric Company | Apparatus and method for optical clearance determination |
-
1981
- 1981-02-23 JP JP56024329A patent/JPS57139607A/ja active Granted
- 1981-12-22 US US06/333,295 patent/US4589773A/en not_active Expired - Lifetime
- 1981-12-29 DE DE19813151800 patent/DE3151800A1/de active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1135182B (de) * | 1957-10-31 | 1962-08-23 | Zeiss Carl Fa | Verfahren und Vorrichtung zur beruehrungsfreien Ermittlung der Abmasse von Gegenstaenden von einem Sollmass |
Non-Patent Citations (1)
Title |
---|
Firmenschrift "Optocator-Systembeschreibung", 1980, der Fa. Selcon Messysteme GmbH, Göttingen * |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3407074A1 (de) * | 1984-02-27 | 1985-08-29 | Optische Werke G. Rodenstock, 8000 München | Optoelektronisches antastsystem |
EP0188827A1 (fr) * | 1984-11-02 | 1986-07-30 | B.V. Optische Industrie "De Oude Delft" | Circuit donnant la position d'un point de lumière sur un support photosensible |
EP0183240A3 (fr) * | 1984-11-28 | 1989-07-05 | Honeywell Inc. | Capteur de position d'une surface |
EP0183240A2 (fr) * | 1984-11-28 | 1986-06-04 | Honeywell Inc. | Capteur de position d'une surface |
US4936676A (en) * | 1984-11-28 | 1990-06-26 | Honeywell Inc. | Surface position sensor |
DE3640159A1 (de) * | 1985-11-25 | 1987-05-27 | Matsushita Electric Works Ltd | Optische verschiebungsmesseinrichtung |
FR2600412A1 (fr) * | 1986-06-18 | 1987-12-24 | Bertin & Cie | Dispositif opto-electronique pour la determination de la distance et de la forme d'un objet |
WO1987007942A1 (fr) * | 1986-06-18 | 1987-12-30 | Bertin & Cie | Dispositif opto-electronique pour la determination de la distance et de la forme d'un objet |
DE3728691A1 (de) * | 1986-08-28 | 1988-03-10 | Nissan Motor | Lichtempfindlicher positionssensor |
EP0282549A1 (fr) * | 1986-09-08 | 1988-09-21 | Cyberoptics Corporation | Sonde a laser |
EP0282549A4 (en) * | 1986-09-08 | 1991-08-28 | Cyberoptics Corporation | Laser probe |
DE3736704A1 (de) * | 1986-10-31 | 1988-05-11 | Canon Kk | Verstellungsmessvorrichtung |
DE3709614A1 (de) * | 1987-03-24 | 1988-10-20 | Messerschmitt Boelkow Blohm | Verfahren und vorrichtung zur positionsbestimmung |
US4934810A (en) * | 1987-12-21 | 1990-06-19 | Carl-Zeiss-Stiftung | Method and apparatus for controlling the quantity of emitted light in an optical measuring head |
DE19855478A1 (de) * | 1998-12-01 | 2000-06-21 | Steinbichler Optotechnik Gmbh | Verfahren und Vorrichtung zur optischen Erfassung einer Kontrastlinie |
DE19855478B4 (de) * | 1998-12-01 | 2006-01-12 | Steinbichler Optotechnik Gmbh | Verfahren und Vorrichtung zur optischen Erfassung einer Kontrastlinie |
DE10026830A1 (de) * | 2000-05-30 | 2001-12-06 | Zeiss Carl Jena Gmbh | Optischer Sensor zur Messung des Abstands und/oder der Neigung einer Fläche |
DE102004025210B4 (de) * | 2004-05-22 | 2011-07-21 | Halang, Wolfgang, Prof. Dr. Dr., 58119 | Optischer Analog-Wegsensor |
Also Published As
Publication number | Publication date |
---|---|
DE3151800C2 (fr) | 1987-04-16 |
US4589773A (en) | 1986-05-20 |
JPS57139607A (en) | 1982-08-28 |
JPH044522B2 (fr) | 1992-01-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8128 | New person/name/address of the agent |
Representative=s name: VON FUENER, A., DIPL.-CHEM. DR.RER.NAT. EBBINGHAUS |
|
8127 | New person/name/address of the applicant |
Owner name: HITACHI, LTD. NIPPON TELEGRAPH AND TELEPHONE CORP. |
|
D2 | Grant after examination | ||
8364 | No opposition during term of opposition |