DE3136465A1 - Vorrichtung und verfahren zum bedampfen von substraten - Google Patents

Vorrichtung und verfahren zum bedampfen von substraten

Info

Publication number
DE3136465A1
DE3136465A1 DE19813136465 DE3136465A DE3136465A1 DE 3136465 A1 DE3136465 A1 DE 3136465A1 DE 19813136465 DE19813136465 DE 19813136465 DE 3136465 A DE3136465 A DE 3136465A DE 3136465 A1 DE3136465 A1 DE 3136465A1
Authority
DE
Germany
Prior art keywords
metal
crucible
electron beam
zro2
appliance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19813136465
Other languages
German (de)
English (en)
Other versions
DE3136465C2 (fr
Inventor
Roland Dipl.-Ing. 8000 München Haft
Günther Dr.rer.nat. 8011 Kirchheim Haug
Gerhard Dipl.-Phys. 8000 München Mayer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19813136465 priority Critical patent/DE3136465A1/de
Publication of DE3136465A1 publication Critical patent/DE3136465A1/de
Application granted granted Critical
Publication of DE3136465C2 publication Critical patent/DE3136465C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE19813136465 1981-09-15 1981-09-15 Vorrichtung und verfahren zum bedampfen von substraten Granted DE3136465A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19813136465 DE3136465A1 (de) 1981-09-15 1981-09-15 Vorrichtung und verfahren zum bedampfen von substraten

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813136465 DE3136465A1 (de) 1981-09-15 1981-09-15 Vorrichtung und verfahren zum bedampfen von substraten

Publications (2)

Publication Number Publication Date
DE3136465A1 true DE3136465A1 (de) 1983-03-31
DE3136465C2 DE3136465C2 (fr) 1989-12-28

Family

ID=6141644

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813136465 Granted DE3136465A1 (de) 1981-09-15 1981-09-15 Vorrichtung und verfahren zum bedampfen von substraten

Country Status (1)

Country Link
DE (1) DE3136465A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3420246A1 (de) * 1984-05-30 1985-12-05 Leybold-Heraeus GmbH, 5000 Köln Verdampfertiegel fuer vakuum-aufdampfanlagen

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB995609A (en) * 1960-09-12 1965-06-23 Edwards High Vacuum Int Ltd Improvements in or relating to the vaporization of metals
GB1003845A (en) * 1962-05-03 1965-09-08 G V Planer Ltd Improvements in or relating to heating by means of electron beams
GB1094562A (en) * 1964-03-24 1967-12-13 Mullard Ltd Improvements in and relating to evaporation apparatus
GB1273336A (en) * 1969-03-13 1972-05-10 United Aircraft Corp Apparatus for applying a uniform coating of a metallic alloy to a substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB995609A (en) * 1960-09-12 1965-06-23 Edwards High Vacuum Int Ltd Improvements in or relating to the vaporization of metals
GB1003845A (en) * 1962-05-03 1965-09-08 G V Planer Ltd Improvements in or relating to heating by means of electron beams
GB1094562A (en) * 1964-03-24 1967-12-13 Mullard Ltd Improvements in and relating to evaporation apparatus
GB1273336A (en) * 1969-03-13 1972-05-10 United Aircraft Corp Apparatus for applying a uniform coating of a metallic alloy to a substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3420246A1 (de) * 1984-05-30 1985-12-05 Leybold-Heraeus GmbH, 5000 Köln Verdampfertiegel fuer vakuum-aufdampfanlagen

Also Published As

Publication number Publication date
DE3136465C2 (fr) 1989-12-28

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee