DE3123410A1 - Akustischer oberflaechenwellen-resonator - Google Patents

Akustischer oberflaechenwellen-resonator

Info

Publication number
DE3123410A1
DE3123410A1 DE19813123410 DE3123410A DE3123410A1 DE 3123410 A1 DE3123410 A1 DE 3123410A1 DE 19813123410 DE19813123410 DE 19813123410 DE 3123410 A DE3123410 A DE 3123410A DE 3123410 A1 DE3123410 A1 DE 3123410A1
Authority
DE
Germany
Prior art keywords
transducer
reflectors
grooves
reflector
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19813123410
Other languages
German (de)
English (en)
Inventor
Hiromichi Yokosuka Kanagawa Jumonji
Takehiko Uno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP7894180A external-priority patent/JPS575418A/ja
Priority claimed from JP17524280A external-priority patent/JPS5799813A/ja
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of DE3123410A1 publication Critical patent/DE3123410A1/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02653—Grooves or arrays buried in the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE19813123410 1980-06-13 1981-06-12 Akustischer oberflaechenwellen-resonator Ceased DE3123410A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7894180A JPS575418A (en) 1980-06-13 1980-06-13 Cavity type surface elastic wave resonator
JP17524280A JPS5799813A (en) 1980-12-13 1980-12-13 Surface acoustic wave resonator

Publications (1)

Publication Number Publication Date
DE3123410A1 true DE3123410A1 (de) 1982-03-11

Family

ID=26419988

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813123410 Ceased DE3123410A1 (de) 1980-06-13 1981-06-12 Akustischer oberflaechenwellen-resonator

Country Status (5)

Country Link
US (1) US4387355A (OSRAM)
DE (1) DE3123410A1 (OSRAM)
FR (1) FR2484735A1 (OSRAM)
GB (1) GB2078042B (OSRAM)
NL (1) NL187091C (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3438051A1 (de) * 1984-10-09 1986-04-24 X-Cyte, Inc., Mountain View, Calif. Akustische reflektoren aufweisender, passiver transponder auf akustische oberflaechenwellen
DE3438050A1 (de) * 1984-10-09 1986-04-24 X-Cyte, Inc., Mountain View, Calif. Amplituden- und phasenmodifizierende verzoegerungsglieder aufweisender, passiver transponder fuer akustische oberflaechenwellen
DE3700498A1 (de) * 1986-01-10 1987-07-16 Hitachi Ltd Oberflaechen-schallwellenresonator

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0773177B2 (ja) * 1984-12-17 1995-08-02 株式会社東芝 弾性表面波共振子
GB2249681B (en) * 1990-11-08 1994-06-01 Stc Plc Surface acoustic wave device
JP2847438B2 (ja) * 1991-03-29 1999-01-20 三井金属鉱業株式会社 弾性表面波素子
US5392013A (en) * 1992-07-17 1995-02-21 Nec Corporation Surface acoustic wave filter capable of widening a bandwidth
US5374908A (en) * 1992-11-25 1994-12-20 Rf Monolithics, Inc. Surface acoustic wave device for generating an output signal with only a symmetric or only an asymmetric vibration mode acoustic wave
JPH06338756A (ja) * 1993-05-27 1994-12-06 Fujitsu Ltd 共振子型弾性表面波フィルタ
JP2560991B2 (ja) * 1993-08-20 1996-12-04 日本電気株式会社 弾性表面波フィルタ
US5568001A (en) * 1994-11-25 1996-10-22 Motorola, Inc. Saw device having acoustic elements with diverse mass loading and method for forming same
JP3439289B2 (ja) * 1995-04-10 2003-08-25 三洋電機株式会社 弾性表面波フィルター
US5719537A (en) * 1995-04-10 1998-02-17 Sanyo Electric Co., Ltd. Surface acoustic wave filter with range of a frequency difference between resonance frequencies of series and parallel resonators
JP3341704B2 (ja) * 1999-03-18 2002-11-05 株式会社村田製作所 端面反射型表面波装置の製造方法
US6426583B1 (en) * 1999-06-14 2002-07-30 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave element, method for producing the same and surface acoustic wave device using the same
DE10010089A1 (de) * 2000-03-02 2001-09-06 Epcos Ag Oberflächenwellenwandler mit optimierter Reflexion
DE102004037819B4 (de) 2004-08-04 2021-12-16 Snaptrack, Inc. Elektroakustisches Bauelement mit geringen Verlusten
US7382217B2 (en) * 2004-12-03 2008-06-03 Epson Toyocom Corporation Surface acoustic wave device
WO2006137464A1 (ja) 2005-06-21 2006-12-28 Epson Toyocom Corporation 弾性表面波デバイス、モジュール、及び発振器
EP1937414A4 (en) * 2005-09-19 2013-01-02 Univ Witwatersrand Jhb OROMUCOSAL DRUG ADMINISTRATIVE FORM
US20100007444A1 (en) * 2006-04-20 2010-01-14 Anis Nurashikin Nordin GHz Surface Acoustic Resonators in RF-CMOS
US8143681B2 (en) * 2006-04-20 2012-03-27 The George Washington University Saw devices, processes for making them, and methods of use
US20090124513A1 (en) * 2007-04-20 2009-05-14 Patricia Berg Multiplex Biosensor
US8018010B2 (en) * 2007-04-20 2011-09-13 The George Washington University Circular surface acoustic wave (SAW) devices, processes for making them, and methods of use
US7569971B2 (en) 2007-10-02 2009-08-04 Delaware Capital Formation, Inc. Compensation of resonators for substrate and transducer asymmetry
KR20110133037A (ko) * 2009-02-27 2011-12-09 세이코 엡슨 가부시키가이샤 탄성 표면파 공진자, 탄성 표면파 발진기, 및 전자 기기
JP4645923B2 (ja) 2009-02-27 2011-03-09 セイコーエプソン株式会社 弾性表面波共振子、および弾性表面波発振器
JP5678486B2 (ja) 2010-06-17 2015-03-04 セイコーエプソン株式会社 弾性表面波共振子、弾性表面波発振器および電子機器
JP2012049818A (ja) 2010-08-26 2012-03-08 Seiko Epson Corp 弾性表面波共振子、弾性表面波発振器、電子機器
JP2012049817A (ja) 2010-08-26 2012-03-08 Seiko Epson Corp 弾性表面波デバイス、および弾性表面波発振器、ならびに電子機器
JP5934464B2 (ja) 2010-08-26 2016-06-15 セイコーエプソン株式会社 弾性表面波共振子、および弾性表面波発振器、ならびに電子機器
JP2012060422A (ja) 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012060418A (ja) 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012060420A (ja) 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012060421A (ja) 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012060419A (ja) 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
US8960004B2 (en) 2010-09-29 2015-02-24 The George Washington University Synchronous one-pole surface acoustic wave resonator
JP5652606B2 (ja) 2010-12-03 2015-01-14 セイコーエプソン株式会社 弾性表面波共振子、弾性表面波発振器、及び電子機器
JP5648908B2 (ja) 2010-12-07 2015-01-07 セイコーエプソン株式会社 振動デバイス、並びに発振器、および電子機器
AT13196U1 (de) * 2012-07-11 2013-08-15 Ctr Carinthian Tech Res Ag Sensoranordnung
CN116465481B (zh) * 2023-04-17 2025-11-28 浙江星曜半导体有限公司 谐振器的体声波谐振频率的提取方法及装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2604105A1 (de) * 1975-02-03 1976-08-05 Texas Instruments Inc Oberflaechenwellenbauelement
US4144507A (en) * 1976-09-29 1979-03-13 Texas Instruments Incorporated Surface acoustic wave resonator incorporating coupling transducer into reflecting arrays

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1554366A (en) * 1977-02-04 1979-10-17 Philips Electronic Associated Acoustic surface wave devices
US4237433A (en) * 1979-03-13 1980-12-02 Sperry Corporation Surface acoustic wave resonators with integrated internal coupler reflectors

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2604105A1 (de) * 1975-02-03 1976-08-05 Texas Instruments Inc Oberflaechenwellenbauelement
US4144507A (en) * 1976-09-29 1979-03-13 Texas Instruments Incorporated Surface acoustic wave resonator incorporating coupling transducer into reflecting arrays

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3438051A1 (de) * 1984-10-09 1986-04-24 X-Cyte, Inc., Mountain View, Calif. Akustische reflektoren aufweisender, passiver transponder auf akustische oberflaechenwellen
DE3438050A1 (de) * 1984-10-09 1986-04-24 X-Cyte, Inc., Mountain View, Calif. Amplituden- und phasenmodifizierende verzoegerungsglieder aufweisender, passiver transponder fuer akustische oberflaechenwellen
DE3700498A1 (de) * 1986-01-10 1987-07-16 Hitachi Ltd Oberflaechen-schallwellenresonator

Also Published As

Publication number Publication date
US4387355A (en) 1983-06-07
FR2484735A1 (fr) 1981-12-18
GB2078042A (en) 1981-12-23
GB2078042B (en) 1984-08-08
NL8102818A (nl) 1982-01-04
NL187091C (nl) 1991-05-16
FR2484735B1 (OSRAM) 1985-03-22
NL187091B (nl) 1990-12-17

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8128 New person/name/address of the agent

Representative=s name: SCHWABE, H., DIPL.-ING. SANDMAIR, K., DIPL.-CHEM.

8127 New person/name/address of the applicant

Owner name: NIPPON TELEGRAPH AND TELEPHONE CORP., TOKIO/TOKYO,

8128 New person/name/address of the agent

Representative=s name: SCHWABE, H., DIPL.-ING. SANDMAIR, K., DIPL.-CHEM.

8131 Rejection