JPS575418A - Cavity type surface elastic wave resonator - Google Patents

Cavity type surface elastic wave resonator

Info

Publication number
JPS575418A
JPS575418A JP7894180A JP7894180A JPS575418A JP S575418 A JPS575418 A JP S575418A JP 7894180 A JP7894180 A JP 7894180A JP 7894180 A JP7894180 A JP 7894180A JP S575418 A JPS575418 A JP S575418A
Authority
JP
Japan
Prior art keywords
transducer
elastic wave
wave resonator
reflectors
surface elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7894180A
Other languages
Japanese (ja)
Other versions
JPH027207B2 (en
Inventor
Takehiko Uno
Hiromichi Jumonji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP7894180A priority Critical patent/JPS575418A/en
Priority to GB8116284A priority patent/GB2078042B/en
Priority to US06/267,680 priority patent/US4387355A/en
Priority to FR8111388A priority patent/FR2484735A1/en
Priority to NLAANVRAGE8102818,A priority patent/NL187091C/en
Priority to DE19813123410 priority patent/DE3123410A1/en
Publication of JPS575418A publication Critical patent/JPS575418A/en
Publication of JPH027207B2 publication Critical patent/JPH027207B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To accomplish a surface elastic wave resonator having high Q with small size, by utilizing the frequency characteristics of a radiant conductance of a transducer also. CONSTITUTION:The metallic-groove construction consisting of electrodes with hm deep plus grooves with hg deep provided by the method such as reactive sputter etching is used for reflectors 2, 3 and a transducer 4. But, it is also possible to omit the grooves by making the electrodes sufficiently thicker. The pitch of electrode LT of the transducer 4 is slightly smaller than the pitch of electrodes LR of the reflectors 2, 3. Further, the interval lr1+lr2=l of the reflectors and the transducer is set within the range of (0.5n+0.4)LT<=l<=(0.5n+0.7)LT, where (n) is an integer.
JP7894180A 1980-06-13 1980-06-13 Cavity type surface elastic wave resonator Granted JPS575418A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP7894180A JPS575418A (en) 1980-06-13 1980-06-13 Cavity type surface elastic wave resonator
GB8116284A GB2078042B (en) 1980-06-13 1981-05-28 Surface acoustic wave resonator
US06/267,680 US4387355A (en) 1980-06-13 1981-05-28 Surface acoustic wave resonator
FR8111388A FR2484735A1 (en) 1980-06-13 1981-06-10 SURFACE ACOUSTIC WAVE RESONATOR
NLAANVRAGE8102818,A NL187091C (en) 1980-06-13 1981-06-11 ACOUSTIC SURFACE WAVE RESONATOR.
DE19813123410 DE3123410A1 (en) 1980-06-13 1981-06-12 ACOUSTIC SURFACE WAVE RESONATOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7894180A JPS575418A (en) 1980-06-13 1980-06-13 Cavity type surface elastic wave resonator

Publications (2)

Publication Number Publication Date
JPS575418A true JPS575418A (en) 1982-01-12
JPH027207B2 JPH027207B2 (en) 1990-02-16

Family

ID=13675902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7894180A Granted JPS575418A (en) 1980-06-13 1980-06-13 Cavity type surface elastic wave resonator

Country Status (1)

Country Link
JP (1) JPS575418A (en)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6273622U (en) * 1985-10-28 1987-05-12
WO1996010293A1 (en) * 1994-09-29 1996-04-04 Seiko Epson Corporation Saw device
WO1999046856A1 (en) * 1998-03-11 1999-09-16 Fujitsu Limited Surface acoustic wave filter
EP2224591A2 (en) 2009-02-27 2010-09-01 Epson Toyocom Corporation Surface acoustic wave resonator and surface acoustic wave oscillator
WO2010098139A1 (en) 2009-02-27 2010-09-02 エプソントヨコム株式会社 Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
JP2012004897A (en) * 2010-06-17 2012-01-05 Seiko Epson Corp Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
JP2012060418A (en) * 2010-09-09 2012-03-22 Seiko Epson Corp Surface acoustic wave device, electronic apparatus and sensor device
JP2012060422A (en) * 2010-09-09 2012-03-22 Seiko Epson Corp Surface acoustic wave device, electronic apparatus and sensor device
JP2012124677A (en) * 2010-12-07 2012-06-28 Seiko Epson Corp Vibrating device, oscillator and electronic apparatus
WO2012137027A1 (en) 2011-04-07 2012-10-11 Gvr Trade Sa Surface acoustic wave resonator
US8471434B2 (en) 2010-08-26 2013-06-25 Seiko Epson Corporation Surface acoustic wave device, surface acoustic wave oscillator, and electronic apparatus
US8598766B2 (en) 2010-12-03 2013-12-03 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8692439B2 (en) 2010-08-26 2014-04-08 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
US8723394B2 (en) 2010-09-09 2014-05-13 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US8723396B2 (en) 2010-09-09 2014-05-13 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US8928432B2 (en) 2010-08-26 2015-01-06 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
JP2015029358A (en) * 2014-10-29 2015-02-12 セイコーエプソン株式会社 Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
US9048806B2 (en) 2010-09-09 2015-06-02 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus

Cited By (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6273622U (en) * 1985-10-28 1987-05-12
WO1996010293A1 (en) * 1994-09-29 1996-04-04 Seiko Epson Corporation Saw device
US5895996A (en) * 1994-09-29 1999-04-20 Seiko Epson Corporation Saw device
WO1999046856A1 (en) * 1998-03-11 1999-09-16 Fujitsu Limited Surface acoustic wave filter
US6577210B1 (en) 1998-03-11 2003-06-10 Fujitsu Limited Surface acoustic wave filter having plural propagation paths and a coupler
WO2010098139A1 (en) 2009-02-27 2010-09-02 エプソントヨコム株式会社 Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
US8502625B2 (en) 2009-02-27 2013-08-06 Seiko Epson Corporation Surface acoustic wave resonator and surface acoustic wave oscillator
US20100244626A1 (en) * 2009-02-27 2010-09-30 Epson Toyocom Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
EP2224591A2 (en) 2009-02-27 2010-09-01 Epson Toyocom Corporation Surface acoustic wave resonator and surface acoustic wave oscillator
US9762207B2 (en) 2009-02-27 2017-09-12 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
US8952596B2 (en) 2009-02-27 2015-02-10 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
US8933612B2 (en) 2009-02-27 2015-01-13 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
JP2014112949A (en) * 2009-02-27 2014-06-19 Seiko Epson Corp Surface acoustic wave resonator and surface acoustic wave oscillator
US8305162B2 (en) 2009-02-27 2012-11-06 Seiko Epson Corporation Surface acoustic wave resonator and surface acoustic wave oscillator
JP2012004897A (en) * 2010-06-17 2012-01-05 Seiko Epson Corp Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
US9537464B2 (en) 2010-06-17 2017-01-03 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US9088263B2 (en) 2010-06-17 2015-07-21 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8928432B2 (en) 2010-08-26 2015-01-06 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8471434B2 (en) 2010-08-26 2013-06-25 Seiko Epson Corporation Surface acoustic wave device, surface acoustic wave oscillator, and electronic apparatus
US8692439B2 (en) 2010-08-26 2014-04-08 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
JP2012060422A (en) * 2010-09-09 2012-03-22 Seiko Epson Corp Surface acoustic wave device, electronic apparatus and sensor device
US8723395B2 (en) 2010-09-09 2014-05-13 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US8723396B2 (en) 2010-09-09 2014-05-13 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US8723393B2 (en) 2010-09-09 2014-05-13 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US9048806B2 (en) 2010-09-09 2015-06-02 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US8723394B2 (en) 2010-09-09 2014-05-13 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
JP2012060418A (en) * 2010-09-09 2012-03-22 Seiko Epson Corp Surface acoustic wave device, electronic apparatus and sensor device
US8791621B2 (en) 2010-12-03 2014-07-29 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8598766B2 (en) 2010-12-03 2013-12-03 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
JP2012124677A (en) * 2010-12-07 2012-06-28 Seiko Epson Corp Vibrating device, oscillator and electronic apparatus
US8476984B2 (en) 2010-12-07 2013-07-02 Seiko Epson Corporation Vibration device, oscillator, and electronic apparatus
WO2012137027A1 (en) 2011-04-07 2012-10-11 Gvr Trade Sa Surface acoustic wave resonator
JP2015029358A (en) * 2014-10-29 2015-02-12 セイコーエプソン株式会社 Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device

Also Published As

Publication number Publication date
JPH027207B2 (en) 1990-02-16

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