DE2917165A1 - Verfahren zum herstellen einer halbleiteranordnung durch verbinden eines siliziumsubstrats und einer elektrode o.dgl. miteinander mittels aluminiums - Google Patents
Verfahren zum herstellen einer halbleiteranordnung durch verbinden eines siliziumsubstrats und einer elektrode o.dgl. miteinander mittels aluminiumsInfo
- Publication number
- DE2917165A1 DE2917165A1 DE19792917165 DE2917165A DE2917165A1 DE 2917165 A1 DE2917165 A1 DE 2917165A1 DE 19792917165 DE19792917165 DE 19792917165 DE 2917165 A DE2917165 A DE 2917165A DE 2917165 A1 DE2917165 A1 DE 2917165A1
- Authority
- DE
- Germany
- Prior art keywords
- silicon substrate
- connection surface
- aluminum
- electrode
- aluminum solder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052710 silicon Inorganic materials 0.000 title claims description 93
- 239000010703 silicon Substances 0.000 title claims description 93
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 91
- 239000000758 substrate Substances 0.000 title claims description 82
- 229910052782 aluminium Inorganic materials 0.000 title claims description 46
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 46
- 239000004065 semiconductor Substances 0.000 title claims description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 229910000679 solder Inorganic materials 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 21
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 18
- 239000011574 phosphorus Substances 0.000 claims description 17
- 229910052698 phosphorus Inorganic materials 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 description 9
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000005304 joining Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000001000 micrograph Methods 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 238000005275 alloying Methods 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229910000830 fernico Inorganic materials 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0104—Zirconium [Zr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01042—Molybdenum [Mo]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01051—Antimony [Sb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01072—Hafnium [Hf]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1203—Rectifying Diode
- H01L2924/12036—PN diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1301—Thyristor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/018—Compensation doping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/02—Contacts, special
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Die Bonding (AREA)
- Thyristors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53049971A JPS5946415B2 (ja) | 1978-04-28 | 1978-04-28 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2917165A1 true DE2917165A1 (de) | 1979-11-22 |
| DE2917165C2 DE2917165C2 (de) | 1987-01-15 |
Family
ID=12845895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2917165A Expired DE2917165C2 (de) | 1978-04-28 | 1979-04-27 | Verfahren zum Verbinden eines Siliziumsubstrats mittels Aluminiumlots mit wenigstens einer Elektrode |
Country Status (6)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4856702A (en) * | 1987-04-03 | 1989-08-15 | Bbc Brown Boveri Ag | Method for manufacturing semiconductor components |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3132983A1 (de) * | 1981-08-20 | 1983-03-03 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum verbinden eines halbleiterchips mit einem chiptraeger |
| DE4223887A1 (de) * | 1992-07-21 | 1994-01-27 | Basf Ag | Verfahren zur Herstellung eines Polymer/Metall- oder Polymer/Halbleiter-Verbundes |
| US5660798A (en) * | 1993-04-20 | 1997-08-26 | Actimed Laboratories, Inc. | Apparatus for red blood cell separation |
| US5766552A (en) * | 1993-04-20 | 1998-06-16 | Actimed Laboratories, Inc. | Apparatus for red blood cell separation |
| US6168975B1 (en) * | 1998-06-24 | 2001-01-02 | St Assembly Test Services Pte Ltd | Method of forming extended lead package |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1719501A1 (de) * | 1968-01-16 | 1971-05-27 | Kolesowa Alwina Grigorijewna | Verfahren zum Legieren eines Halbleiter- oder Metalleinkristalles und Halbleitergeraet,das unter Verwendung dieses Verfahrens Hergestellt ist |
| FR2085821A1 (US20100268047A1-20101021-C00003.png) * | 1970-04-03 | 1971-12-31 | Rca Corp | |
| DE2142426A1 (de) * | 1970-08-24 | 1972-04-06 | Motorola Inc | Halbleiteranordnung und Verfahren zu seiner Herstellung |
| US4003126A (en) * | 1974-09-12 | 1977-01-18 | Canadian Patents And Development Limited | Method of making metal oxide semiconductor devices |
| DE2751667A1 (de) * | 1976-11-19 | 1978-05-24 | Tokyo Shibaura Electric Co | Halbleiterbauelement |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE562375A (US20100268047A1-20101021-C00003.png) * | 1957-01-02 | |||
| US3450958A (en) * | 1967-01-10 | 1969-06-17 | Sprague Electric Co | Multi-plane metal-semiconductor junction device |
| DE1803489A1 (de) * | 1968-10-17 | 1970-05-27 | Siemens Ag | Verfahren zum Herstellen eines Halbleiterbauelementes |
| US3702787A (en) * | 1970-11-02 | 1972-11-14 | Motorola Inc | Method of forming ohmic contact for semiconducting devices |
| US4137123A (en) * | 1975-12-31 | 1979-01-30 | Motorola, Inc. | Texture etching of silicon: method |
| US4147564A (en) * | 1977-11-18 | 1979-04-03 | Sri International | Method of controlled surface texturization of crystalline semiconductor material |
-
1978
- 1978-04-28 JP JP53049971A patent/JPS5946415B2/ja not_active Expired
-
1979
- 1979-04-18 GB GB7913414A patent/GB2022316B/en not_active Expired
- 1979-04-19 CA CA325,856A patent/CA1127322A/en not_active Expired
- 1979-04-20 US US06/032,018 patent/US4246693A/en not_active Expired - Lifetime
- 1979-04-26 NL NL7903319A patent/NL186207B/xx not_active IP Right Cessation
- 1979-04-27 DE DE2917165A patent/DE2917165C2/de not_active Expired
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1719501A1 (de) * | 1968-01-16 | 1971-05-27 | Kolesowa Alwina Grigorijewna | Verfahren zum Legieren eines Halbleiter- oder Metalleinkristalles und Halbleitergeraet,das unter Verwendung dieses Verfahrens Hergestellt ist |
| FR2085821A1 (US20100268047A1-20101021-C00003.png) * | 1970-04-03 | 1971-12-31 | Rca Corp | |
| DE2142426A1 (de) * | 1970-08-24 | 1972-04-06 | Motorola Inc | Halbleiteranordnung und Verfahren zu seiner Herstellung |
| US4003126A (en) * | 1974-09-12 | 1977-01-18 | Canadian Patents And Development Limited | Method of making metal oxide semiconductor devices |
| DE2751667A1 (de) * | 1976-11-19 | 1978-05-24 | Tokyo Shibaura Electric Co | Halbleiterbauelement |
Non-Patent Citations (1)
| Title |
|---|
| Journal of Materials Science, Bd. 6, 1971, S. 189 - 199 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4856702A (en) * | 1987-04-03 | 1989-08-15 | Bbc Brown Boveri Ag | Method for manufacturing semiconductor components |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2022316A (en) | 1979-12-12 |
| JPS54142976A (en) | 1979-11-07 |
| NL186207B (nl) | 1990-05-01 |
| NL7903319A (nl) | 1979-10-30 |
| US4246693A (en) | 1981-01-27 |
| GB2022316B (en) | 1982-07-21 |
| JPS5946415B2 (ja) | 1984-11-12 |
| CA1127322A (en) | 1982-07-06 |
| DE2917165C2 (de) | 1987-01-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69324074T2 (de) | Verfahren zur Bildung von Kurzschlussgebieten für Halbleiterbauelemente mit isoliertem Gatter | |
| DE69706590T2 (de) | Anzeigevorrichtung mit Kaltkathoden | |
| DE3438477A1 (de) | Solarzelle und verfahren zu ihrer herstellung | |
| DE977615C (de) | Verfahren zur Herstellung eines fuer Signaluebertragungsvorrichtungen bestimmten Halbleiterelements | |
| DE3135933A1 (de) | Solarzelle und verfahren zu ihrer herstellung | |
| DE102008062591A1 (de) | Halbleiter-Bauelement | |
| DE3324017A1 (de) | Isolierschicht-feldeffekt-transistor | |
| DE102015101124A1 (de) | Halbleitervorrichtung mit unduliertem Profil der Nettodotierung einer Driftzone | |
| DE1127488B (de) | Halbleiteranordnung aus Silizium oder Germanium und Verfahren zu ihrer Herstellung | |
| DE2906721C2 (de) | GTO-Thyristor | |
| DE976348C (de) | Verfahren zur Herstellung von Halbleiterbauelementen mit pn-UEbergaengen und nach diesem Verfahren hergestellte Bauelemente | |
| DE112013001796B4 (de) | Vertikale Hochspannungshalbleitervorrichtung und Herstellungsverfahren einer vertikalen Hochspannungshalbleitervorrichtung | |
| EP0557318B1 (de) | Verfahren zur herstellung von halbleiterelementen, insbesondere von dioden | |
| DE2550346A1 (de) | Verfahren zum herstellen eines elektrisch isolierenden bereiches in dem halbleiterkoerper eines halbleiterbauelements | |
| DE1041161B (de) | Flaechentransistoranordnung | |
| DE3024939A1 (de) | Halbleiterbauelement hoher durchbruchsspannung | |
| DE112013007745B3 (de) | Verfahren zur Herstellung einer Halbleitervorrichtung und Halbleitervorrichtung | |
| DE2448478A1 (de) | Verfahren zum herstellen von pn-halbleiteruebergaengen | |
| DE2917165A1 (de) | Verfahren zum herstellen einer halbleiteranordnung durch verbinden eines siliziumsubstrats und einer elektrode o.dgl. miteinander mittels aluminiums | |
| DE69528502T2 (de) | Statischer Induktionthyristor und Verfahren zur Herstellung | |
| DE3413885A1 (de) | Halbleitervorrichtung | |
| DE102011115581A1 (de) | Solarzelle und Verfahren zur Herstellung derselben | |
| DE112009005480T5 (de) | Solarbatteriemodul | |
| DE2125468A1 (de) | Halbleitervorrichtung | |
| DE2627355B2 (de) | Lichtemittierende Festkörpervorrichtung und Verfahren zu deren Herstellung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OAP | Request for examination filed | ||
| OD | Request for examination | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |