DE2856708A1 - Messanordnung fuer einen druck-messumformer - Google Patents

Messanordnung fuer einen druck-messumformer

Info

Publication number
DE2856708A1
DE2856708A1 DE19782856708 DE2856708A DE2856708A1 DE 2856708 A1 DE2856708 A1 DE 2856708A1 DE 19782856708 DE19782856708 DE 19782856708 DE 2856708 A DE2856708 A DE 2856708A DE 2856708 A1 DE2856708 A1 DE 2856708A1
Authority
DE
Germany
Prior art keywords
resistance
tracks
membrane
paths
end sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19782856708
Other languages
German (de)
English (en)
Inventor
Reiner Dipl Phys Krause
Manfred Dr Poppinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Priority to DE19782856708 priority Critical patent/DE2856708A1/de
Priority to JP15869579A priority patent/JPS5591882A/ja
Publication of DE2856708A1 publication Critical patent/DE2856708A1/de
Priority to JP15563385U priority patent/JPS61136558U/ja
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE19782856708 1978-12-29 1978-12-29 Messanordnung fuer einen druck-messumformer Ceased DE2856708A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE19782856708 DE2856708A1 (de) 1978-12-29 1978-12-29 Messanordnung fuer einen druck-messumformer
JP15869579A JPS5591882A (en) 1978-12-29 1979-12-06 Diaphragm with strain gauge
JP15563385U JPS61136558U (enExample) 1978-12-29 1985-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782856708 DE2856708A1 (de) 1978-12-29 1978-12-29 Messanordnung fuer einen druck-messumformer

Publications (1)

Publication Number Publication Date
DE2856708A1 true DE2856708A1 (de) 1980-07-10

Family

ID=6058689

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19782856708 Ceased DE2856708A1 (de) 1978-12-29 1978-12-29 Messanordnung fuer einen druck-messumformer

Country Status (2)

Country Link
JP (2) JPS5591882A (enExample)
DE (1) DE2856708A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3445774A1 (de) * 1983-12-27 1985-07-04 Fuji Electric Co., Ltd., Kawasaki, Kanagawa Verfahren zur herstellung eines kapazitiven halbleiterdruckaufnehmers
DE3543261A1 (de) * 1985-12-06 1987-06-11 Siemens Ag Drucksensor
EP0146709A3 (en) * 1983-12-16 1988-09-07 Hitachi, Ltd. Pressure sensor
EP1808406A3 (en) * 2006-01-17 2009-06-10 Honeywell International Inc. Isolation Scheme for Reducing Film Stress in a MEMS Device
CN105318830A (zh) * 2015-12-04 2016-02-10 浙江工业大学 可测量双侧偏置敏感栅中心横向偏导的横向偏差六敏感栅全桥混合叉指金属应变片

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1155286A (en) * 1966-10-25 1969-06-18 Ether Eng Ltd Improvements in or relating to Transducer Devices.
GB1184109A (en) * 1966-06-07 1970-03-11 Toyoda Machine Works Ltd Pressure Sensitive Device Incorporating Semi-Conductor Transducer
DE1573613B1 (de) * 1964-09-29 1972-02-03 Toyoda Chuo Kenkyusho Kk Druckmesser

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109488A (en) * 1977-03-05 1978-09-25 Toyoda Chuo Kenkyusho Kk Mechanicalltooelectric converter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1573613B1 (de) * 1964-09-29 1972-02-03 Toyoda Chuo Kenkyusho Kk Druckmesser
GB1184109A (en) * 1966-06-07 1970-03-11 Toyoda Machine Works Ltd Pressure Sensitive Device Incorporating Semi-Conductor Transducer
GB1155286A (en) * 1966-10-25 1969-06-18 Ether Eng Ltd Improvements in or relating to Transducer Devices.

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Philips techn. Rundschau 33, 15-22, 1973/74, Nr. 1 rtp H. 6, 1977, S. 162-165 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0146709A3 (en) * 1983-12-16 1988-09-07 Hitachi, Ltd. Pressure sensor
DE3445774A1 (de) * 1983-12-27 1985-07-04 Fuji Electric Co., Ltd., Kawasaki, Kanagawa Verfahren zur herstellung eines kapazitiven halbleiterdruckaufnehmers
DE3543261A1 (de) * 1985-12-06 1987-06-11 Siemens Ag Drucksensor
EP1808406A3 (en) * 2006-01-17 2009-06-10 Honeywell International Inc. Isolation Scheme for Reducing Film Stress in a MEMS Device
CN105318830A (zh) * 2015-12-04 2016-02-10 浙江工业大学 可测量双侧偏置敏感栅中心横向偏导的横向偏差六敏感栅全桥混合叉指金属应变片
CN105318830B (zh) * 2015-12-04 2018-03-02 浙江工业大学 横向偏差六敏感栅全桥混合叉指金属应变片

Also Published As

Publication number Publication date
JPS61136558U (enExample) 1986-08-25
JPS5591882A (en) 1980-07-11

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection