JPS61136558U - - Google Patents

Info

Publication number
JPS61136558U
JPS61136558U JP15563385U JP15563385U JPS61136558U JP S61136558 U JPS61136558 U JP S61136558U JP 15563385 U JP15563385 U JP 15563385U JP 15563385 U JP15563385 U JP 15563385U JP S61136558 U JPS61136558 U JP S61136558U
Authority
JP
Japan
Prior art keywords
diaphragm
resistance
strain gauge
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15563385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS61136558U publication Critical patent/JPS61136558U/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP15563385U 1978-12-29 1985-10-11 Pending JPS61136558U (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782856708 DE2856708A1 (de) 1978-12-29 1978-12-29 Messanordnung fuer einen druck-messumformer

Publications (1)

Publication Number Publication Date
JPS61136558U true JPS61136558U (enExample) 1986-08-25

Family

ID=6058689

Family Applications (2)

Application Number Title Priority Date Filing Date
JP15869579A Pending JPS5591882A (en) 1978-12-29 1979-12-06 Diaphragm with strain gauge
JP15563385U Pending JPS61136558U (enExample) 1978-12-29 1985-10-11

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP15869579A Pending JPS5591882A (en) 1978-12-29 1979-12-06 Diaphragm with strain gauge

Country Status (2)

Country Link
JP (2) JPS5591882A (enExample)
DE (1) DE2856708A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128673A (ja) * 1983-12-16 1985-07-09 Hitachi Ltd 半導体感圧装置
JPS60138434A (ja) * 1983-12-27 1985-07-23 Fuji Electric Co Ltd 半導体形静電容量式圧力センサの製造方法
DE3543261A1 (de) * 1985-12-06 1987-06-11 Siemens Ag Drucksensor
US7514285B2 (en) * 2006-01-17 2009-04-07 Honeywell International Inc. Isolation scheme for reducing film stress in a MEMS device
CN105318830B (zh) * 2015-12-04 2018-03-02 浙江工业大学 横向偏差六敏感栅全桥混合叉指金属应变片

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109488A (en) * 1977-03-05 1978-09-25 Toyoda Chuo Kenkyusho Kk Mechanicalltooelectric converter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3402609A (en) * 1964-09-29 1968-09-24 Tokota Chuo Kenkyusho Kk Semiconductor mechanical-to-electrical transducer
GB1184109A (en) * 1966-06-07 1970-03-11 Toyoda Machine Works Ltd Pressure Sensitive Device Incorporating Semi-Conductor Transducer
GB1155286A (en) * 1966-10-25 1969-06-18 Ether Eng Ltd Improvements in or relating to Transducer Devices.

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109488A (en) * 1977-03-05 1978-09-25 Toyoda Chuo Kenkyusho Kk Mechanicalltooelectric converter

Also Published As

Publication number Publication date
DE2856708A1 (de) 1980-07-10
JPS5591882A (en) 1980-07-11

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