JPS6337512B2 - - Google Patents

Info

Publication number
JPS6337512B2
JPS6337512B2 JP57130793A JP13079382A JPS6337512B2 JP S6337512 B2 JPS6337512 B2 JP S6337512B2 JP 57130793 A JP57130793 A JP 57130793A JP 13079382 A JP13079382 A JP 13079382A JP S6337512 B2 JPS6337512 B2 JP S6337512B2
Authority
JP
Japan
Prior art keywords
diaphragm
rigid body
central rigid
groove
piezoresistive element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57130793A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5921074A (ja
Inventor
Kenkichi Takadera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP57130793A priority Critical patent/JPS5921074A/ja
Publication of JPS5921074A publication Critical patent/JPS5921074A/ja
Publication of JPS6337512B2 publication Critical patent/JPS6337512B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP57130793A 1982-07-27 1982-07-27 半導体ダイヤフラム Granted JPS5921074A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57130793A JPS5921074A (ja) 1982-07-27 1982-07-27 半導体ダイヤフラム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57130793A JPS5921074A (ja) 1982-07-27 1982-07-27 半導体ダイヤフラム

Publications (2)

Publication Number Publication Date
JPS5921074A JPS5921074A (ja) 1984-02-02
JPS6337512B2 true JPS6337512B2 (enExample) 1988-07-26

Family

ID=15042819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57130793A Granted JPS5921074A (ja) 1982-07-27 1982-07-27 半導体ダイヤフラム

Country Status (1)

Country Link
JP (1) JPS5921074A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021029397A1 (ja) 2019-08-15 2021-02-18 東レ株式会社 電池用セパレータ及びその製造方法
WO2021181815A1 (ja) 2020-03-11 2021-09-16 東レ株式会社 電池用セパレータ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021029397A1 (ja) 2019-08-15 2021-02-18 東レ株式会社 電池用セパレータ及びその製造方法
WO2021181815A1 (ja) 2020-03-11 2021-09-16 東レ株式会社 電池用セパレータ

Also Published As

Publication number Publication date
JPS5921074A (ja) 1984-02-02

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