JPS5591882A - Diaphragm with strain gauge - Google Patents

Diaphragm with strain gauge

Info

Publication number
JPS5591882A
JPS5591882A JP15869579A JP15869579A JPS5591882A JP S5591882 A JPS5591882 A JP S5591882A JP 15869579 A JP15869579 A JP 15869579A JP 15869579 A JP15869579 A JP 15869579A JP S5591882 A JPS5591882 A JP S5591882A
Authority
JP
Japan
Prior art keywords
diaphragm
strain gauge
gauge
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15869579A
Other languages
English (en)
Japanese (ja)
Inventor
Potsupingaa Manfureeto
Kurauze Rainaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of JPS5591882A publication Critical patent/JPS5591882A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP15869579A 1978-12-29 1979-12-06 Diaphragm with strain gauge Pending JPS5591882A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782856708 DE2856708A1 (de) 1978-12-29 1978-12-29 Messanordnung fuer einen druck-messumformer

Publications (1)

Publication Number Publication Date
JPS5591882A true JPS5591882A (en) 1980-07-11

Family

ID=6058689

Family Applications (2)

Application Number Title Priority Date Filing Date
JP15869579A Pending JPS5591882A (en) 1978-12-29 1979-12-06 Diaphragm with strain gauge
JP15563385U Pending JPS61136558U (enExample) 1978-12-29 1985-10-11

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP15563385U Pending JPS61136558U (enExample) 1978-12-29 1985-10-11

Country Status (2)

Country Link
JP (2) JPS5591882A (enExample)
DE (1) DE2856708A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128673A (ja) * 1983-12-16 1985-07-09 Hitachi Ltd 半導体感圧装置
JPS60138434A (ja) * 1983-12-27 1985-07-23 Fuji Electric Co Ltd 半導体形静電容量式圧力センサの製造方法
DE3543261A1 (de) * 1985-12-06 1987-06-11 Siemens Ag Drucksensor
US7514285B2 (en) * 2006-01-17 2009-04-07 Honeywell International Inc. Isolation scheme for reducing film stress in a MEMS device
CN105318830B (zh) * 2015-12-04 2018-03-02 浙江工业大学 横向偏差六敏感栅全桥混合叉指金属应变片

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3402609A (en) * 1964-09-29 1968-09-24 Tokota Chuo Kenkyusho Kk Semiconductor mechanical-to-electrical transducer
GB1184109A (en) * 1966-06-07 1970-03-11 Toyoda Machine Works Ltd Pressure Sensitive Device Incorporating Semi-Conductor Transducer
GB1155286A (en) * 1966-10-25 1969-06-18 Ether Eng Ltd Improvements in or relating to Transducer Devices.
JPS53109488A (en) * 1977-03-05 1978-09-25 Toyoda Chuo Kenkyusho Kk Mechanicalltooelectric converter

Also Published As

Publication number Publication date
JPS61136558U (enExample) 1986-08-25
DE2856708A1 (de) 1980-07-10

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