DE2803999C3 - - Google Patents
Info
- Publication number
- DE2803999C3 DE2803999C3 DE2803999A DE2803999A DE2803999C3 DE 2803999 C3 DE2803999 C3 DE 2803999C3 DE 2803999 A DE2803999 A DE 2803999A DE 2803999 A DE2803999 A DE 2803999A DE 2803999 C3 DE2803999 C3 DE 2803999C3
- Authority
- DE
- Germany
- Prior art keywords
- film
- films
- zinc oxide
- crystalline
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 40
- 239000011787 zinc oxide Substances 0.000 claims description 20
- 229910052797 bismuth Inorganic materials 0.000 claims description 13
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- 239000010408 film Substances 0.000 description 45
- 239000007858 starting material Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 11
- 238000004544 sputter deposition Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 238000000889 atomisation Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003415 peat Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1105977A JPS5396494A (en) | 1977-02-02 | 1977-02-02 | Piezooelectric crystal film of zinc oxide |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2803999A1 DE2803999A1 (de) | 1978-08-03 |
| DE2803999B2 DE2803999B2 (de) | 1980-04-10 |
| DE2803999C3 true DE2803999C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-12-04 |
Family
ID=11767432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2803999A Granted DE2803999B2 (de) | 1977-02-02 | 1978-01-31 | Piezoelektrischer kristalliner Film |
Country Status (7)
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4182793A (en) * | 1977-06-09 | 1980-01-08 | Murata Manufacturing Co., Ltd. | Piezoelectric crystalline film of zinc oxide |
| JPS5831743B2 (ja) * | 1977-09-17 | 1983-07-08 | 株式会社村田製作所 | 酸化亜鉛の圧電結晶膜 |
| JPS54114484A (en) * | 1978-02-27 | 1979-09-06 | Toko Inc | Production of piezoelectric thin layer |
| US5393444A (en) * | 1992-09-08 | 1995-02-28 | Ngk Insulators, Ltd. | Piezoelectric semiconductor |
| JPH08105871A (ja) * | 1994-10-04 | 1996-04-23 | Ngk Insulators Ltd | 音響電気効果型超音波送受信装置及び超音波送受信方法 |
| CN100595319C (zh) * | 2008-01-07 | 2010-03-24 | 桂林电子科技大学 | ZnO:Bi光电薄膜及其制备方法 |
| US9816318B2 (en) | 2015-12-11 | 2017-11-14 | David A. Johnson | Powered ladder for large industrial vehicles |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3470100A (en) * | 1966-01-25 | 1969-09-30 | Bell Telephone Labor Inc | Growth of piezoelectric bismuth oxide |
| US3766041A (en) * | 1970-09-29 | 1973-10-16 | Matsushita Electric Industrial Co Ltd | Method of producing piezoelectric thin films by cathodic sputtering |
| US3846649A (en) * | 1973-06-18 | 1974-11-05 | Rca Corp | Piezoelectric transducer comprising oriented zinc oxide film and method of manufacture |
| US3988232A (en) * | 1974-06-25 | 1976-10-26 | Matsushita Electric Industrial Co., Ltd. | Method of making crystal films |
-
1977
- 1977-02-02 JP JP1105977A patent/JPS5396494A/ja active Granted
-
1978
- 1978-01-31 DE DE2803999A patent/DE2803999B2/de active Granted
- 1978-02-01 GB GB4101/78A patent/GB1552755A/en not_active Expired
- 1978-02-02 US US05/874,391 patent/US4139678A/en not_active Expired - Lifetime
- 1978-02-02 CH CH116078A patent/CH625911A5/de not_active IP Right Cessation
- 1978-02-02 FR FR7802956A patent/FR2379495A1/fr active Granted
- 1978-02-02 NL NLAANVRAGE7801205,A patent/NL183688C/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE2803999B2 (de) | 1980-04-10 |
| GB1552755A (en) | 1979-09-19 |
| NL183688B (nl) | 1988-07-18 |
| JPS5396494A (en) | 1978-08-23 |
| DE2803999A1 (de) | 1978-08-03 |
| FR2379495A1 (fr) | 1978-09-01 |
| FR2379495B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1983-03-25 |
| JPS572194B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-01-14 |
| NL183688C (nl) | 1988-12-16 |
| US4139678A (en) | 1979-02-13 |
| CH625911A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-10-15 |
| NL7801205A (nl) | 1978-08-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE60029706T2 (de) | Transparentes leitendes laminat, sein herstellungsverfahren, und anzeigevorrichtung mit transparentem leitendem laminat | |
| DE2252343C3 (de) | Verfahren zur Herstellung von künstlichen Diamanten | |
| EP0016404A1 (de) | Magnetischer Aufzeichnungsträger und Verfahren zu seiner Herstellung | |
| DE2528103B2 (de) | Verfahren zur Herstellung einer Kristallschicht | |
| DE69412435T2 (de) | Ferroelektrische Dünnschicht sowie Verfahren zur dessen Herstellung | |
| DE2802901C3 (de) | Piezoelektrischer kristalliner Film | |
| DE2929269C2 (de) | Verfahren zur Herstellung eines Zinkoxid-Dünnfilms | |
| DE2803999C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE2839715C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE2832714C3 (de) | Piezoelektrische kristalline Filme aus Zinkoxyd | |
| DE69122046T2 (de) | Beschichtung mit niedriger Emittierung | |
| DE2839810C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE2839550C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE2925898A1 (de) | Duennfilmdielektrikum | |
| EP0879791A1 (de) | Verfahren zur Herstellung eines Mischkristallpulvers mit geringem elektrischem Widerstand | |
| DE2804000C3 (de) | Piezoelektrischer kristalliner Film | |
| DE2811044C3 (de) | Piezoelektrische kristalline Filme | |
| DE2825083C2 (de) | Piezoelektrischer kristalliner Film | |
| DE2839577C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE112022000090T5 (de) | Material mit nanogranularer struktur und verfahren zur herstellung hiervon | |
| DE2032639C3 (de) | Verfahren zum Niederschlagen einer dünnen Goldschicht auf einem Träger durch Kathodenzerstäubung | |
| DE69125915T2 (de) | Verfahren zum Herstellen einer Dünnschicht aus einem Oxid-Supraleiter vom Wismuth-Typ | |
| DE2134571A1 (de) | Elektret | |
| DE69210090T2 (de) | Material für Dauermagnet | |
| DE2328603A1 (de) | Verfahren zur herstellung eines photoleitenden elements |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| C3 | Grant after two publication steps (3rd publication) |