DE2757772A1 - Vorrichtung zum zonenschmelzen von polykristallinen halbleiterstaeben - Google Patents
Vorrichtung zum zonenschmelzen von polykristallinen halbleiterstaebenInfo
- Publication number
- DE2757772A1 DE2757772A1 DE19772757772 DE2757772A DE2757772A1 DE 2757772 A1 DE2757772 A1 DE 2757772A1 DE 19772757772 DE19772757772 DE 19772757772 DE 2757772 A DE2757772 A DE 2757772A DE 2757772 A1 DE2757772 A1 DE 2757772A1
- Authority
- DE
- Germany
- Prior art keywords
- bellows
- rod
- induction heating
- seed crystal
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/285—Crystal holders, e.g. chucks
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/32—Mechanisms for moving either the charge or the heater
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S403/00—Joints and connections
- Y10S403/01—Magnetic
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/754,155 US4045181A (en) | 1976-12-27 | 1976-12-27 | Apparatus for zone refining |
US05/806,139 US4201746A (en) | 1976-12-27 | 1977-06-13 | Apparatus for zone refining |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2757772A1 true DE2757772A1 (de) | 1978-06-29 |
Family
ID=27115881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19772757772 Withdrawn DE2757772A1 (de) | 1976-12-27 | 1977-12-23 | Vorrichtung zum zonenschmelzen von polykristallinen halbleiterstaeben |
Country Status (7)
Country | Link |
---|---|
US (1) | US4201746A ( ) |
BE (1) | BE862259A ( ) |
CA (1) | CA1101316A ( ) |
DE (1) | DE2757772A1 ( ) |
DK (1) | DK578177A ( ) |
FR (1) | FR2374951A1 ( ) |
GB (1) | GB1575670A ( ) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3421538A1 (de) * | 1984-06-08 | 1985-12-12 | ATOMIKA Technische Physik GmbH, 8000 München | Vakuumaufdampfeinrichtung |
US4803563A (en) * | 1987-09-02 | 1989-02-07 | Westinghouse Electric Corp. | Rotor-in-stator examination magnetic carriage and positioning apparatus |
US5205997A (en) * | 1989-07-31 | 1993-04-27 | Grumman Aerospace Corporation | Ampoule for crystal growth |
JP3850500B2 (ja) * | 1996-12-06 | 2006-11-29 | コマツ電子金属株式会社 | 磁場印加単結晶引上げ装置用種結晶保持器 |
JP3785782B2 (ja) * | 1998-01-27 | 2006-06-14 | 住友電気工業株式会社 | ガラスロッド延伸用加熱炉及びガラスロッドの延伸方法 |
US6147149A (en) * | 1999-03-03 | 2000-11-14 | Glouster Co., Inc. | Adhesive caulking material which can mimic the appearance of a multicolored stone surface |
WO2019126461A1 (en) * | 2017-12-20 | 2019-06-27 | Heraeus Quartz North America Llc | Variable diameter seal for optical preform furnace |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2557140A (en) * | 1948-12-23 | 1951-06-19 | Razdowitz Adolph | Rotary joint |
SU146090A1 (ru) * | 1960-08-29 | 1961-11-30 | М.Г. Лозинский | Устройство дл безокислительного напылени реплик |
US3151695A (en) * | 1962-05-02 | 1964-10-06 | Mack Trucks | Air cleaner seal for tilt cab vehicles |
US3240341A (en) * | 1963-01-14 | 1966-03-15 | Rosaen Filter Co | Magnetized gasket assembly |
US3275417A (en) * | 1963-10-15 | 1966-09-27 | Texas Instruments Inc | Production of dislocation-free silicon single crystals |
US3291570A (en) * | 1963-10-22 | 1966-12-13 | Siemens Ag | Apparatus for crucible-free zone melting of crystalline rods, particularly of semiconductor rods |
US3558281A (en) * | 1968-07-11 | 1971-01-26 | Texas Instruments Inc | Apparatus for minimizing stress in a heated semiconductor filament |
US3494742A (en) * | 1968-12-23 | 1970-02-10 | Western Electric Co | Apparatus for float zone melting fusible material |
US3679370A (en) * | 1970-07-31 | 1972-07-25 | Western Electric Co | Crystal grower with expandable chamber |
US3953281A (en) * | 1974-06-27 | 1976-04-27 | International Business Machines Corporation | Method and system for growing monocrystalline ingots |
DE2455173C3 (de) * | 1974-11-21 | 1979-01-18 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zum senkrechten Haltern des den Keimkristall enthaltenden Stabendes beim tiegelfreien Zonenschmelzen |
US4045181A (en) * | 1976-12-27 | 1977-08-30 | Monsanto Company | Apparatus for zone refining |
-
1977
- 1977-06-13 US US05/806,139 patent/US4201746A/en not_active Expired - Lifetime
- 1977-12-23 CA CA293,829A patent/CA1101316A/en not_active Expired
- 1977-12-23 BE BE183787A patent/BE862259A/xx not_active IP Right Cessation
- 1977-12-23 DE DE19772757772 patent/DE2757772A1/de not_active Withdrawn
- 1977-12-23 FR FR7739115A patent/FR2374951A1/fr active Granted
- 1977-12-23 GB GB53637/77A patent/GB1575670A/en not_active Expired
- 1977-12-23 DK DK578177A patent/DK578177A/da not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
GB1575670A (en) | 1980-09-24 |
DK578177A (da) | 1978-06-27 |
FR2374951A1 (fr) | 1978-07-21 |
BE862259A (fr) | 1978-06-23 |
CA1101316A (en) | 1981-05-19 |
US4201746A (en) | 1980-05-06 |
FR2374951B1 ( ) | 1980-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8139 | Disposal/non-payment of the annual fee |