DE2733924C3 - In zwei Richtungen wirksame Feinjustiereinrichtung - Google Patents

In zwei Richtungen wirksame Feinjustiereinrichtung

Info

Publication number
DE2733924C3
DE2733924C3 DE2733924A DE2733924A DE2733924C3 DE 2733924 C3 DE2733924 C3 DE 2733924C3 DE 2733924 A DE2733924 A DE 2733924A DE 2733924 A DE2733924 A DE 2733924A DE 2733924 C3 DE2733924 C3 DE 2733924C3
Authority
DE
Germany
Prior art keywords
base
action
piezoelectric elements
slider
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2733924A
Other languages
German (de)
English (en)
Other versions
DE2733924B2 (de
DE2733924A1 (de
Inventor
Isao Hino Tokio Ishikawa
Yoshio Saitama Sakitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE2733924A1 publication Critical patent/DE2733924A1/de
Publication of DE2733924B2 publication Critical patent/DE2733924B2/de
Application granted granted Critical
Publication of DE2733924C3 publication Critical patent/DE2733924C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023—Inchworm motors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41352—Alternative clamping dilation of piezo, caterpillar motion, inchworm

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Control Of Position Or Direction (AREA)
  • Micromachines (AREA)
DE2733924A 1976-07-28 1977-07-27 In zwei Richtungen wirksame Feinjustiereinrichtung Expired DE2733924C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8909276A JPS5315060A (en) 1976-07-28 1976-07-28 Inching device

Publications (3)

Publication Number Publication Date
DE2733924A1 DE2733924A1 (de) 1978-02-02
DE2733924B2 DE2733924B2 (de) 1980-03-20
DE2733924C3 true DE2733924C3 (de) 1980-11-20

Family

ID=13961229

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2733924A Expired DE2733924C3 (de) 1976-07-28 1977-07-27 In zwei Richtungen wirksame Feinjustiereinrichtung

Country Status (6)

Country Link
US (1) US4163168A (OSRAM)
JP (1) JPS5315060A (OSRAM)
CA (1) CA1078917A (OSRAM)
DE (1) DE2733924C3 (OSRAM)
FR (1) FR2360119A1 (OSRAM)
GB (1) GB1578807A (OSRAM)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4195243A (en) * 1978-11-06 1980-03-25 Sperry Corporation Piezoelectric wafer mover
JPS5576559A (en) * 1978-12-01 1980-06-09 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam fine adjusting device
DE2918100A1 (de) * 1979-05-04 1980-11-13 Siemens Ag Automatisiertes justieren in der feinwerktechnik
US4506154A (en) * 1982-10-22 1985-03-19 Scire Fredric E Planar biaxial micropositioning stage
US4614986A (en) * 1983-10-31 1986-09-30 Labudde Edward V Magnetic servo with improved tracking system
JPS60118072A (ja) * 1983-11-30 1985-06-25 Toshiba Corp 回転微動機構
DE3474380D1 (en) * 1984-05-03 1988-11-03 Ibm Piezoelectric stepping rotator
JPH0614789B2 (ja) * 1984-06-25 1994-02-23 株式会社東芝 テーブル微動方法およびこの方法を用いた微動装置
JPS6170954U (OSRAM) * 1984-10-15 1986-05-15
JPS61192435A (ja) * 1985-02-21 1986-08-27 Canon Inc 静電吸着保持装置
DE3610540A1 (de) * 1986-03-27 1987-10-01 Kernforschungsanlage Juelich Bewegungseinrichtung zur mikrobewegung von objekten
JPS62229746A (ja) * 1986-03-31 1987-10-08 Agency Of Ind Science & Technol 微小距離移動装置
DE3632403A1 (de) * 1986-09-24 1988-04-07 Heidelberg Instr Gmbh Verstelleinrichtung
US4798989A (en) * 1986-09-26 1989-01-17 Research Development Corporation Scanning tunneling microscope installed in electron microscope
DE3632964A1 (de) * 1986-09-27 1988-04-07 Physik Instr Pi Gmbh & Co Prod Piezoelektrisches stellglied
US4814622A (en) * 1987-11-06 1989-03-21 Bell Communications Research, Inc. High speed scanning tunneling microscope
GB2216732B (en) * 1988-03-15 1992-08-12 Alps Electric Co Ltd Linear motors
DE3812684A1 (de) * 1988-04-16 1989-11-02 Klaus Prof Dr Dransfeld Verfahren zum schnellen abrastern von unebenen oberflaechen mit dem raster-tunnelmikroskop
US5257024A (en) * 1988-05-26 1993-10-26 Quan-Scan, Inc. Search position encoder
DE3844659A1 (de) * 1988-07-03 1990-11-29 Forschungszentrum Juelich Gmbh Mikromanipulator
US4874979A (en) * 1988-10-03 1989-10-17 Burleigh Instruments, Inc. Electromechanical translation apparatus
US4884003A (en) * 1988-12-28 1989-11-28 Wyko Corporation Compact micromotion translator
GB2229045A (en) * 1989-03-08 1990-09-12 Alps Electric Co Ltd Ultrasonic linear motor with U-shaped vibrating body
US4968914A (en) * 1989-03-24 1990-11-06 Quanscan, Inc. High resolution electromechanical translation device
JPH0389875A (ja) * 1989-08-31 1991-04-15 Brother Ind Ltd リニア超音波モータ
US4999494A (en) * 1989-09-11 1991-03-12 Digital Instruments, Inc. System for scanning large sample areas with a scanning probe microscope
US5105117A (en) * 1989-10-31 1992-04-14 Brother Kogyo Kabushiki Kaisha Ultrasonic motor
US5282404A (en) * 1990-11-09 1994-02-01 The Government Of The United States Of America As Represented By The Secretary Of The Dept. Of Health & Human Services Microtome with micro-plane and electric contact reference
US5323012A (en) * 1991-08-16 1994-06-21 The Regents Of The University Of California Apparatus for positioning a stage
US5600530A (en) * 1992-08-04 1997-02-04 The Morgan Crucible Company Plc Electrostatic chuck
US5629577A (en) * 1994-07-15 1997-05-13 Micro Medical Devices Miniature linear motion actuator
US5751090A (en) * 1995-05-17 1998-05-12 Burleigh Instruments Inc Peristaltic driver apparatus
GB2316222B (en) * 1996-08-05 1998-07-01 Karrai Haines Gbr Inertial positioner
GB2316221A (en) * 1996-08-05 1998-02-18 Karrai Haines Gbr Positioner using piezoelectric actuator
WO1999059192A1 (en) 1998-05-14 1999-11-18 Massachusetts Institute Of Technology Omni-directional high precision friction drive positioning stage
US6429573B2 (en) 2000-06-23 2002-08-06 The Penn State Research Foundation Smart material motor with mechanical diodes
US7692802B2 (en) * 2001-11-15 2010-04-06 Heidelberger Druckmaschinen Ag Image setting device, module and printing press for relative motion compensation of image setting device and printing form
DE102018126387A1 (de) * 2018-10-23 2020-04-23 Tdk Electronics Ag Schallwandler und Verfahren zum Betrieb des Schallwandlers

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1071648A (en) * 1964-11-06 1967-06-07 Standard Telephones Cables Ltd Position control device
JPS5112497B1 (OSRAM) * 1971-04-21 1976-04-20

Also Published As

Publication number Publication date
FR2360119A1 (fr) 1978-02-24
DE2733924B2 (de) 1980-03-20
JPS5737101B2 (OSRAM) 1982-08-07
US4163168A (en) 1979-07-31
FR2360119B1 (OSRAM) 1983-02-11
JPS5315060A (en) 1978-02-10
CA1078917A (en) 1980-06-03
GB1578807A (en) 1980-11-12
DE2733924A1 (de) 1978-02-02

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Legal Events

Date Code Title Description
OAP Request for examination filed
OD Request for examination
C3 Grant after two publication steps (3rd publication)
8328 Change in the person/name/address of the agent

Free format text: STREHL, P., DIPL.-ING. DIPL.-WIRTSCH.-ING. SCHUEBEL-HOPF, U., DIPL.-CHEM. DR.RER.NAT., PAT.-ANW., 8000 MUENCHEN

8339 Ceased/non-payment of the annual fee