DE2721704A1 - Korpuskularoptikvorrichtung - Google Patents

Korpuskularoptikvorrichtung

Info

Publication number
DE2721704A1
DE2721704A1 DE19772721704 DE2721704A DE2721704A1 DE 2721704 A1 DE2721704 A1 DE 2721704A1 DE 19772721704 DE19772721704 DE 19772721704 DE 2721704 A DE2721704 A DE 2721704A DE 2721704 A1 DE2721704 A1 DE 2721704A1
Authority
DE
Germany
Prior art keywords
lens
plane
image
diaphragm
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19772721704
Other languages
German (de)
English (en)
Other versions
DE2721704C2 (US07696358-20100413-C00002.png
Inventor
Jacques Trotel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR7614719A external-priority patent/FR2351497A1/fr
Priority claimed from FR7702600A external-priority patent/FR2379159A2/fr
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of DE2721704A1 publication Critical patent/DE2721704A1/de
Application granted granted Critical
Publication of DE2721704C2 publication Critical patent/DE2721704C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
DE19772721704 1976-05-14 1977-05-13 Korpuskularoptikvorrichtung Granted DE2721704A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7614719A FR2351497A1 (fr) 1976-05-14 1976-05-14 Dispositif permettant le trace programme de figures de formes differentes
FR7702600A FR2379159A2 (fr) 1977-01-31 1977-01-31 Dispositif permettant le trace programme de figures de formes differentes

Publications (2)

Publication Number Publication Date
DE2721704A1 true DE2721704A1 (de) 1977-11-24
DE2721704C2 DE2721704C2 (US07696358-20100413-C00002.png) 1987-05-07

Family

ID=26219446

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19772721704 Granted DE2721704A1 (de) 1976-05-14 1977-05-13 Korpuskularoptikvorrichtung

Country Status (7)

Country Link
US (1) US4110622A (US07696358-20100413-C00002.png)
JP (1) JPS538064A (US07696358-20100413-C00002.png)
CA (1) CA1085073A (US07696358-20100413-C00002.png)
DE (1) DE2721704A1 (US07696358-20100413-C00002.png)
GB (1) GB1570347A (US07696358-20100413-C00002.png)
NL (1) NL177578C (US07696358-20100413-C00002.png)
SE (1) SE415309B (US07696358-20100413-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2472831A1 (fr) * 1979-08-08 1981-07-03 Zeiss Jena Veb Carl Procede et dispositif pour l'inclinaison de sondes de rayonnement superficiel

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1166766A (en) * 1977-02-23 1984-05-01 Hans C. Pfeiffer Method and apparatus for forming a variable size electron beam
US4167676A (en) * 1978-02-21 1979-09-11 Bell Telephone Laboratories, Incorporated Variable-spot scanning in an electron beam exposure system
US4475044A (en) * 1979-04-23 1984-10-02 Hitachi, Ltd. Apparatus for focus-deflecting a charged particle beam
JPS57206173A (en) * 1981-06-15 1982-12-17 Nippon Telegr & Teleph Corp <Ntt> Focusing deflecting device for charged corpuscule beam
GB2115976A (en) * 1982-02-26 1983-09-14 Philips Electronic Associated Charged particle beam apparatus
DE3786588D1 (de) * 1986-04-24 1993-08-26 Integrated Circuit Testing Elektrostatisch-magnetische-linse fuer korpuskularstrahlgeraete.
EP0274622B1 (de) * 1986-12-12 1990-11-07 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Detektoranordnung mit einem Detektorobjektiv für Korpuskularstrahlgeräte
JP2002217088A (ja) * 2001-01-17 2002-08-02 Nikon Corp 荷電粒子線露光装置、荷電粒子線露光方法及び半導体デバイスの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3638231A (en) * 1968-05-27 1972-01-25 Tno Device for recording with electron rays

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2356535A (en) * 1940-08-31 1944-08-22 Ruska Ernst Electronic lens
NL154050B (nl) * 1966-08-13 1977-07-15 Philips Nv Elektronenmicroscoop.
US3857034A (en) * 1970-08-31 1974-12-24 Max Planck Gesellschaft Scanning charged beam particle beam microscope
US3996468A (en) * 1972-01-28 1976-12-07 Nasa Electron microscope aperture system
US4000440A (en) * 1974-07-26 1976-12-28 International Business Machines Corporation Method and apparatus for controlling brightness and alignment of a beam of charged particles
GB1557924A (en) * 1976-02-05 1979-12-19 Western Electric Co Irradiation apparatus and methods
JPS52147977A (en) * 1976-04-02 1977-12-08 Jeol Ltd Electronic lens unit
JPS5320391A (en) * 1976-08-09 1978-02-24 Becton Dickinson Co Blood inspection apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3638231A (en) * 1968-05-27 1972-01-25 Tno Device for recording with electron rays

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2472831A1 (fr) * 1979-08-08 1981-07-03 Zeiss Jena Veb Carl Procede et dispositif pour l'inclinaison de sondes de rayonnement superficiel

Also Published As

Publication number Publication date
SE415309B (sv) 1980-09-22
US4110622A (en) 1978-08-29
NL7705207A (nl) 1977-11-16
JPS538064A (en) 1978-01-25
NL177578B (nl) 1985-05-17
CA1085073A (en) 1980-09-02
NL177578C (nl) 1985-10-16
DE2721704C2 (US07696358-20100413-C00002.png) 1987-05-07
SE7705531L (sv) 1977-11-15
GB1570347A (en) 1980-07-02

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Legal Events

Date Code Title Description
OD Request for examination
D2 Grant after examination
8364 No opposition during term of opposition