DE2711278C2 - Einrichtung zum wirksamen Ankoppeln von Mikrowellenenergie an eine Last - Google Patents

Einrichtung zum wirksamen Ankoppeln von Mikrowellenenergie an eine Last

Info

Publication number
DE2711278C2
DE2711278C2 DE2711278A DE2711278A DE2711278C2 DE 2711278 C2 DE2711278 C2 DE 2711278C2 DE 2711278 A DE2711278 A DE 2711278A DE 2711278 A DE2711278 A DE 2711278A DE 2711278 C2 DE2711278 C2 DE 2711278C2
Authority
DE
Germany
Prior art keywords
reflector
microwave
coupling
chamber
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2711278A
Other languages
German (de)
English (en)
Other versions
DE2711278A1 (de
Inventor
Bernhard John Olney Eastlund, Md.
Michael Gerson Bethesda Ury, Md.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUSION SYSTEMS CORP 20852 ROCKVILLE MD US
Original Assignee
FUSION SYSTEMS CORP 20852 ROCKVILLE MD US
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FUSION SYSTEMS CORP 20852 ROCKVILLE MD US filed Critical FUSION SYSTEMS CORP 20852 ROCKVILLE MD US
Publication of DE2711278A1 publication Critical patent/DE2711278A1/de
Application granted granted Critical
Publication of DE2711278C2 publication Critical patent/DE2711278C2/de
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/80Apparatus for specific applications

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)
DE2711278A 1976-03-17 1977-03-15 Einrichtung zum wirksamen Ankoppeln von Mikrowellenenergie an eine Last Expired DE2711278C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/667,759 US4042850A (en) 1976-03-17 1976-03-17 Microwave generated radiation apparatus

Publications (2)

Publication Number Publication Date
DE2711278A1 DE2711278A1 (de) 1977-10-27
DE2711278C2 true DE2711278C2 (de) 1984-03-01

Family

ID=24679518

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2711278A Expired DE2711278C2 (de) 1976-03-17 1977-03-15 Einrichtung zum wirksamen Ankoppeln von Mikrowellenenergie an eine Last

Country Status (3)

Country Link
US (1) US4042850A (cg-RX-API-DMAC10.html)
JP (1) JPS52116155A (cg-RX-API-DMAC10.html)
DE (1) DE2711278C2 (cg-RX-API-DMAC10.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3626922A1 (de) * 1986-05-21 1987-11-26 Fusion Systems Corp Mit mikrowellen gespeiste elektrodenlose lichtquelle
DE102007031628A1 (de) * 2007-07-06 2009-01-15 Eastman Kodak Co. UV-Strahlungsquelle
DE102007031629B3 (de) * 2007-07-06 2009-03-19 Eastman Kodak Co. Mit Mikrowellen angeregte Strahlungsquelle

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JPS56126250A (en) * 1980-03-10 1981-10-03 Mitsubishi Electric Corp Light source device of micro wave discharge
DE3069696D1 (en) * 1980-06-30 1985-01-10 Ibm Text processing terminal with editing of stored document at each keystroke
JPS5749157A (en) * 1981-07-01 1982-03-20 Mitsubishi Electric Corp Electrodeless discharge lamp
DE3147986C2 (de) * 1981-12-04 1992-02-27 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zur Erzeugung eines Mikrowellenplasmas für die Behandlung von Substraten, insbesondere zur Plasmapolymerisation von Monomeren
US4532427A (en) * 1982-03-29 1985-07-30 Fusion Systems Corp. Method and apparatus for performing deep UV photolithography
US4507587A (en) * 1982-05-24 1985-03-26 Fusion Systems Corporation Microwave generated electrodeless lamp for producing bright output
DE3318795A1 (de) * 1982-05-24 1983-12-15 Fusion Systems Corp., 20852 Rockville, Md. Mit mikrowellen gespeiste elektrodenlose lampe
US4954755A (en) * 1982-05-24 1990-09-04 Fusion Systems Corporation Electrodeless lamp having hybrid cavity
US4504768A (en) * 1982-06-30 1985-03-12 Fusion Systems Corporation Electrodeless lamp using a single magnetron and improved lamp envelope therefor
US4501993A (en) * 1982-10-06 1985-02-26 Fusion Systems Corporation Deep UV lamp bulb
US4859906A (en) * 1982-10-06 1989-08-22 Fusion Systems Corportion Deep UV lamp bulb with improved fill
JPS645285Y2 (cg-RX-API-DMAC10.html) * 1984-10-18 1989-02-09
US4749916A (en) * 1984-12-19 1988-06-07 Mitsubishi Denki Kabushiki Kaisha Illuminator for cultivating plant
US4633140A (en) * 1984-12-24 1986-12-30 Fusion Systems Corporation Electrodeless lamp having staggered turn-on of microwave sources
US4812957A (en) * 1985-07-23 1989-03-14 Fusion Systems Corporation Optical system for uniform illumination of a plane surface
JPS63229711A (ja) * 1987-03-19 1988-09-26 Yasuo Tarui 成膜装置
JPH072184Y2 (ja) * 1988-07-27 1995-01-25 ウシオ電機株式会社 紫外線による処理装置
US5039918A (en) * 1990-04-06 1991-08-13 New Japan Radio Co., Ltd. Electrodeless microwave-generated radiation apparatus
DE4109895C2 (de) * 1990-04-25 1994-11-24 Fusion Systems Corp Länglicher, elektrodenloser Lampenkolben
US5070277A (en) * 1990-05-15 1991-12-03 Gte Laboratories Incorporated Electrodless hid lamp with microwave power coupler
US5113121A (en) * 1990-05-15 1992-05-12 Gte Laboratories Incorporated Electrodeless HID lamp with lamp capsule
US5227698A (en) * 1992-03-12 1993-07-13 Fusion Systems Corporation Microwave lamp with rotating field
US5361274A (en) * 1992-03-12 1994-11-01 Fusion Systems Corp. Microwave discharge device with TMNMO cavity
US5440137A (en) * 1994-09-06 1995-08-08 Fusion Systems Corporation Screw mechanism for radiation-curing lamp having an adjustable irradiation area
US5977712A (en) * 1996-01-26 1999-11-02 Fusion Lighting, Inc. Inductive tuners for microwave driven discharge lamps
US5666640A (en) * 1996-04-02 1997-09-09 Daniylchev; Vladimir A. Microwave powered ozone producing system
US5931557A (en) * 1996-04-02 1999-08-03 Danilychev; Vladimir A. Energy efficient ultraviolet visible light source
US5726815A (en) * 1996-04-12 1998-03-10 Fusion Uv Systems, Inc. Apparatus for aligning the object focus in filament irradiating units
US5991014A (en) * 1997-04-25 1999-11-23 Fusion Uv Systems, Inc. Light sensing device for sensing the light output of a bulb
US6087783A (en) * 1998-02-05 2000-07-11 Purepulse Technologies, Inc. Method and apparatus utilizing microwaves to enhance electrode arc lamp emission spectra
US6207237B1 (en) 1998-09-30 2001-03-27 Kimberly-Clark Corporation Elastic nonwoven webs and films
US6528439B1 (en) 1998-09-30 2003-03-04 Kimberly-Clark Worldwide, Inc. Crimped polymeric fibers and nonwoven webs made therefrom with improved resiliency
US6118130A (en) * 1998-11-18 2000-09-12 Fusion Uv Systems, Inc. Extendable focal length lamp
KR100367585B1 (ko) * 1999-06-28 2003-01-10 엘지전자 주식회사 전자 레인지의 히팅장치
KR20020033181A (ko) 1999-09-20 2002-05-04 토마스 엘. 무어헤드 자외선 복사 발생 장치 및 방법
US6351070B1 (en) * 1999-12-28 2002-02-26 Fusion Uv Systems, Inc. Lamp with self-constricting plasma light source
JP4777582B2 (ja) 2000-04-07 2011-09-21 ノードソン コーポレーション 向上したランプの冷却を伴っているマイクロ波励起紫外線ランプシステム
US20020176796A1 (en) * 2000-06-20 2002-11-28 Purepulse Technologies, Inc. Inactivation of microbes in biological fluids
US6323601B1 (en) 2000-09-11 2001-11-27 Nordson Corporation Reflector for an ultraviolet lamp system
US6559460B1 (en) * 2000-10-31 2003-05-06 Nordson Corporation Ultraviolet lamp system and methods
US6908586B2 (en) * 2001-06-27 2005-06-21 Fusion Uv Systems, Inc. Free radical polymerization method having reduced premature termination, apparatus for performing the method and product formed thereby
US20030051990A1 (en) * 2001-08-15 2003-03-20 Crt Holdings, Inc. System, method, and apparatus for an intense ultraviolet radiation source
GB0206673D0 (en) * 2002-03-21 2002-05-01 Jenact Ltd Elongate ultraviolet light source
WO2004101101A2 (en) 2003-05-08 2004-11-25 Eco-Rx, Inc. System for purifying and removing contaminants from gaseous fluids
WO2004110932A2 (en) * 2003-05-27 2004-12-23 Abq Ultraviolet Pollution Solutions, Inc. Method and apparatus for a high efficiency ultraviolet radiation source
US6831419B1 (en) * 2003-06-02 2004-12-14 Nordson Corporation Exhaust system for a microwave excited ultraviolet lamp
US7198576B2 (en) * 2003-06-17 2007-04-03 Acushnet Company Golf ball comprising UV-cured non-surface layer
US7428869B2 (en) * 2003-12-19 2008-09-30 Acushnet Company Method of printing golf balls with controlled ink viscosity
US9808544B2 (en) 2005-08-31 2017-11-07 Ultraviolet Sciences, Inc. Ultraviolet light treatment chamber
US7511281B2 (en) * 2005-08-31 2009-03-31 Ultraviolet Sciences, Inc. Ultraviolet light treatment chamber
US9511344B2 (en) * 2007-12-18 2016-12-06 Ultraviolet Sciences, Inc. Ultraviolet light treatment chamber
US7925122B2 (en) * 2007-06-25 2011-04-12 California Institute Of Technology Slot waveguide for color display
US8854734B2 (en) * 2009-11-12 2014-10-07 Vela Technologies, Inc. Integrating optical system and methods
US8426800B2 (en) 2010-09-09 2013-04-23 Vela Technologies, Inc. Integrating optical systems and methods
CN111295732B (zh) 2017-11-03 2023-03-31 贺利氏特种光源美国有限责任公司 紫外线灯系统及其操作和配置方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3374393A (en) * 1965-02-12 1968-03-19 Melpar Inc Intense incoherent light source obtained by quenching the higher excited states and concentrating the energy on the lower states
US3648100A (en) * 1969-03-24 1972-03-07 Westinghouse Electric Corp Electrodeless pulsed illuminator
US3577207A (en) * 1969-05-07 1971-05-04 Vladimir Pavlovich Kirjushin Microwave plasmatron
US3641389A (en) * 1969-11-05 1972-02-08 Varian Associates High-power microwave excited plasma discharge lamp
US3609448A (en) * 1970-01-14 1971-09-28 Varian Associates High-power plasma generator employed as a source of light flux at atmospheric pressure
US3914766A (en) * 1970-09-24 1975-10-21 Richard L Moore Pulsating plasma device
US3872349A (en) * 1973-03-29 1975-03-18 Fusion Systems Corp Apparatus and method for generating radiation

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3626922A1 (de) * 1986-05-21 1987-11-26 Fusion Systems Corp Mit mikrowellen gespeiste elektrodenlose lichtquelle
DE3626922C2 (cg-RX-API-DMAC10.html) * 1986-05-21 1989-05-03 Fusion Systems Corp., Rockville, Md., Us
DE102007031628A1 (de) * 2007-07-06 2009-01-15 Eastman Kodak Co. UV-Strahlungsquelle
DE102007031629B3 (de) * 2007-07-06 2009-03-19 Eastman Kodak Co. Mit Mikrowellen angeregte Strahlungsquelle
DE102007031628B4 (de) * 2007-07-06 2012-06-21 Eastman Kodak Co. UV-Strahlungsquelle

Also Published As

Publication number Publication date
JPS5744228B2 (cg-RX-API-DMAC10.html) 1982-09-20
JPS52116155A (en) 1977-09-29
DE2711278A1 (de) 1977-10-27
US4042850A (en) 1977-08-16

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Legal Events

Date Code Title Description
OD Request for examination
8125 Change of the main classification

Ipc: H01J 65/04

D2 Grant after examination
8364 No opposition during term of opposition