DE2710860C3 - Maskenbildender Belag für die Aufbringung von dielektrischen Schichten auf Substraten durch Vakuumaufdampfung oder Kathodenzerstäubung - Google Patents
Maskenbildender Belag für die Aufbringung von dielektrischen Schichten auf Substraten durch Vakuumaufdampfung oder KathodenzerstäubungInfo
- Publication number
- DE2710860C3 DE2710860C3 DE19772710860 DE2710860A DE2710860C3 DE 2710860 C3 DE2710860 C3 DE 2710860C3 DE 19772710860 DE19772710860 DE 19772710860 DE 2710860 A DE2710860 A DE 2710860A DE 2710860 C3 DE2710860 C3 DE 2710860C3
- Authority
- DE
- Germany
- Prior art keywords
- mask
- vapor deposition
- substrates
- dielectric layers
- application
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 title claims description 21
- 238000007740 vapor deposition Methods 0.000 title claims description 13
- 238000004544 sputter deposition Methods 0.000 title claims description 5
- 239000011248 coating agent Substances 0.000 title description 10
- 238000000576 coating method Methods 0.000 title description 10
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 239000000725 suspension Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000009826 distribution Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 239000004922 lacquer Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 229910001338 liquidmetal Inorganic materials 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- -1 Si 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH616876A CH601491A5 (forum.php) | 1976-05-18 | 1976-05-18 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2710860A1 DE2710860A1 (de) | 1977-12-01 |
| DE2710860B2 DE2710860B2 (de) | 1981-06-25 |
| DE2710860C3 true DE2710860C3 (de) | 1983-04-07 |
Family
ID=4305339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19772710860 Expired DE2710860C3 (de) | 1976-05-18 | 1977-03-12 | Maskenbildender Belag für die Aufbringung von dielektrischen Schichten auf Substraten durch Vakuumaufdampfung oder Kathodenzerstäubung |
Country Status (6)
| Country | Link |
|---|---|
| AT (1) | AT346627B (forum.php) |
| CH (1) | CH601491A5 (forum.php) |
| DE (1) | DE2710860C3 (forum.php) |
| FR (1) | FR2352066A1 (forum.php) |
| GB (1) | GB1544607A (forum.php) |
| NL (1) | NL168008C (forum.php) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4517217A (en) * | 1980-09-09 | 1985-05-14 | Westinghouse Electric Corp. | Protective coating means for articles such as gold-plated jewelry and wristwatch components |
| US4533605A (en) * | 1980-09-09 | 1985-08-06 | Westinghouse Electric Corp. | Article such as jewelry or a wristwatch component having composite multi-film protective coating |
| US4495254A (en) * | 1981-05-18 | 1985-01-22 | Westinghouse Electric Corp. | Protectively-coated gold-plated article of jewelry or wristwatch component |
| DE102004034418B4 (de) * | 2004-07-15 | 2009-06-25 | Schott Ag | Verfahren zur Herstellung struktuierter optischer Filterschichten auf Substraten |
| DE102004034417B4 (de) * | 2004-07-15 | 2007-09-27 | Schott Ag | Verfahren zur Herstellung eines beschichteten Substrats mit gewölbter Oberfläche |
-
1976
- 1976-05-18 CH CH616876A patent/CH601491A5/xx not_active IP Right Cessation
- 1976-06-16 NL NL7606532A patent/NL168008C/xx not_active IP Right Cessation
-
1977
- 1977-03-12 DE DE19772710860 patent/DE2710860C3/de not_active Expired
- 1977-03-17 AT AT181477A patent/AT346627B/de not_active IP Right Cessation
- 1977-03-28 GB GB1288577A patent/GB1544607A/en not_active Expired
- 1977-04-28 FR FR7712882A patent/FR2352066A1/fr active Granted
Non-Patent Citations (1)
| Title |
|---|
| NICHTS-ERMITTELT |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2352066B3 (forum.php) | 1980-02-15 |
| DE2710860B2 (de) | 1981-06-25 |
| GB1544607A (en) | 1979-04-19 |
| NL7606532A (nl) | 1977-11-22 |
| FR2352066A1 (fr) | 1977-12-16 |
| AT346627B (de) | 1978-11-27 |
| CH601491A5 (forum.php) | 1978-07-14 |
| NL168008C (nl) | 1982-02-16 |
| NL168008B (nl) | 1981-09-16 |
| DE2710860A1 (de) | 1977-12-01 |
| ATA181477A (de) | 1978-03-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| 8263 | Opposition against grant of a patent | ||
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |