DE2706896C3 - Verfahren zur Dampfabscheidung einer dünnen Schicht aus Ceroxid - Google Patents

Verfahren zur Dampfabscheidung einer dünnen Schicht aus Ceroxid

Info

Publication number
DE2706896C3
DE2706896C3 DE19772706896 DE2706896A DE2706896C3 DE 2706896 C3 DE2706896 C3 DE 2706896C3 DE 19772706896 DE19772706896 DE 19772706896 DE 2706896 A DE2706896 A DE 2706896A DE 2706896 C3 DE2706896 C3 DE 2706896C3
Authority
DE
Germany
Prior art keywords
cerium oxide
substrate
boat
particles
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19772706896
Other languages
German (de)
English (en)
Other versions
DE2706896B2 (de
DE2706896A1 (de
Inventor
Tsutomu Fujita
Kazuo Sunahara
Kiyoshi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE2706896A1 publication Critical patent/DE2706896A1/de
Publication of DE2706896B2 publication Critical patent/DE2706896B2/de
Application granted granted Critical
Publication of DE2706896C3 publication Critical patent/DE2706896C3/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/233—Manufacture of photoelectric screens or charge-storage screens

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
DE19772706896 1976-02-20 1977-02-17 Verfahren zur Dampfabscheidung einer dünnen Schicht aus Ceroxid Expired DE2706896C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51017080A JPS585849B2 (ja) 1976-02-20 1976-02-20 酸化セリウム薄膜の蒸着方法

Publications (3)

Publication Number Publication Date
DE2706896A1 DE2706896A1 (de) 1977-08-25
DE2706896B2 DE2706896B2 (de) 1979-05-31
DE2706896C3 true DE2706896C3 (de) 1980-01-17

Family

ID=11933988

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19772706896 Expired DE2706896C3 (de) 1976-02-20 1977-02-17 Verfahren zur Dampfabscheidung einer dünnen Schicht aus Ceroxid

Country Status (5)

Country Link
JP (1) JPS585849B2 (cs)
DE (1) DE2706896C3 (cs)
FR (1) FR2341668A1 (cs)
GB (1) GB1563964A (cs)
NL (1) NL169758C (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE171732T1 (de) * 1992-07-02 1998-10-15 Balzers Hochvakuum Verfahren zur herstellung einer metalloxidschicht, vakuumbehandlungsanlage hierfür sowie mit mindestens einer metalloxidschicht beschichteter teil

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945998A (cs) * 1972-09-11 1974-05-02
US3983076A (en) * 1973-07-02 1976-09-28 Energy Conversion Devices, Inc. N-type amorphous semiconductor materials

Also Published As

Publication number Publication date
FR2341668A1 (fr) 1977-09-16
DE2706896B2 (de) 1979-05-31
NL7701757A (nl) 1977-08-23
JPS52100396A (en) 1977-08-23
DE2706896A1 (de) 1977-08-25
NL169758B (nl) 1982-03-16
FR2341668B1 (cs) 1980-02-01
NL169758C (nl) 1982-08-16
GB1563964A (en) 1980-04-02
JPS585849B2 (ja) 1983-02-02

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)