DE2651645A1 - Roentgenfluoreszenzspektrometer - Google Patents
RoentgenfluoreszenzspektrometerInfo
- Publication number
- DE2651645A1 DE2651645A1 DE19762651645 DE2651645A DE2651645A1 DE 2651645 A1 DE2651645 A1 DE 2651645A1 DE 19762651645 DE19762651645 DE 19762651645 DE 2651645 A DE2651645 A DE 2651645A DE 2651645 A1 DE2651645 A1 DE 2651645A1
- Authority
- DE
- Germany
- Prior art keywords
- detector
- crystal
- radiation
- fluorescence spectrometer
- ray fluorescence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 23
- 230000005855 radiation Effects 0.000 claims description 20
- 238000004876 x-ray fluorescence Methods 0.000 claims description 10
- 239000006185 dispersion Substances 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 2
- 208000029152 Small face Diseases 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000134 Metallised film Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052614 beryl Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
- H01J47/02—Ionisation chambers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7513716A NL7513716A (nl) | 1975-11-25 | 1975-11-25 | Roentgenfluorescentie spectrometer. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2651645A1 true DE2651645A1 (de) | 1977-06-02 |
Family
ID=19824912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19762651645 Pending DE2651645A1 (de) | 1975-11-25 | 1976-11-12 | Roentgenfluoreszenzspektrometer |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4131794A (https=) |
| JP (1) | JPS5265490A (https=) |
| AU (1) | AU507455B2 (https=) |
| DE (1) | DE2651645A1 (https=) |
| FR (1) | FR2333239A1 (https=) |
| GB (1) | GB1570595A (https=) |
| NL (1) | NL7513716A (https=) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2907948C2 (de) * | 1979-03-01 | 1983-04-07 | Siemens AG, 1000 Berlin und 8000 München | Röntgendiffraktometer mit hoher zeitlicher Auflösung |
| DE2925593A1 (de) * | 1979-06-25 | 1981-01-15 | Siemens Ag | Einrichtung fuer die roentgenfluoreszenzanalyse |
| DE3125803A1 (de) * | 1981-06-30 | 1983-01-13 | Siemens AG, 1000 Berlin und 8000 München | Kristall-roentgen-sequenzspektrometer |
| NL8300419A (nl) * | 1983-02-04 | 1984-09-03 | Philips Nv | Roentgen analyse apparaat. |
| FI67956C (fi) * | 1983-09-22 | 1985-06-10 | Mexpert Oy | Pao roentgendiffraktion sig grundande foerfarande och anordning foer maetning av spaenningar |
| JPS6122240A (ja) * | 1984-07-11 | 1986-01-30 | Rigaku Denki Kk | 微小部x線分析装置 |
| JPS6122241A (ja) * | 1984-07-11 | 1986-01-30 | Rigaku Denki Kk | X線分析装置 |
| US5007072A (en) * | 1988-08-03 | 1991-04-09 | Ion Track Instruments | X-ray diffraction inspection system |
| US5742658A (en) * | 1996-05-23 | 1998-04-21 | Advanced Micro Devices, Inc. | Apparatus and method for determining the elemental compositions and relative locations of particles on the surface of a semiconductor wafer |
| US5912940A (en) * | 1996-06-10 | 1999-06-15 | O'hara; David | Combination wavelength and energy dispersive x-ray spectrometer |
| US6005915A (en) * | 1997-11-07 | 1999-12-21 | Advanced Micro Devices, Inc. | Apparatus and method for measuring the roughness of a target material surface based upon the scattering of incident X-ray photons |
| FR2914424B1 (fr) * | 2007-03-30 | 2012-07-27 | Centre Nat Rech Scient | Dispositif d'analyse d'un echantillon par rayons x comprenant un systeme analyseur par diffraction filtrant en energie et en angle. |
| US7593509B2 (en) * | 2007-09-27 | 2009-09-22 | Varian Medical Systems, Inc. | Analytical x-ray tube for close coupled sample analysis |
| US8537967B2 (en) * | 2009-09-10 | 2013-09-17 | University Of Washington | Short working distance spectrometer and associated devices, systems, and methods |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2842670A (en) * | 1955-02-23 | 1958-07-08 | Jr La Verne S Birks | Flat crystal fluorescent X-ray spectrograph |
| US3321624A (en) * | 1963-04-05 | 1967-05-23 | Hitachi Ltd | X-ray spectrometer apparatus having a detector located within the circumference of the rowland circle |
| US3354308A (en) * | 1965-04-30 | 1967-11-21 | Philips Electronic Pharma | Apparatus with means to measure the characteristic X-ray emission from and the density of a material |
| US3663812A (en) * | 1969-02-27 | 1972-05-16 | Mc Donnell Douglas Corp | X-ray spectrographic means having fixed analyzing and detecting means |
| US4031396A (en) * | 1975-02-28 | 1977-06-21 | General Electric Company | X-ray detector |
-
1975
- 1975-11-25 NL NL7513716A patent/NL7513716A/xx not_active Application Discontinuation
-
1976
- 1976-11-12 DE DE19762651645 patent/DE2651645A1/de active Pending
- 1976-11-22 JP JP51139639A patent/JPS5265490A/ja active Pending
- 1976-11-22 GB GB48590/76A patent/GB1570595A/en not_active Expired
- 1976-11-22 US US05/743,648 patent/US4131794A/en not_active Expired - Lifetime
- 1976-11-23 AU AU19912/76A patent/AU507455B2/en not_active Expired
- 1976-11-24 FR FR7635344A patent/FR2333239A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2333239A1 (fr) | 1977-06-24 |
| FR2333239B1 (https=) | 1981-12-18 |
| US4131794A (en) | 1978-12-26 |
| AU1991276A (en) | 1978-06-01 |
| NL7513716A (nl) | 1977-05-27 |
| AU507455B2 (en) | 1980-02-14 |
| JPS5265490A (en) | 1977-05-30 |
| GB1570595A (en) | 1980-07-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2651645A1 (de) | Roentgenfluoreszenzspektrometer | |
| DE2716873A1 (de) | Detektoranordnung fuer roentgenstrahlen | |
| DE19808128A1 (de) | Infrarot Gas-Analysator | |
| DE2729210C2 (de) | Neutronennachweiseinrichtung mit einem aus einer Spaltionisationskammer und einer Gammakompensationskammer bestehenden Neutronendetektor | |
| DE112018006397T5 (de) | Silizium-drift-detektionselement, silizium-drift-detektor und strahlungsdetektionsvorrichtung | |
| DE1919824A1 (de) | Neutronendetektor | |
| DE2460686A1 (de) | Detektor zur teilchenortung | |
| DE3002950C2 (de) | Ortsempfindliches Proportional-Zählrohr | |
| DE2104767C3 (de) | Differenz-Refraktometer | |
| DE69728258T2 (de) | Röntgenstrahlspektrometer mit kristallanalysator mit teilweise konstantem und ilweise variablem krümmungsradius | |
| DE69310233T2 (de) | Röntgendetektor mit verbessertem Eingansgfenster | |
| DE3211956C2 (de) | Strahlungsdetektoranordnung | |
| DE3602519A1 (de) | Strahlungsmessgeraet | |
| DE2910250C3 (de) | Quelle für polychromatische Röntgenstrahlung | |
| DE2109568A1 (de) | Nachweissystem für ein Ultrarot-Gasanalysegerät | |
| DE2461224A1 (de) | Vorrichtung zum elektrischen nachweis von ionen zur massenspektroskopischen bestimmung der massenwerte und/oder der massenintensitaeten der ionen | |
| DE3425561C2 (de) | Vorrichtung zur Messung von wärmetechnischen Kenngrössen einer Stoffprobe | |
| CH391122A (de) | Vorrichtung zum Messen des Energiestromes in einem Röntgenstrahlenbündel | |
| DE2813674A1 (de) | Vielkanalroentgendetektor | |
| DE2109590A1 (de) | Spektrometrisches Meßverfahren und Spek trometeranordnung zu seiner Durchfuhrung | |
| DE3446436C2 (https=) | ||
| DE29511967U1 (de) | Detektor für eine Meßvorrichtung | |
| DE1598024A1 (de) | Verfahren und Vorrichtung zur massenspektrometrischen Analyse von Stoffen | |
| DE19931772A1 (de) | Gaskammerdetektor mit Gas-Elektronenvervielfacher | |
| DE1146278B (de) | Verfahren und Vorrichtung zum spektroskopischen Abtasten eines Wellenlaengenbereiches |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| OHN | Withdrawal |