DE2632614A1 - Vorrichtung zum ziehen eines einkristallinen koerpers aus einem schmelzfilm - Google Patents
Vorrichtung zum ziehen eines einkristallinen koerpers aus einem schmelzfilmInfo
- Publication number
- DE2632614A1 DE2632614A1 DE19762632614 DE2632614A DE2632614A1 DE 2632614 A1 DE2632614 A1 DE 2632614A1 DE 19762632614 DE19762632614 DE 19762632614 DE 2632614 A DE2632614 A DE 2632614A DE 2632614 A1 DE2632614 A1 DE 2632614A1
- Authority
- DE
- Germany
- Prior art keywords
- melt
- crystal
- pulling
- inert material
- shaping part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000155 melt Substances 0.000 title claims description 20
- 239000000463 material Substances 0.000 claims description 23
- 238000007493 shaping process Methods 0.000 claims description 14
- 229910052594 sapphire Inorganic materials 0.000 claims description 5
- 239000010980 sapphire Substances 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 30
- 238000000034 method Methods 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
- Y10T117/1044—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die] including means forming a flat shape [e.g., ribbon]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19762632614 DE2632614A1 (de) | 1976-07-20 | 1976-07-20 | Vorrichtung zum ziehen eines einkristallinen koerpers aus einem schmelzfilm |
| GB27580/77A GB1540037A (en) | 1976-07-20 | 1977-07-01 | Apparatus for drawing a monocrystalline silicone body from a film of molten material and dies for use therein |
| IT25677/77A IT1084574B (it) | 1976-07-20 | 1977-07-13 | Dispositivo per coltivare un solido monocristallino da una pellicola fusa. |
| FR7721890A FR2358922A1 (fr) | 1976-07-20 | 1977-07-18 | Dispositif pour realiser le tirage d'un corps monocristallin a partir d'une pellicule en fusion |
| US05/817,068 US4213940A (en) | 1976-07-20 | 1977-07-19 | Apparatus for pulling monocrystalline ribbon-like bodies out of a molten crystalline film |
| BE179511A BE857003A (fr) | 1976-07-20 | 1977-07-20 | Dispositif pour realiser le tirage d'un corps monocristallin a partir d'une pellicule en fusion |
| JP8721377A JPS5311886A (en) | 1976-07-20 | 1977-07-20 | Apparatus for pulling single crystals from membrane of melt |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19762632614 DE2632614A1 (de) | 1976-07-20 | 1976-07-20 | Vorrichtung zum ziehen eines einkristallinen koerpers aus einem schmelzfilm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2632614A1 true DE2632614A1 (de) | 1978-01-26 |
Family
ID=5983487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19762632614 Withdrawn DE2632614A1 (de) | 1976-07-20 | 1976-07-20 | Vorrichtung zum ziehen eines einkristallinen koerpers aus einem schmelzfilm |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4213940A (enExample) |
| JP (1) | JPS5311886A (enExample) |
| BE (1) | BE857003A (enExample) |
| DE (1) | DE2632614A1 (enExample) |
| FR (1) | FR2358922A1 (enExample) |
| GB (1) | GB1540037A (enExample) |
| IT (1) | IT1084574B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4271129A (en) | 1979-03-06 | 1981-06-02 | Rca Corporation | Heat radiation deflectors within an EFG crucible |
| US4515755A (en) * | 1981-05-11 | 1985-05-07 | Toshiba Ceramics Co., Ltd. | Apparatus for producing a silicon single crystal from a silicon melt |
| FR2549744B1 (fr) * | 1983-07-29 | 1985-09-20 | Commissariat Energie Atomique | Procede de preparation de formes metalliques ou semi-metalliques minces ou massives, notamment de silicium |
| US5057487A (en) * | 1987-10-29 | 1991-10-15 | Texas Instruments Incorporated | Crystal growth method for Y-Ba-Cu-O compounds |
| DE69208146T2 (de) * | 1991-05-30 | 1996-06-20 | Chichibu Cement Kk | Rutil-Einkristalle sowie Verfahren zu deren Zuchtung |
| JP4497538B2 (ja) * | 2004-12-22 | 2010-07-07 | 三菱鉛筆株式会社 | 筆記具 |
| US20090130415A1 (en) * | 2007-11-21 | 2009-05-21 | Saint-Gobain Ceramics & Plastics, Inc. | R-Plane Sapphire Method and Apparatus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2893847A (en) * | 1954-02-23 | 1959-07-07 | Siemens Ag | Apparatus for preparing rod-shaped, crystalline bodies, particularly semiconductor bodies |
| GB1015710A (en) * | 1962-11-28 | 1966-01-05 | Morgan Refractories Ltd | Improved refractory products |
| DE1220832B (de) * | 1964-09-22 | 1966-07-14 | Siemens Ag | Ziehduese zum Ziehen von Halbleiterkristallen aus einer Schmelze |
| US3650703A (en) * | 1967-09-08 | 1972-03-21 | Tyco Laboratories Inc | Method and apparatus for growing inorganic filaments, ribbon from the melt |
| US3870477A (en) * | 1972-07-10 | 1975-03-11 | Tyco Laboratories Inc | Optical control of crystal growth |
-
1976
- 1976-07-20 DE DE19762632614 patent/DE2632614A1/de not_active Withdrawn
-
1977
- 1977-07-01 GB GB27580/77A patent/GB1540037A/en not_active Expired
- 1977-07-13 IT IT25677/77A patent/IT1084574B/it active
- 1977-07-18 FR FR7721890A patent/FR2358922A1/fr active Granted
- 1977-07-19 US US05/817,068 patent/US4213940A/en not_active Expired - Lifetime
- 1977-07-20 BE BE179511A patent/BE857003A/xx unknown
- 1977-07-20 JP JP8721377A patent/JPS5311886A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1540037A (en) | 1979-02-07 |
| FR2358922A1 (fr) | 1978-02-17 |
| IT1084574B (it) | 1985-05-25 |
| BE857003A (fr) | 1977-11-14 |
| JPS5311886A (en) | 1978-02-02 |
| US4213940A (en) | 1980-07-22 |
| FR2358922B1 (enExample) | 1980-01-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OAM | Search report available | ||
| OC | Search report available | ||
| 8120 | Willingness to grant licences paragraph 23 | ||
| 8126 | Change of the secondary classification |
Free format text: C30B 15/24 C30B 29/06 |
|
| 8141 | Disposal/no request for examination |