DE2604672C2 - Vorrichtung zur Kontrolle der Homogenität der radialen Intensitätsverteilung eines ionisierenden Strahlungsbündels - Google Patents

Vorrichtung zur Kontrolle der Homogenität der radialen Intensitätsverteilung eines ionisierenden Strahlungsbündels

Info

Publication number
DE2604672C2
DE2604672C2 DE19762604672 DE2604672A DE2604672C2 DE 2604672 C2 DE2604672 C2 DE 2604672C2 DE 19762604672 DE19762604672 DE 19762604672 DE 2604672 A DE2604672 A DE 2604672A DE 2604672 C2 DE2604672 C2 DE 2604672C2
Authority
DE
Germany
Prior art keywords
electrode
ionization chamber
radiation beam
signal
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19762604672
Other languages
German (de)
English (en)
Other versions
DE2604672A1 (de
Inventor
René Versailles Boux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cgr-Mev Paris Fr
Original Assignee
Cgr-Mev Paris Fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cgr-Mev Paris Fr filed Critical Cgr-Mev Paris Fr
Publication of DE2604672A1 publication Critical patent/DE2604672A1/de
Application granted granted Critical
Publication of DE2604672C2 publication Critical patent/DE2604672C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24455—Transmitted particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
DE19762604672 1975-02-07 1976-02-06 Vorrichtung zur Kontrolle der Homogenität der radialen Intensitätsverteilung eines ionisierenden Strahlungsbündels Expired DE2604672C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7503798A FR2300414A2 (fr) 1975-02-07 1975-02-07 Dispositif pour le controle de la p

Publications (2)

Publication Number Publication Date
DE2604672A1 DE2604672A1 (de) 1976-08-19
DE2604672C2 true DE2604672C2 (de) 1984-09-27

Family

ID=9150889

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19762604672 Expired DE2604672C2 (de) 1975-02-07 1976-02-06 Vorrichtung zur Kontrolle der Homogenität der radialen Intensitätsverteilung eines ionisierenden Strahlungsbündels

Country Status (7)

Country Link
JP (1) JPS5823704B2 (enrdf_load_stackoverflow)
CA (1) CA1067624A (enrdf_load_stackoverflow)
CH (1) CH588086A5 (enrdf_load_stackoverflow)
DE (1) DE2604672C2 (enrdf_load_stackoverflow)
FR (1) FR2300414A2 (enrdf_load_stackoverflow)
GB (1) GB1558601A (enrdf_load_stackoverflow)
NL (1) NL7601175A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7804037A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.
US4347547A (en) * 1980-05-22 1982-08-31 Siemens Medical Laboratories, Inc. Energy interlock system for a linear accelerator
GB8415709D0 (en) * 1984-06-20 1984-07-25 Dubilier Scient Ltd Scanning microscope
JPH0610001U (ja) * 1992-07-14 1994-02-08 正雄 宮前 台 車

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2133318A5 (enrdf_load_stackoverflow) * 1971-04-16 1972-11-24 Thomson Csf
FR2215701B1 (enrdf_load_stackoverflow) * 1973-01-26 1978-10-27 Cgr Mev

Also Published As

Publication number Publication date
DE2604672A1 (de) 1976-08-19
CH588086A5 (enrdf_load_stackoverflow) 1977-05-31
JPS51102800A (ja) 1976-09-10
JPS5823704B2 (ja) 1983-05-17
FR2300414A2 (fr) 1976-09-03
NL7601175A (nl) 1976-08-10
GB1558601A (en) 1980-01-09
CA1067624A (en) 1979-12-04
FR2300414B2 (enrdf_load_stackoverflow) 1978-12-01

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Legal Events

Date Code Title Description
OI Miscellaneous see part 1
8181 Inventor (new situation)

Free format text: BOUX, RENE, VERSAILLES, FR

D2 Grant after examination
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8339 Ceased/non-payment of the annual fee