DE2521909A1 - Messverfahren und messanordnung - Google Patents

Messverfahren und messanordnung

Info

Publication number
DE2521909A1
DE2521909A1 DE19752521909 DE2521909A DE2521909A1 DE 2521909 A1 DE2521909 A1 DE 2521909A1 DE 19752521909 DE19752521909 DE 19752521909 DE 2521909 A DE2521909 A DE 2521909A DE 2521909 A1 DE2521909 A1 DE 2521909A1
Authority
DE
Germany
Prior art keywords
measuring
semiconductor
area
semiconductor material
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19752521909
Other languages
German (de)
English (en)
Other versions
DE2521909C2 (https=
Inventor
Thomas Ambridge
Ean Grant Bremner
Marc Marian Faktor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Telecommunications PLC
Original Assignee
Post Office
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Post Office filed Critical Post Office
Publication of DE2521909A1 publication Critical patent/DE2521909A1/de
Application granted granted Critical
Publication of DE2521909C2 publication Critical patent/DE2521909C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/207—Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE19752521909 1974-05-16 1975-05-16 Messverfahren und messanordnung Granted DE2521909A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2190374 1974-05-16
GB21902/74A GB1482929A (en) 1974-05-16 1974-05-16 Apparatus and method for measuring carrier concentration in semiconductor materials

Publications (2)

Publication Number Publication Date
DE2521909A1 true DE2521909A1 (de) 1975-12-04
DE2521909C2 DE2521909C2 (https=) 1987-06-19

Family

ID=26255598

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19752521909 Granted DE2521909A1 (de) 1974-05-16 1975-05-16 Messverfahren und messanordnung

Country Status (5)

Country Link
JP (1) JPS5127062A (https=)
DE (1) DE2521909A1 (https=)
FR (1) FR2271569B1 (https=)
GB (1) GB1482929A (https=)
SE (1) SE407629B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0531686A (ja) * 1991-07-24 1993-02-09 Nissan Motor Co Ltd ユニツト型ロボツト
CN107102038B (zh) * 2017-06-12 2023-04-11 重庆交通大学 基于等效串联电容测量的拉索锈蚀损伤检测系统及方法
CN113030188A (zh) * 2021-03-08 2021-06-25 内蒙古工业大学 一种半导体材料载流子浓度的检测方法
CN119667427B (zh) * 2024-11-22 2026-03-27 京东方华灿光电(浙江)有限公司 高电子迁移率晶体管的背景载流子浓度的测量方法及装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2220339A1 (de) * 1972-03-30 1973-10-31 Bbc Brown Boveri & Cie Verfahren und einrichtung zur untersuchung von dotiertem halbleitermaterial

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2220339A1 (de) * 1972-03-30 1973-10-31 Bbc Brown Boveri & Cie Verfahren und einrichtung zur untersuchung von dotiertem halbleitermaterial

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
GB-Z.: Journal of Physics E. Scientific Instruments 1971, Vol.4, S.213-221 *
US-Z.: IEEE Transactions on Electron Devices, Vol. ED-16 No.5, May 69, S.445-449 *

Also Published As

Publication number Publication date
FR2271569A1 (https=) 1975-12-12
FR2271569B1 (https=) 1981-04-10
GB1482929A (en) 1977-08-17
JPS5127062A (en) 1976-03-06
JPS5342662B2 (https=) 1978-11-14
DE2521909C2 (https=) 1987-06-19
SE407629B (sv) 1979-04-02
SE7505618L (sv) 1975-11-17

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Legal Events

Date Code Title Description
OF Willingness to grant licences before publication of examined application
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BRITISH TELECOMMUNICATIONS P.L.C., LONDON, GB

8328 Change in the person/name/address of the agent

Free format text: BEETZ SEN., R., DIPL.-ING. BEETZ JUN., R., DIPL.-ING. DR.-ING. TIMPE, W., DR.-ING. SIEGFRIED, J., DIPL.-ING. SCHMITT-FUMIAN, W., PROF. DIPL.-CHEM. DR.RER.NAT., PAT.-ANWAELTE, 8000 MUENCHEN