GB1482929A - Apparatus and method for measuring carrier concentration in semiconductor materials - Google Patents

Apparatus and method for measuring carrier concentration in semiconductor materials

Info

Publication number
GB1482929A
GB1482929A GB21902/74A GB2190274A GB1482929A GB 1482929 A GB1482929 A GB 1482929A GB 21902/74 A GB21902/74 A GB 21902/74A GB 2190274 A GB2190274 A GB 2190274A GB 1482929 A GB1482929 A GB 1482929A
Authority
GB
United Kingdom
Prior art keywords
semi
conductor
diode
signal
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB21902/74A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Post Office
Original Assignee
Post Office
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Post Office filed Critical Post Office
Priority to GB21902/74A priority Critical patent/GB1482929A/en
Priority to SE7505618A priority patent/SE407629B/xx
Priority to DE19752521909 priority patent/DE2521909A1/de
Priority to FR7515545A priority patent/FR2271569B1/fr
Priority to JP50058456A priority patent/JPS5127062A/ja
Publication of GB1482929A publication Critical patent/GB1482929A/en
Priority to US05/899,990 priority patent/US4168212A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/207—Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
GB21902/74A 1974-05-16 1974-05-16 Apparatus and method for measuring carrier concentration in semiconductor materials Expired GB1482929A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB21902/74A GB1482929A (en) 1974-05-16 1974-05-16 Apparatus and method for measuring carrier concentration in semiconductor materials
SE7505618A SE407629B (sv) 1974-05-16 1975-05-15 Sett och anordning for bestemning av berarkoncentration som en funktion av djup i ett halvledarmaterial
DE19752521909 DE2521909A1 (de) 1974-05-16 1975-05-16 Messverfahren und messanordnung
FR7515545A FR2271569B1 (https=) 1974-05-16 1975-05-16
JP50058456A JPS5127062A (en) 1974-05-16 1975-05-16 Handotaizairyonoshoteinoparameetaosokuteisurusochi oyobi hoho
US05/899,990 US4168212A (en) 1974-05-16 1978-04-25 Determining semiconductor characteristic

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2190374 1974-05-16
GB21902/74A GB1482929A (en) 1974-05-16 1974-05-16 Apparatus and method for measuring carrier concentration in semiconductor materials

Publications (1)

Publication Number Publication Date
GB1482929A true GB1482929A (en) 1977-08-17

Family

ID=26255598

Family Applications (1)

Application Number Title Priority Date Filing Date
GB21902/74A Expired GB1482929A (en) 1974-05-16 1974-05-16 Apparatus and method for measuring carrier concentration in semiconductor materials

Country Status (5)

Country Link
JP (1) JPS5127062A (https=)
DE (1) DE2521909A1 (https=)
FR (1) FR2271569B1 (https=)
GB (1) GB1482929A (https=)
SE (1) SE407629B (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107102038A (zh) * 2017-06-12 2017-08-29 重庆交通大学 基于等效串联电容测量的拉索锈蚀损伤检测系统及方法
CN113030188A (zh) * 2021-03-08 2021-06-25 内蒙古工业大学 一种半导体材料载流子浓度的检测方法
CN119667427A (zh) * 2024-11-22 2025-03-21 京东方华灿光电(浙江)有限公司 高电子迁移率晶体管的背景载流子浓度的测量方法及装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0531686A (ja) * 1991-07-24 1993-02-09 Nissan Motor Co Ltd ユニツト型ロボツト

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH543098A (de) * 1972-03-30 1973-10-15 Bbc Brown Boveri & Cie Verfahren und Einrichtung zur Untersuchung von dotiertem Halbleitermaterial

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107102038A (zh) * 2017-06-12 2017-08-29 重庆交通大学 基于等效串联电容测量的拉索锈蚀损伤检测系统及方法
CN113030188A (zh) * 2021-03-08 2021-06-25 内蒙古工业大学 一种半导体材料载流子浓度的检测方法
CN119667427A (zh) * 2024-11-22 2025-03-21 京东方华灿光电(浙江)有限公司 高电子迁移率晶体管的背景载流子浓度的测量方法及装置

Also Published As

Publication number Publication date
FR2271569A1 (https=) 1975-12-12
FR2271569B1 (https=) 1981-04-10
DE2521909A1 (de) 1975-12-04
JPS5127062A (en) 1976-03-06
JPS5342662B2 (https=) 1978-11-14
DE2521909C2 (https=) 1987-06-19
SE407629B (sv) 1979-04-02
SE7505618L (sv) 1975-11-17

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
746 Register noted 'licences of right' (sect. 46/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 19950513