JPS5342662B2 - - Google Patents
Info
- Publication number
- JPS5342662B2 JPS5342662B2 JP5845675A JP5845675A JPS5342662B2 JP S5342662 B2 JPS5342662 B2 JP S5342662B2 JP 5845675 A JP5845675 A JP 5845675A JP 5845675 A JP5845675 A JP 5845675A JP S5342662 B2 JPS5342662 B2 JP S5342662B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
- H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
- H10P74/207—Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Power Engineering (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2190374 | 1974-05-16 | ||
| GB21902/74A GB1482929A (en) | 1974-05-16 | 1974-05-16 | Apparatus and method for measuring carrier concentration in semiconductor materials |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5127062A JPS5127062A (en) | 1976-03-06 |
| JPS5342662B2 true JPS5342662B2 (https=) | 1978-11-14 |
Family
ID=26255598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50058456A Granted JPS5127062A (en) | 1974-05-16 | 1975-05-16 | Handotaizairyonoshoteinoparameetaosokuteisurusochi oyobi hoho |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5127062A (https=) |
| DE (1) | DE2521909A1 (https=) |
| FR (1) | FR2271569B1 (https=) |
| GB (1) | GB1482929A (https=) |
| SE (1) | SE407629B (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0531686A (ja) * | 1991-07-24 | 1993-02-09 | Nissan Motor Co Ltd | ユニツト型ロボツト |
| CN107102038B (zh) * | 2017-06-12 | 2023-04-11 | 重庆交通大学 | 基于等效串联电容测量的拉索锈蚀损伤检测系统及方法 |
| CN113030188A (zh) * | 2021-03-08 | 2021-06-25 | 内蒙古工业大学 | 一种半导体材料载流子浓度的检测方法 |
| CN119667427B (zh) * | 2024-11-22 | 2026-03-27 | 京东方华灿光电(浙江)有限公司 | 高电子迁移率晶体管的背景载流子浓度的测量方法及装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH543098A (de) * | 1972-03-30 | 1973-10-15 | Bbc Brown Boveri & Cie | Verfahren und Einrichtung zur Untersuchung von dotiertem Halbleitermaterial |
-
1974
- 1974-05-16 GB GB21902/74A patent/GB1482929A/en not_active Expired
-
1975
- 1975-05-15 SE SE7505618A patent/SE407629B/xx not_active IP Right Cessation
- 1975-05-16 FR FR7515545A patent/FR2271569B1/fr not_active Expired
- 1975-05-16 DE DE19752521909 patent/DE2521909A1/de active Granted
- 1975-05-16 JP JP50058456A patent/JPS5127062A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2271569A1 (https=) | 1975-12-12 |
| FR2271569B1 (https=) | 1981-04-10 |
| GB1482929A (en) | 1977-08-17 |
| DE2521909A1 (de) | 1975-12-04 |
| JPS5127062A (en) | 1976-03-06 |
| DE2521909C2 (https=) | 1987-06-19 |
| SE407629B (sv) | 1979-04-02 |
| SE7505618L (sv) | 1975-11-17 |