FR2271569A1 - - Google Patents

Info

Publication number
FR2271569A1
FR2271569A1 FR7515545A FR7515545A FR2271569A1 FR 2271569 A1 FR2271569 A1 FR 2271569A1 FR 7515545 A FR7515545 A FR 7515545A FR 7515545 A FR7515545 A FR 7515545A FR 2271569 A1 FR2271569 A1 FR 2271569A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7515545A
Other languages
French (fr)
Other versions
FR2271569B1 (https=
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Post Office
Original Assignee
Post Office
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Post Office filed Critical Post Office
Publication of FR2271569A1 publication Critical patent/FR2271569A1/fr
Application granted granted Critical
Publication of FR2271569B1 publication Critical patent/FR2271569B1/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/207Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR7515545A 1974-05-16 1975-05-16 Expired FR2271569B1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2190374 1974-05-16
GB21902/74A GB1482929A (en) 1974-05-16 1974-05-16 Apparatus and method for measuring carrier concentration in semiconductor materials

Publications (2)

Publication Number Publication Date
FR2271569A1 true FR2271569A1 (https=) 1975-12-12
FR2271569B1 FR2271569B1 (https=) 1981-04-10

Family

ID=26255598

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7515545A Expired FR2271569B1 (https=) 1974-05-16 1975-05-16

Country Status (5)

Country Link
JP (1) JPS5127062A (https=)
DE (1) DE2521909A1 (https=)
FR (1) FR2271569B1 (https=)
GB (1) GB1482929A (https=)
SE (1) SE407629B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0531686A (ja) * 1991-07-24 1993-02-09 Nissan Motor Co Ltd ユニツト型ロボツト
CN107102038B (zh) * 2017-06-12 2023-04-11 重庆交通大学 基于等效串联电容测量的拉索锈蚀损伤检测系统及方法
CN113030188A (zh) * 2021-03-08 2021-06-25 内蒙古工业大学 一种半导体材料载流子浓度的检测方法
CN119667427B (zh) * 2024-11-22 2026-03-27 京东方华灿光电(浙江)有限公司 高电子迁移率晶体管的背景载流子浓度的测量方法及装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH543098A (de) * 1972-03-30 1973-10-15 Bbc Brown Boveri & Cie Verfahren und Einrichtung zur Untersuchung von dotiertem Halbleitermaterial

Also Published As

Publication number Publication date
FR2271569B1 (https=) 1981-04-10
GB1482929A (en) 1977-08-17
DE2521909A1 (de) 1975-12-04
JPS5127062A (en) 1976-03-06
JPS5342662B2 (https=) 1978-11-14
DE2521909C2 (https=) 1987-06-19
SE407629B (sv) 1979-04-02
SE7505618L (sv) 1975-11-17

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Legal Events

Date Code Title Description
TP Transmission of property