DE2521366C2 - Sonde zum selektiven Detektieren mindestens eines Bestandteils mit polaren Molekülen eines gasförmigen Gemisches - Google Patents

Sonde zum selektiven Detektieren mindestens eines Bestandteils mit polaren Molekülen eines gasförmigen Gemisches

Info

Publication number
DE2521366C2
DE2521366C2 DE2521366A DE2521366A DE2521366C2 DE 2521366 C2 DE2521366 C2 DE 2521366C2 DE 2521366 A DE2521366 A DE 2521366A DE 2521366 A DE2521366 A DE 2521366A DE 2521366 C2 DE2521366 C2 DE 2521366C2
Authority
DE
Germany
Prior art keywords
layer
probe
resistance
dielectric
tetraethoxysilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2521366A
Other languages
German (de)
English (en)
Other versions
DE2521366A1 (de
Inventor
Bernard Paris Lacroix
Francis Rueil-Malmaison Pierrot
Jean Noisy-le-Roi Pompei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE2521366A1 publication Critical patent/DE2521366A1/de
Application granted granted Critical
Publication of DE2521366C2 publication Critical patent/DE2521366C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/129—Diode type sensors, e.g. gas sensitive Schottky diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Detection Mechanisms (AREA)
DE2521366A 1974-05-27 1975-05-14 Sonde zum selektiven Detektieren mindestens eines Bestandteils mit polaren Molekülen eines gasförmigen Gemisches Expired DE2521366C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7418213A FR2273275B1 (US08124630-20120228-C00152.png) 1974-05-27 1974-05-27

Publications (2)

Publication Number Publication Date
DE2521366A1 DE2521366A1 (de) 1975-12-11
DE2521366C2 true DE2521366C2 (de) 1985-02-21

Family

ID=9139271

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2521366A Expired DE2521366C2 (de) 1974-05-27 1975-05-14 Sonde zum selektiven Detektieren mindestens eines Bestandteils mit polaren Molekülen eines gasförmigen Gemisches

Country Status (6)

Country Link
US (1) US4025892A (US08124630-20120228-C00152.png)
JP (1) JPS512493A (US08124630-20120228-C00152.png)
DE (1) DE2521366C2 (US08124630-20120228-C00152.png)
FR (1) FR2273275B1 (US08124630-20120228-C00152.png)
GB (1) GB1503355A (US08124630-20120228-C00152.png)
IT (1) IT1038444B (US08124630-20120228-C00152.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3106385A1 (de) * 1980-02-21 1981-12-17 Engström Medical AB, Stockholm Gasdetektor

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2341859A1 (fr) * 1976-02-18 1977-09-16 Radiotechnique Compelec Sonde pour la detection selective de vapeurs, notamment pour la detection de la vapeur d'eau
US4273636A (en) * 1977-05-26 1981-06-16 Kiyoo Shimada Selective chemical sensitive field effect transistor transducers
WO1982000362A1 (en) * 1980-07-21 1982-02-04 Kinjo N Moisture-sensitive element,moisture-sensitive material and manufacturing method for same
US4298855A (en) * 1980-08-26 1981-11-03 Honeywell Inc. Conductive polymer film humidity sensor
JPS5834882A (ja) * 1981-08-25 1983-03-01 Nitto Electric Ind Co Ltd 両面粘着用粘着テ−プ積層体
DE3313150C1 (de) * 1983-04-12 1984-10-04 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Duennschicht-Feuchtsensor zur Messung der absoluten Feuchte und Verfahren zu seiner Herstellung
JPS6050446A (ja) * 1983-08-31 1985-03-20 Nohmi Bosai Kogyo Co Ltd ガス検出素子とその製造方法
JPS6082954A (ja) * 1983-10-14 1985-05-11 Nohmi Bosai Kogyo Co Ltd ガス検出素子とその製造方法
US4795968A (en) * 1986-06-30 1989-01-03 Sri International Gas detection method and apparatus using chemisorption and/or physisorption
US5367285A (en) * 1993-02-26 1994-11-22 Lake Shore Cryotronics, Inc. Metal oxy-nitride resistance films and methods of making the same
WO2011063013A2 (en) * 2009-11-17 2011-05-26 Cubic Corporation Chemical-selective device
IT1402406B1 (it) 2010-10-22 2013-09-04 St Microelectronics Srl Metodo di fabbricazione di un dispositivo sensore di una sostanza gassosa di interesse.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3242007A (en) * 1961-11-15 1966-03-22 Texas Instruments Inc Pyrolytic deposition of protective coatings of semiconductor surfaces
AU5805873A (en) * 1972-07-25 1975-01-16 Koichi Sugaya Humidity sensor electrode assembly
DE2407110C3 (de) * 1974-02-14 1981-04-23 Siemens AG, 1000 Berlin und 8000 München Sensor zum Nachweis einer in einem Gas oder einer Flüssigkeit einthaltenen Substanz

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3106385A1 (de) * 1980-02-21 1981-12-17 Engström Medical AB, Stockholm Gasdetektor

Also Published As

Publication number Publication date
US4025892A (en) 1977-05-24
FR2273275A1 (US08124630-20120228-C00152.png) 1975-12-26
GB1503355A (en) 1978-03-08
FR2273275B1 (US08124630-20120228-C00152.png) 1977-03-11
JPS512493A (US08124630-20120228-C00152.png) 1976-01-10
IT1038444B (it) 1979-11-20
DE2521366A1 (de) 1975-12-11

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Legal Events

Date Code Title Description
OD Request for examination
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee