DE2512828C3 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number
DE2512828C3
DE2512828C3 DE2512828A DE2512828A DE2512828C3 DE 2512828 C3 DE2512828 C3 DE 2512828C3 DE 2512828 A DE2512828 A DE 2512828A DE 2512828 A DE2512828 A DE 2512828A DE 2512828 C3 DE2512828 C3 DE 2512828C3
Authority
DE
Germany
Prior art keywords
rotor shaft
molecular pump
pump
bearing
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2512828A
Other languages
German (de)
English (en)
Other versions
DE2512828A1 (de
DE2512828B2 (de
Inventor
Karl-Heinz Ing.(Grad.) 5170 Juelich Klatt
Eckard Ing.(Grad.) 5160 Dueren Kuessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Priority to DE2512828A priority Critical patent/DE2512828C3/de
Priority to CH143876A priority patent/CH613259A5/xx
Priority to FR7604590A priority patent/FR2305617A1/fr
Priority to GB11264/76A priority patent/GB1537123A/en
Priority to JP51030018A priority patent/JPS51116415A/ja
Publication of DE2512828A1 publication Critical patent/DE2512828A1/de
Priority to US05/861,546 priority patent/US4180370A/en
Publication of DE2512828B2 publication Critical patent/DE2512828B2/de
Application granted granted Critical
Publication of DE2512828C3 publication Critical patent/DE2512828C3/de
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/60—Shafts
    • F05D2240/61—Hollow

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE2512828A 1975-03-22 1975-03-22 Turbomolekularpumpe Expired DE2512828C3 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE2512828A DE2512828C3 (de) 1975-03-22 1975-03-22 Turbomolekularpumpe
CH143876A CH613259A5 (en) 1975-03-22 1976-02-05 Turbomolecular drag pump and its use for gas analysis
FR7604590A FR2305617A1 (fr) 1975-03-22 1976-02-19 Turbopompe moleculaire
GB11264/76A GB1537123A (en) 1975-03-22 1976-03-19 Turbo-molecular pumps
JP51030018A JPS51116415A (en) 1975-03-22 1976-03-22 Turbomolecular pumps
US05/861,546 US4180370A (en) 1975-03-22 1977-12-19 Turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2512828A DE2512828C3 (de) 1975-03-22 1975-03-22 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
DE2512828A1 DE2512828A1 (de) 1976-09-30
DE2512828B2 DE2512828B2 (de) 1978-03-23
DE2512828C3 true DE2512828C3 (de) 1978-11-16

Family

ID=5942225

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2512828A Expired DE2512828C3 (de) 1975-03-22 1975-03-22 Turbomolekularpumpe

Country Status (5)

Country Link
JP (1) JPS51116415A (enExample)
CH (1) CH613259A5 (enExample)
DE (1) DE2512828C3 (enExample)
FR (1) FR2305617A1 (enExample)
GB (1) GB1537123A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
DE29715035U1 (de) * 1997-08-22 1997-10-30 Leybold Vakuum GmbH, 50968 Köln Reibungsvakuumpumpe
DE102008036623A1 (de) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH344128A (de) * 1955-11-05 1960-01-31 Sulzer Ag Aus Turbine und von ihr angetriebenem, elektrischem Generator bestehende Maschinengruppe
US3074348A (en) * 1959-02-17 1963-01-22 Atomic Energy Authority Uk Centrifugal pumps
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives

Also Published As

Publication number Publication date
FR2305617B1 (enExample) 1981-10-09
JPS51116415A (en) 1976-10-13
GB1537123A (en) 1978-12-29
DE2512828A1 (de) 1976-09-30
DE2512828B2 (de) 1978-03-23
FR2305617A1 (fr) 1976-10-22
CH613259A5 (en) 1979-09-14

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee