JPS51116415A - Turbomolecular pumps - Google Patents

Turbomolecular pumps

Info

Publication number
JPS51116415A
JPS51116415A JP51030018A JP3001876A JPS51116415A JP S51116415 A JPS51116415 A JP S51116415A JP 51030018 A JP51030018 A JP 51030018A JP 3001876 A JP3001876 A JP 3001876A JP S51116415 A JPS51116415 A JP S51116415A
Authority
JP
Japan
Prior art keywords
turbomolecular pumps
turbomolecular
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51030018A
Other languages
English (en)
Japanese (ja)
Inventor
Haintsu Kuratsuto Karuru
Kiyutsuseru Etsukaruto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Publication of JPS51116415A publication Critical patent/JPS51116415A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/60—Shafts
    • F05D2240/61—Hollow

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP51030018A 1975-03-22 1976-03-22 Turbomolecular pumps Pending JPS51116415A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2512828A DE2512828C3 (de) 1975-03-22 1975-03-22 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
JPS51116415A true JPS51116415A (en) 1976-10-13

Family

ID=5942225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51030018A Pending JPS51116415A (en) 1975-03-22 1976-03-22 Turbomolecular pumps

Country Status (5)

Country Link
JP (1) JPS51116415A (enExample)
CH (1) CH613259A5 (enExample)
DE (1) DE2512828C3 (enExample)
FR (1) FR2305617A1 (enExample)
GB (1) GB1537123A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
DE29715035U1 (de) * 1997-08-22 1997-10-30 Leybold Vakuum GmbH, 50968 Köln Reibungsvakuumpumpe
DE102008036623A1 (de) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH344128A (de) * 1955-11-05 1960-01-31 Sulzer Ag Aus Turbine und von ihr angetriebenem, elektrischem Generator bestehende Maschinengruppe
US3074348A (en) * 1959-02-17 1963-01-22 Atomic Energy Authority Uk Centrifugal pumps
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives

Also Published As

Publication number Publication date
FR2305617B1 (enExample) 1981-10-09
DE2512828C3 (de) 1978-11-16
GB1537123A (en) 1978-12-29
DE2512828A1 (de) 1976-09-30
DE2512828B2 (de) 1978-03-23
FR2305617A1 (fr) 1976-10-22
CH613259A5 (en) 1979-09-14

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