CH613259A5 - Turbomolecular drag pump and its use for gas analysis - Google Patents

Turbomolecular drag pump and its use for gas analysis

Info

Publication number
CH613259A5
CH613259A5 CH143876A CH143876A CH613259A5 CH 613259 A5 CH613259 A5 CH 613259A5 CH 143876 A CH143876 A CH 143876A CH 143876 A CH143876 A CH 143876A CH 613259 A5 CH613259 A5 CH 613259A5
Authority
CH
Switzerland
Prior art keywords
gas analysis
drag pump
turbomolecular drag
turbomolecular
pump
Prior art date
Application number
CH143876A
Other languages
English (en)
Inventor
Karl-Heinz Klatt
Eckard Kuessel
Original Assignee
Kernforschungsanlage Juelich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich filed Critical Kernforschungsanlage Juelich
Publication of CH613259A5 publication Critical patent/CH613259A5/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/60—Shafts
    • F05D2240/61—Hollow

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CH143876A 1975-03-22 1976-02-05 Turbomolecular drag pump and its use for gas analysis CH613259A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2512828A DE2512828C3 (de) 1975-03-22 1975-03-22 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
CH613259A5 true CH613259A5 (en) 1979-09-14

Family

ID=5942225

Family Applications (1)

Application Number Title Priority Date Filing Date
CH143876A CH613259A5 (en) 1975-03-22 1976-02-05 Turbomolecular drag pump and its use for gas analysis

Country Status (5)

Country Link
JP (1) JPS51116415A (enExample)
CH (1) CH613259A5 (enExample)
DE (1) DE2512828C3 (enExample)
FR (1) FR2305617A1 (enExample)
GB (1) GB1537123A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
DE29715035U1 (de) * 1997-08-22 1997-10-30 Leybold Vakuum GmbH, 50968 Köln Reibungsvakuumpumpe
DE102008036623A1 (de) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH344128A (de) * 1955-11-05 1960-01-31 Sulzer Ag Aus Turbine und von ihr angetriebenem, elektrischem Generator bestehende Maschinengruppe
US3074348A (en) * 1959-02-17 1963-01-22 Atomic Energy Authority Uk Centrifugal pumps
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives

Also Published As

Publication number Publication date
FR2305617B1 (enExample) 1981-10-09
JPS51116415A (en) 1976-10-13
DE2512828C3 (de) 1978-11-16
GB1537123A (en) 1978-12-29
DE2512828A1 (de) 1976-09-30
DE2512828B2 (de) 1978-03-23
FR2305617A1 (fr) 1976-10-22

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Legal Events

Date Code Title Description
PL Patent ceased
PL Patent ceased