FR2305617A1 - Turbopompe moleculaire - Google Patents

Turbopompe moleculaire

Info

Publication number
FR2305617A1
FR2305617A1 FR7604590A FR7604590A FR2305617A1 FR 2305617 A1 FR2305617 A1 FR 2305617A1 FR 7604590 A FR7604590 A FR 7604590A FR 7604590 A FR7604590 A FR 7604590A FR 2305617 A1 FR2305617 A1 FR 2305617A1
Authority
FR
France
Prior art keywords
molecular turbopump
turbopump
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7604590A
Other languages
English (en)
French (fr)
Other versions
FR2305617B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Publication of FR2305617A1 publication Critical patent/FR2305617A1/fr
Application granted granted Critical
Publication of FR2305617B1 publication Critical patent/FR2305617B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/60—Shafts
    • F05D2240/61—Hollow

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
FR7604590A 1975-03-22 1976-02-19 Turbopompe moleculaire Granted FR2305617A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2512828A DE2512828C3 (de) 1975-03-22 1975-03-22 Turbomolekularpumpe

Publications (2)

Publication Number Publication Date
FR2305617A1 true FR2305617A1 (fr) 1976-10-22
FR2305617B1 FR2305617B1 (enExample) 1981-10-09

Family

ID=5942225

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7604590A Granted FR2305617A1 (fr) 1975-03-22 1976-02-19 Turbopompe moleculaire

Country Status (5)

Country Link
JP (1) JPS51116415A (enExample)
CH (1) CH613259A5 (enExample)
DE (1) DE2512828C3 (enExample)
FR (1) FR2305617A1 (enExample)
GB (1) GB1537123A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
DE29715035U1 (de) * 1997-08-22 1997-10-30 Leybold Vakuum GmbH, 50968 Köln Reibungsvakuumpumpe
DE102008036623A1 (de) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH344128A (de) * 1955-11-05 1960-01-31 Sulzer Ag Aus Turbine und von ihr angetriebenem, elektrischem Generator bestehende Maschinengruppe
FR83295E (fr) * 1959-02-17 1964-07-17 Atomic Energy Authority Uk Appareil à pompe centrifuge pour le prélèvement d'échantillons de liquides radioactifs
FR2161180A5 (enExample) * 1971-11-16 1973-07-06 Cit Alcatel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH344128A (de) * 1955-11-05 1960-01-31 Sulzer Ag Aus Turbine und von ihr angetriebenem, elektrischem Generator bestehende Maschinengruppe
FR83295E (fr) * 1959-02-17 1964-07-17 Atomic Energy Authority Uk Appareil à pompe centrifuge pour le prélèvement d'échantillons de liquides radioactifs
FR2161180A5 (enExample) * 1971-11-16 1973-07-06 Cit Alcatel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
US5528618A (en) * 1992-09-23 1996-06-18 The United States Of America As Represented By The Secretary Of The Air Force Photolytic iodine laser system with turbo-molecular blower

Also Published As

Publication number Publication date
FR2305617B1 (enExample) 1981-10-09
JPS51116415A (en) 1976-10-13
DE2512828C3 (de) 1978-11-16
GB1537123A (en) 1978-12-29
DE2512828A1 (de) 1976-09-30
DE2512828B2 (de) 1978-03-23
CH613259A5 (en) 1979-09-14

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Legal Events

Date Code Title Description
ST Notification of lapse