DE2507731C3 - Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung - Google Patents

Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung

Info

Publication number
DE2507731C3
DE2507731C3 DE2507731A DE2507731A DE2507731C3 DE 2507731 C3 DE2507731 C3 DE 2507731C3 DE 2507731 A DE2507731 A DE 2507731A DE 2507731 A DE2507731 A DE 2507731A DE 2507731 C3 DE2507731 C3 DE 2507731C3
Authority
DE
Germany
Prior art keywords
platinum
thin
measuring resistor
oxygen
platinum layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2507731A
Other languages
German (de)
English (en)
Other versions
DE2507731A1 (de
DE2507731B2 (de
Inventor
Walter Dipl.-Phys. Dr. 6450 Hanau Diehl
Wolfgang Dr. 8752 Hoerstein Koehler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Deutsche Gold und Silber Scheideanstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsche Gold und Silber Scheideanstalt filed Critical Deutsche Gold und Silber Scheideanstalt
Priority to DE2507731A priority Critical patent/DE2507731C3/de
Priority to FR7603897A priority patent/FR2301902A1/fr
Priority to US05/659,144 priority patent/US4103275A/en
Priority to GB6564/76A priority patent/GB1522221A/en
Priority to JP51018748A priority patent/JPS51109880A/ja
Publication of DE2507731A1 publication Critical patent/DE2507731A1/de
Publication of DE2507731B2 publication Critical patent/DE2507731B2/de
Application granted granted Critical
Publication of DE2507731C3 publication Critical patent/DE2507731C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C1/00—Details
    • H01C1/01—Mounting; Supporting
    • H01C1/016—Mounting; Supporting with compensation for resistor expansion or contraction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
    • H01C7/021—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient formed as one or more layers or coatings

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Thermistors And Varistors (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Physical Vapour Deposition (AREA)
DE2507731A 1975-02-22 1975-02-22 Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung Expired DE2507731C3 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE2507731A DE2507731C3 (de) 1975-02-22 1975-02-22 Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung
FR7603897A FR2301902A1 (fr) 1975-02-22 1976-02-12 Resistance de mesure pour thermometres a resistance et son procede de fabrication
US05/659,144 US4103275A (en) 1975-02-22 1976-02-18 Resistance element for resistance thermometer and process for its manufacturing
GB6564/76A GB1522221A (en) 1975-02-22 1976-02-19 Resistance element for a resistance thermometer and a process for its production
JP51018748A JPS51109880A (en) 1975-02-22 1976-02-23 Teikoondokeiyoteikosokuteisochioyobisonoseiho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2507731A DE2507731C3 (de) 1975-02-22 1975-02-22 Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung

Publications (3)

Publication Number Publication Date
DE2507731A1 DE2507731A1 (de) 1976-09-02
DE2507731B2 DE2507731B2 (de) 1977-04-14
DE2507731C3 true DE2507731C3 (de) 1978-09-07

Family

ID=5939571

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2507731A Expired DE2507731C3 (de) 1975-02-22 1975-02-22 Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung

Country Status (5)

Country Link
US (1) US4103275A (enExample)
JP (1) JPS51109880A (enExample)
DE (1) DE2507731C3 (enExample)
FR (1) FR2301902A1 (enExample)
GB (1) GB1522221A (enExample)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2527739C3 (de) * 1975-06-21 1978-08-31 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer
IE47186B1 (en) * 1977-09-13 1984-01-11 Johnson Matthey Co Ltd Improvements in and relating to the measurement of temperature
US4286377A (en) * 1978-07-03 1981-09-01 General Electric Company Method of manufacture for a resistance heater and temperature sensor
EP0017359B1 (en) * 1979-03-20 1984-08-01 Matsushita Electric Industrial Co., Ltd. Ceramic type sensor device
DE2920901C3 (de) * 1979-05-23 1982-03-18 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Bolometer
US4242659A (en) * 1979-10-15 1980-12-30 Leeds & Northrup Company Thin film resistance thermometer detector probe assembly
US4469717A (en) * 1980-02-29 1984-09-04 Leeds & Northrup Company Thin film resistance thermometer with a predetermined temperature coefficient of resistance and its method of manufacture
US4375056A (en) * 1980-02-29 1983-02-22 Leeds & Northrup Company Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture
US4389876A (en) * 1980-08-26 1983-06-28 Honeywell Inc. Temperature sensor and detector cell utilizing the same
GB2096645B (en) * 1981-03-24 1984-10-31 Rosemount Eng Co Ltd A method of producing a resistance element for a resistance thermometer
US4436438A (en) 1981-07-21 1984-03-13 Wahl Instruments, Inc. Multiple probe temperature measuring system and probes therefor
DE3146020C2 (de) * 1981-11-20 1985-11-07 Danfoss A/S, Nordborg Temperaturabhängiger Widerstand, insbesondere für Widerstandsthermometer
US5089293A (en) * 1984-07-31 1992-02-18 Rosemount Inc. Method for forming a platinum resistance thermometer
CA1250155A (en) * 1984-07-31 1989-02-21 James A. Ruf Platinum resistance thermometer
IN165267B (enExample) * 1984-07-31 1989-09-09 Rosemount Inc
JPS6140513A (ja) * 1984-08-01 1986-02-26 Hitachi Ltd 薄膜抵抗式空気流量検出装置及び薄膜抵抗式計測素子
DE3430075A1 (de) * 1984-08-16 1986-02-27 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zum herstellen einer messsonde zur verwendung bei der messung der temperatur oder masse eines stroemenden mediums
FR2586105B1 (fr) * 1985-08-06 1990-08-31 Veglia Circuit conducteur et procede de fabrication de ce circuit
DE3630393C2 (de) * 1985-09-10 1994-06-23 Sharp Kk Widerstandsthermometer
US4791398A (en) * 1986-02-13 1988-12-13 Rosemount Inc. Thin film platinum resistance thermometer with high temperature diffusion barrier
US4719443A (en) * 1986-04-03 1988-01-12 General Electric Company Low capacitance power resistor using beryllia dielectric heat sink layer and low toxicity method for its manufacture
US4855667A (en) * 1988-06-13 1989-08-08 E. I. Du Pont De Nemours And Company Parallel plate dielectric analyzer
US5065106A (en) * 1988-06-13 1991-11-12 Ta Instruments, Inc. Apparatus and method for analyzing dielectric properties using a single surface electrode and force monitoring and adjusting
US4899102A (en) * 1988-06-13 1990-02-06 E. I. Du Pont De Nemours And Company Electrode system for a parallel plate dielectric analyzer
JPH0687021B2 (ja) * 1988-10-29 1994-11-02 日本碍子株式会社 検出素子の製造法
CA2007729A1 (en) * 1989-02-17 1990-08-17 Emil R. Plasko Heating element control
US5128516A (en) * 1989-02-17 1992-07-07 Therm-O-Disc, Incorporated Heating element control
DE3906405A1 (de) * 1989-03-01 1990-09-06 Leybold Ag Verfahren zur herstellung eines schichtwiderstands
DE4036109C2 (de) * 1989-11-17 1997-01-09 Murata Manufacturing Co Widerstandstemperaturfühler
US5041809A (en) * 1990-01-08 1991-08-20 General Electric Company Glass-ceramic temperature sensor for heating ovens
US5026971A (en) * 1990-01-08 1991-06-25 General Electric Company Temperature control system for a heating oven using a glass-ceramic temperature sensor
US5053740A (en) * 1990-01-11 1991-10-01 General Electric Company Porcelain enamel temperature sensor for heating ovens
DE4030892C2 (de) * 1990-09-29 2000-06-29 Schlafhorst & Co W Spuleinrichtung an einer Textilmaschine
WO1992015101A1 (de) * 1991-02-15 1992-09-03 Siemens Aktiengesellschaft Hochtemperatur-platinmetall-temperatursensor
US5123752A (en) * 1991-04-15 1992-06-23 Eastman Kodak Company Wear resistant temperature sensing device
US5521576A (en) * 1993-10-06 1996-05-28 Collins; Franklyn M. Fine-line thick film resistors and resistor networks and method of making same
DE19512813C1 (de) * 1995-04-05 1996-06-20 Sensotherm Temperatursensorik Verfahren zur Herstellung von Bauelementen
US6025205A (en) * 1997-01-07 2000-02-15 Tong Yang Cement Corporation Apparatus and methods of forming preferred orientation-controlled platinum films using nitrogen
US6054331A (en) * 1997-01-15 2000-04-25 Tong Yang Cement Corporation Apparatus and methods of depositing a platinum film with anti-oxidizing function over a substrate
US6498097B1 (en) 1997-05-06 2002-12-24 Tong Yang Cement Corporation Apparatus and method of forming preferred orientation-controlled platinum film using oxygen
US6004471A (en) * 1998-02-05 1999-12-21 Opto Tech Corporation Structure of the sensing element of a platinum resistance thermometer and method for manufacturing the same
EP0973020B1 (de) * 1998-07-16 2009-06-03 EPIQ Sensor-Nite N.V. Elektrischer Temperatur-Sensor mit Mehrfachschicht
GB0116884D0 (en) * 2001-07-11 2001-09-05 Ceramaspeed Ltd Temperature sensor assembly and radiant electric heater incorporating the same
US6692145B2 (en) * 2001-10-31 2004-02-17 Wisconsin Alumni Research Foundation Micromachined scanning thermal probe method and apparatus
US7073938B2 (en) * 2001-10-31 2006-07-11 The Regents Of The University Of Michigan Micromachined arrayed thermal probe apparatus, system for thermal scanning a sample in a contact mode and cantilevered reference probe for use therein
US20030198278A1 (en) * 2002-01-18 2003-10-23 Chu-Yih Yu Thermometer having a disposable temperature probe
JP4009520B2 (ja) * 2002-11-05 2007-11-14 日東電工株式会社 温度測定用フレキシブル配線回路基板
US7733212B2 (en) * 2007-04-26 2010-06-08 Hewlett-Packard Development Company, L.P. Resistor
DE102007023434B4 (de) 2007-05-16 2017-07-06 Innovative Sensor Technology Ist Ag Widerstandsthermometer
US20110068890A1 (en) * 2008-03-12 2011-03-24 University Of Electronic Science And Technology Of China Ntc thin film thermal resistor and a method of producing it

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2021661A (en) * 1932-11-17 1935-11-19 Dispersion Cathodique Sa Electrical heating element of large surface for low temperatures
US2292065A (en) * 1940-08-03 1942-08-04 Westinghouse Electric & Mfg Co Magnesium oxide insulation
US2820727A (en) * 1956-05-22 1958-01-21 Gen Electric Method of metallizing ceramic bodies
US3356982A (en) * 1964-04-13 1967-12-05 Angstrohm Prec Inc Metal film resistor for low range and linear temperature coefficient
GB1097595A (en) * 1964-06-22 1968-01-03 Rosemount Eng Co Ltd Improvements in or relating to methods of making resistance thermometers
BE679454A (enExample) * 1965-04-26 1966-09-16
US3703456A (en) * 1969-12-22 1972-11-21 Gen Electric Method of making resistor thin films by reactive sputtering from a composite source
US3694789A (en) * 1970-02-09 1972-09-26 Rosemount Eng Co Ltd Electrical resistance element
US3701884A (en) * 1971-07-16 1972-10-31 Thermo Couple Products Co Metal cast cooking unit having a temperature sensitive control sensor
US3833410A (en) * 1971-12-30 1974-09-03 Trw Inc High stability thin film alloy resistors
US3845443A (en) * 1972-06-14 1974-10-29 Bailey Meter Co Thin film resistance thermometer
DE2527739C3 (de) * 1975-06-21 1978-08-31 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer

Also Published As

Publication number Publication date
DE2507731A1 (de) 1976-09-02
FR2301902B1 (enExample) 1978-08-18
US4103275A (en) 1978-07-25
FR2301902A1 (fr) 1976-09-17
JPS51109880A (en) 1976-09-29
DE2507731B2 (de) 1977-04-14
GB1522221A (en) 1978-08-23

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee